(3) I-Radio Frequency Plasma CVD (RFCVD)RF inokusetyenziselwa ukuvelisa iplasma ngeendlela ezimbini ezahlukeneyo, indlela yokudibanisa i-capacitive kunye nendlela yokudibanisa i-inductive.I-plasma ye-CVD ye-RF isebenzisa amaza e-13.56 MHz. i-plasma kukuba ukuphindaphinda kweplasma akulona lilungileyo lokutshiza, ngakumbi ukuba iplasma iqulethe i-argon.Capacitively edityaniswe iplasma ayifanelekanga ukukhulisa iifilimu zedayimane ezikumgangatho ophezulu ukususela ekubeni i-ion bombardment esuka kwiplasma inokukhokelela kumonakalo omkhulu kwidayimani. Iifilimu zedayimane ze-Polycrystalline zikhuliswe kusetyenziswa iplasma eyenziwe yi-RF phantsi kweemeko zokubeka ezifana ne-microwave plasma CVD. Iifilimu zedayimani ze-epitaxial ezilinganayo ziye zafunyanwa kusetyenziswa i-RF-induced plasma-enhanced CVD.
(4) DC Plasma CVD
I-plasma ye-DC yenye indlela yokuvula umthombo wegesi (ngokubanzi umxube we-H2, kunye negesi ye-hydrocarbon) ye-diamond film growth.DC plasma-assisted CVD inamandla okukhulisa imimandla emikhulu yeefilimu zedayimani, kwaye ubungakanani bendawo yokukhula bulinganiselwe kuphela ngobukhulu bee-electrodes kunye ne-DC power supply.Enye inzuzo ye-DC plasma-incediswe yinkqubo ye-diamond ye-CVD ye-diamond efunyenwe yinkqubo ye-diamond encediswa yi-DCD ifilimu yokuncedisa ifilimu. zifakwe kwireyithi ye-80 mm / h. Ukongeza, kuba iindlela ezahlukeneyo ze-arc ze-DC zinokufaka iifilim zedayimani ezikumgangatho ophezulu kwiindawo ezingezizo idayimani kumazinga aphezulu okubekwa, zibonelela ngendlela ethengiswayo yokubekwa kweefilimu zedayimani.
5 Ekubeni i-electron cyclotron resonance plasma inokuvelisa i-plasma yoxinaniso oluphezulu (> 1x1011cm-3), i-ECR-MPECVD ifaneleka ngakumbi ekukhuleni nasekubekweni kweefilimu zedayimani. Nangona kunjalo, ngenxa yoxinzelelo lwegesi ephantsi (10-4- ukuya ku-10-2 Torr) esetyenziswa kwinkqubo ye-ECR, ephumela kwiqondo eliphantsi lokubeka ifilimu kwifilimu yedayimani kuphela, indlela yokubeka ifilimu yedayimani okwangoku ilabhoratri.
-Eli nqaku likhutshwe ngumenzi womatshini wokugquma uGuangdong Zhenhua
Ixesha lokuposa: Jun-19-2024