Cov yeeb yaj kiab nyias nyias ntawm pob zeb diamond - tshooj 2

(3) Xov Tooj Cua Zaus Plasma CVD (RFCVD) RF siv tau los tsim cov plasma los ntawm ob txoj kev sib txawv, txoj kev sib txuas capacitive thiab txoj kev sib txuas inductive. RF plasma CVD siv zaus ntawm 13.56 MHz. Qhov zoo ntawm RF plasma yog tias nws diffuses hla thaj chaw loj dua li microwave plasma. Txawm li cas los xij, qhov txwv ntawm RF capacitively coupled plasma yog tias zaus ntawm plasma tsis zoo tshaj plaws rau sputtering, tshwj xeeb tshaj yog tias plasma muaj argon. Capacitively coupled plasma tsis haum rau kev loj hlob zoo pob zeb diamond zaj duab xis txij li thaum ion bombardment los ntawm plasma tuaj yeem ua rau puas tsuaj loj heev rau pob zeb diamond. Polycrystalline pob zeb diamond zaj duab xis tau loj hlob siv RF induced plasma nyob rau hauv cov xwm txheej deposition zoo ib yam li microwave plasma CVD. Homogeneous epitaxial pob zeb diamond zaj duab xis kuj tau txais siv RF-induced plasma-enhanced CVD.

(4) DC Plasma CVD

DC plasma yog lwm txoj hauv kev los ua kom muaj roj (feem ntau yog sib xyaw ntawm H2, thiab roj hydrocarbon) rau kev loj hlob ntawm cov yeeb yaj kiab pob zeb diamond. DC plasma-assisted CVD muaj peev xwm loj hlob thaj chaw loj ntawm cov yeeb yaj kiab pob zeb diamond, thiab qhov loj ntawm thaj chaw loj hlob tsuas yog txwv los ntawm qhov loj ntawm cov electrodes thiab DC fais fab mov. Lwm qhov zoo ntawm DC plasma-assisted CVD yog kev tsim ntawm DC txhaj tshuaj, thiab cov yeeb yaj kiab pob zeb diamond ib txwm tau txais los ntawm lub kaw lus no tau tso rau ntawm tus nqi ntawm 80 mm / h. Tsis tas li ntawd, txij li ntau txoj hauv kev DC arc tuaj yeem tso cov yeeb yaj kiab pob zeb diamond zoo rau ntawm cov khoom tsis yog pob zeb diamond ntawm cov nqi tso siab, lawv muab txoj hauv kev lag luam rau kev tso cov yeeb yaj kiab pob zeb diamond.

(5) Electron cyclotron resonance microwave plasma enhanced chemical vapor deposition (ECR-MPECVD) Cov DC plasma, RF plasma, thiab microwave plasma piav qhia ua ntej txhua tus dissociate thiab decompose H2, lossis hydrocarbons, mus rau hauv atomic hydrogen thiab carbon-hydrogen atom pawg, yog li pab txhawb rau kev tsim cov pob zeb diamond nyias zaj duab xis. Txij li thaum electron cyclotron resonance plasma tuaj yeem tsim cov plasma ceev ceev (> 1x1011cm-3), ECR-MPECVD yog qhov tsim nyog dua rau kev loj hlob thiab kev tso tawm ntawm cov pob zeb diamond zaj duab xis. Txawm li cas los xij, vim yog qhov siab roj tsawg (10-4- txog 10-2 Torr) siv hauv cov txheej txheem ECR, uas ua rau muaj qhov tso tawm qis ntawm cov pob zeb diamond zaj duab xis, txoj kev tam sim no tsuas yog tsim nyog rau kev tso tawm ntawm cov pob zeb diamond zaj duab xis hauv chav kuaj mob.

– Tsab xov xwm no yog tso tawm los ntawm lub tshuab nqus tsev txheej tshuab Guangdong Zhenhua