Fasahar fina-finan bakin lu'u-lu'u-babi na 2

(3) Ana iya amfani da CVD na Plasma na Mitar Rediyo (RFCVD) RF don samar da plasma ta hanyoyi guda biyu daban-daban, hanyar haɗa capacitive da hanyar haɗa inductive. CVD na plasma na RF yana amfani da mita na 13.56 MHz. Amfanin plasma na RF shine yana yaɗuwa a kan yanki mafi girma fiye da plasma na microwave. Duk da haka, iyakancewar plasma na haɗin capacitive shine cewa mitar plasma ba ta dace da sputtering ba, musamman idan plasma ya ƙunshi argon. Plasma mai haɗin capacitive bai dace da girma fina-finan lu'u-lu'u masu inganci ba tunda fashewar ion daga plasma na iya haifar da mummunan lalacewa ga lu'u-lu'u. An haɓaka fina-finan lu'u-lu'u na polycrystalline ta amfani da plasma da RF ya haifar a ƙarƙashin yanayin ajiya mai kama da CVD na plasma na microwave. An kuma sami fina-finan lu'u-lu'u masu kama da juna ta amfani da CVD da aka haɓaka plasma ta RF.

(4) CVD na plasma na DC

Plasma na DC wata hanya ce ta kunna tushen iskar gas (galibi cakuda H2, da iskar hydrocarbon) don haɓakar fim ɗin lu'u-lu'u. CVD mai taimakon plasma na DC yana da ikon shuka manyan wurare na fina-finan lu'u-lu'u, kuma girman yankin girma yana iyakance ne kawai ta girman electrodes da samar da wutar lantarki na DC. Wata fa'idar CVD mai taimakon plasma na DC ita ce ƙirƙirar allurar DC, kuma fina-finan lu'u-lu'u na yau da kullun da wannan tsarin ya samu ana ajiye su a cikin ƙimar 80 mm/h. Bugu da ƙari, tunda hanyoyi daban-daban na DC arc na iya sanya fina-finan lu'u-lu'u masu inganci akan abubuwan da ba lu'u-lu'u ba a cikin ƙimar ajiya mai yawa, suna ba da hanyar da za a iya tallata fina-finan lu'u-lu'u.

(5) Tasirin sinadarin sinadarai na lantarki (Electron cyclotron resonance microwave) (ECR-MPECVD) An bayyana plasma na DC, RF plasma, da kuma microwave plasma a baya duk suna rabuwa da kuma lalata H2, ko hydrocarbons, zuwa ƙungiyoyin atom hydrogen da carbon-hydrogen atom, ta haka suna ba da gudummawa ga samuwar fina-finan lu'u-lu'u masu sirara. Tunda plasma na lantarki na cyclotron resonance zai iya samar da plasma mai yawa (>1x1011cm-3), ECR-MPECVD ya fi dacewa da girma da kuma adana fina-finan lu'u-lu'u. Duk da haka, saboda ƙarancin matsin lamba na iskar gas (10-4- zuwa 10-2 Torr) da ake amfani da shi a cikin tsarin ECR, wanda ke haifar da ƙarancin adadin adana fina-finan lu'u-lu'u, hanyar a halin yanzu ta dace ne kawai don adana fina-finan lu'u-lu'u a cikin dakin gwaje-gwaje.

–An fitar da wannan labarin ne daga kamfanin kera injin rufewa na injin Guangdong Zhenhua