(3) Radio Frequency Plasma CVD (RFCVD)RF e ka sebediswa ho hlahisa plasma ka mekgwa e mmedi e fapaneng, mokgwa wa ho kopanya ka bokgoni le mokgwa wa ho kopanya ka tsela e inductive.RF plasma CVD e sebedisa maqhubu a 13.56 MHz. Molemo wa plasma ya RF ke hore e hasanya sebakeng se seholo haholo ho feta plasma ya microwave. Leha ho le jwalo, moedi wa plasma e kopantsweng ka bokgoni ya RF ke hore maqhubu a plasma ha a lokele ho qhalana, haholoholo haeba plasma e na le argon. Plasma e kopantsweng ka bokgoni ha e lokele ho hodisa difilimi tsa daemane tsa boleng bo hodimo kaha ho phatloha ha ion ho tswa ho plasma ho ka lebisa tshenyong e kgolo ho daemane. Difilimi tsa daemane tsa polycrystalline di hodisitswe ho sebediswa plasma e bakwang ke RF tlasa maemo a ho bewa a tshwanang le plasma ya microwave CVD. Difilimi tsa daemane tsa epitaxial tse tshwanang le tsona di fumanwe ho sebediswa plasma e ntlafaditsweng ke RF.
(4) DC Plasma CVD
Plasma ea DC ke mokhoa o mong oa ho kenya tšebetsong mohloli oa khase (ka kakaretso motsoako oa H2, le khase ea hydrocarbon) bakeng sa kholo ea filimi ea daemane. CVD e thusoang ke plasma ea DC e na le bokhoni ba ho holisa libaka tse kholo tsa lifilimi tsa daemane, 'me boholo ba sebaka sa kholo bo lekanyelitsoe feela ke boholo ba li-electrode le phepelo ea motlakase ea DC. Molemo o mong oa CVD e thusoang ke plasma ea DC ke ho thehoa ha ente ea DC, 'me lifilimi tse tloaelehileng tsa daemane tse fumanoang ke sistimi ena li beoa ka sekhahla sa 80 mm/h. Ho phaella moo, kaha mekhoa e fapaneng ea DC arc e ka beoa lifilimi tsa daemane tsa boleng bo holimo holim'a li-substrate tse seng tsa daemane ka sekhahla se phahameng sa ho beoa, li fana ka mokhoa o rekisoang bakeng sa ho beoa ha lifilimi tsa daemane.
(5) Electron cyclotron resonance microwave plasma e ntlafalitsoeng chemical vapor deposition (ECR-MPECVD)Plasma ea DC, RF plasma, le microwave plasma tse hlalositsoeng pejana kaofela li arola le ho bolisa H2, kapa li-hydrocarbon, hore e be lihlopha tsa athomo ea hydrogen le carbon-hydrogen, ka hona li kenya letsoho ho thehoeng ha lifilimi tse tšesaane tsa daemane. Kaha plasma ea electron cyclotron resonance e ka hlahisa plasma e nang le density e phahameng (>1x1011cm-3), ECR-MPECVD e loketse haholoanyane bakeng sa kholo le ho beoa ha lifilimi tsa daemane. Leha ho le joalo, ka lebaka la khatello e tlase ea khase (10-4- ho isa ho 10-2 Torr) e sebelisoang ts'ebetsong ea ECR, e fellang ka sekhahla se tlase sa ho beoa ha lifilimi tsa daemane, mokhoa ona hajoale o loketse feela ho beoa ha lifilimi tsa daemane laboratoring.
–Sengoloa sena se lokollotsoe ke moetsi oa mochini o koahelang ka vacuum Guangdong Zhenhua
Nako ea poso: Phuptjane-19-2024