Sputtering ke ketsahalo eo ho eona likaroloana tse matla (hangata li-ion tse ntle tsa likhase) li otlang holim'a ntho e tiileng (e ka tlaase e bitsoang thepa e shebiloeng), e bakang liathomo (kapa limolek'hule) holim'a ntho e lebisitsoeng ho tsoa ho eona.
Ketsahalo ena e ile ea sibolloa ke Grove ka 1842 ha thepa ea cathode e fallisetsoa leboteng la vacuum tube nakong ea teko ea ho ithuta ho bola ha cathodic. Mokhoa ona oa sputtering ka substrate deposition ea lifilimi tšesaane e ile ea sibolloa ka 1877, ka lebaka la ho sebelisa mokhoa ona deposition ea lifilimi tšesaane ka mekhahlelo ea pele ea sekhahla sputtering ke tlaase, butle filimi lebelo, e lokela ho hlomamisa ka sesebediswa sa phahameng-khatello le ho feta ka khase affective le tse ling tse letoto la mathata, kahoo ntshetsopele e butle haholo 'me hoo e ka bang ho felloa ke tšepe prefracious feela. dielectrics, le metsoako ea lik'hemik'hale, lisebelisoa tse mabapi le palo e nyane ea lits'ebetso. Ho fihlela lilemong tsa bo-1970, ka lebaka la ho hlaha ha thekenoloji ea magnetron sputtering, ho roala sputtering ho 'nile ha ntlafatsoa ka potlako, ho ile ha qala ho kena tsosoloso ea tsela. Sena se bakoa ke hore mokhoa oa magnetron sputtering o ka thibeloa ke orthogonal electromagnetic field holim'a lielektrone, ho eketsa monyetla oa ho thulana ha lielektrone le limolek'hule tsa khase, eseng feela ho fokotsa motlakase o eketsoang ho cathode, le ho ntlafatsa lebelo la sputtering ea li-ion tse nepahetseng ho cathode e lebisitsoeng, ho fokotsa monyetla oa ho fokotseha ha li-elektronike, ho fokotsa monyetla oa ho fokotseha ha mocheso oa eona. “lebelo le leholo, mocheso o tlase Ditshobotsi tse pedi tse kgolo tsa “lebelo le mocheso o tlase”.
Ho fihlela lilemong tsa bo-1980, leha e ile ea hlaha lilemo tse leshome le metso e 'meli feela, e ikhetha ho tsoa laboratoring, e hlile e le lebaleng la tlhahiso ea boima ba indasteri. Ka tsoelo-pele e tsoelang pele ea saense le thekenoloji, lilemong tsa morao tjena lebaleng la ho roala ha sputtering le ho kenyelletsoa ha ion beam ho matlafalitsoe ho sputtering, ho sebelisoa ha lebone le pharaletseng la mohloli o matla oa ion oa hona joale o kopantsoeng le ho feto-fetoha ha matla a khoheli, 'me ka motsoako oa mokhoa o tloaelehileng oa sputtering oa dipole o entsoeng ka mokhoa o mocha oa sputtering; 'me e tla ba selelekela sa phepelo ea motlakase ea maqhubu a mahareng a chenchana ho mohloli oa sepheo sa magnetron sputtering. Theknoloji ena ea AC magnetron sputtering, e bitsoang twin target sputtering, ha e felise feela phello ea "ho nyamela" ea anode, empa e boetse e rarolla bothata ba "chefo" ea cathode, e ntlafatsang haholo botsitso ba magnetron sputtering, 'me e fana ka motheo o tiileng oa tlhahiso ea indasteri ea lifilimi tse tšesaane. Sena se ntlafalitse haholo botsitso ba magnetron sputtering mme se fane ka motheo o tiileng bakeng sa tlhahiso ea indasteri ea lifilimi tse tšesaane tse kopaneng. Lilemong tsa morao tjena, ho roala sputtering ho fetohile theknoloji e chesang ea ho lokisetsa filimi, e sebetsang tšimong ea theknoloji ea ho roala ka vacuum.
-Sengoliloeng sena se lokolloa kemoetsi oa mochine oa vacuum coatingGuangdong Zhenhua
Nako ea poso: Dec-05-2023