(3) I-Radio Frequency Plasma CVD (RFCVD)RF ingasetshenziswa ukukhiqiza i-plasma ngezindlela ezimbili ezihlukene, indlela yokuhlanganisa i-capacitive kanye nendlela yokuhlanganisa inductive.I-plasma ye-RF CVD isebenzisa imvamisa engu-13.56 MHz.Inzuzo ye-RF plasma ukuthi isakazeka endaweni elinganiselwe enkulu kakhulu kune-microwave, i-plasma encane kakhulu kune-microwave. i-plasma iwukuthi imvamisa ye-plasma ayilungile ekuqhumeni, ikakhulukazi uma i-plasma iqukethe i-argon.I-plasma ehlanganiswe nge-capacitively ayifanele ukukhulisa amafilimu edayimane ekhwalithi ephezulu kusukela i-ion bombardment evela ku-plasma ingaholela ekulimaleni okukhulu kwedayimane. Amafilimu edayimane e-Polycrystalline akhuliswe kusetshenziswa i-plasma eyenziwe yi-RF ngaphansi kwezimo zokubeka ezifana ne-microwave plasma CVD.Amafilimu edayimane e-epitaxial alinganayo atholwe kusetshenziswa i-RF-induced plasma-enhanced CVD.
(4) I-DC Plasma CVD
I-DC plasma ingenye indlela yokwenza kusebenze umthombo wegesi (ngokuvamile ingxube ye-H2, negesi ye-hydrocarbon) ukuze ifilimu yedayimane ikhule.I-CVD yase-DC esizwa nge-plasma inamandla okukhulisa izindawo ezinkulu zamafilimu edayimane, futhi ubukhulu bendawo yokukhula bunqunyelwe kuphela ubukhulu bama-electrode kanye ne-DC power supply.Enye inzuzo ye-DC plasma-assisted CVD umjovo we-DC plasma we-DCD wumjovo ojwayelekile we-DC zifakwa ngenani lika-80 mm/h. Ngaphezu kwalokho, njengoba izindlela ezihlukahlukene ze-DC arc zingafaka amafilimu edayimane ekhwalithi ephezulu kuma-substrates angewona awedayimane ngamanani aphezulu okubekwa, zinikeza indlela ethengiswayo yokufakwa kwamafilimu edayimane.
(5) I-Electron cyclotron resonance microwave plasma ethuthukisiwe umhwamuko wamakhemikhali (ECR-MPECVD)I-DC plasma, i-RF plasma, ne-microwave plasma echazwe ngaphambilini yonke ihlukanisa futhi ibole i-H2, noma ama-hydrocarbon, abe amaqembu e-athomu e-hydrogen ne-carbon-hydrogen athomu, ngaleyo ndlela abe nesandla ekwakhiweni kwefilimu elincanyana ledayimane. Njengoba i-electron cyclotron resonance plasma ingakhiqiza i-plasma ephezulu yokuminyana (>1x1011cm-3), i-ECR-MPECVD ifaneleka kakhulu ekukhuleni nasekubekeni amafilimu edayimane. Nokho, ngenxa yokucindezela kwegesi okuphansi (10-4- kuya ku-10-2 Torr) esetshenziswa enqubweni ye-ECR, okuholela ekubekweni okuphansi kwefilimu indlela yedayimane kuphela, indlela yokubeka idayimane ifilimu njengamanje ilabhorethri.
-Le ndatshana ikhishwe ngumkhiqizi womshini we-vacuum coating u-Guangdong Zhenhua
Isikhathi sokuthumela: Jun-19-2024