Ko te pupuhi he āhuatanga e pā ai ngā matūriki pūngao (ko te nuinga he katote pai o ngā hau) ki te mata o tētahi mea totoka (e kiia ana ko te rauemi ūnga i raro nei), ka puta ai ngā ngota (ngota rānei) i runga i te mata o te rauemi ūnga mai i taua mea.
I kitea tēnei āhuatanga e Grove i te tau 1842 i te wā i nekehia ai te rauemi katote ki te pakitara o te ngongo korehau i roto i tētahi whakamātautau hei ako i te waikura katote. I kitea tēnei tikanga pupuhi i roto i te whakatakotoranga papa o ngā kiriata angiangi i te tau 1877, nā te whakamahinga o tēnei tikanga whakatakotoranga o ngā kiriata angiangi i ngā wāhanga tuatahi he iti te tere pupuhi, he puhoi te tere kiriata, me whakatū ki roto i te taputapu o te pēhanga teitei me te whakawhiti ki roto i te hau kare ā-roto me ētahi atu raupapa raruraru, nō reira he tino puhoi te whanaketanga me te tata kore, ko ngā konganuku utu nui tauhohe matū, ngā konganuku ātete, ngā dielectrics, me ngā matū matū anake, he iti noa ngā tono rauemi. Tae noa ki te tekau tau atu i 1970, nā te putanga mai o te hangarau pupuhi magnetron, kua tere te whanaketanga o te paninga pupuhi, ka tīmata te uru ki te whakaoranga o te huarahi. Nā te mea ka taea te here i te tikanga magnetron sputtering e te mara hiko orthogonal i runga i ngā irahiko, ka whakanui ake i te tūponotanga o te tukinga o ngā irahiko me ngā ngota hau, ehara i te mea ka whakaiti noa i te ngaohiko i tāpirihia ki te cathode, engari ka whakapai ake i te tere sputtering o ngā katote pai i runga i te cathode ūnga, ka whakaiti i te tūponotanga o te pupuhi o ngā irahiko i runga i te papa, ka whakaiti i tōna pāmahana, me te "tere teitei, pāmahana iti Ko ngā āhuatanga matua e rua o te "tere teitei me te pāmahana iti".
Ahakoa i puta mai i te tekau tau 1980, he mea motuhake mai i te taiwhanga, ā, kua uru atu ki te ao o te hanga papatipu ahumahi. Nā te whanaketanga tonu o te pūtaiao me te hangarau, i ngā tau tata nei, kua piki ake te kaha o te paninga sputtering i roto i te ao o te paninga sputtering me te whakaurunga o te sputtering whakarei ake i te hihi katote, te whakamahinga o te hihi whānui o te pūtake katote kaha me te whakarerekētanga o te mara aukume, me te whakakotahitanga o te sputtering dipole tikanga i hangaia me te aratau sputtering hou; ā, ka whakauruhia te tuku hiko aukume tauutuutu waenga-auau ki te pūtake ūnga sputtering magnetron. Ko tēnei hangarau sputtering magnetron AC auau-waenga, e kiia nei ko te sputtering takirua, ehara i te mea ka whakakore noa i te pānga "ngaro" o te anode, engari ka whakaoti hoki i te raruraru "paitini" o te cathode, e tino whakapai ake ana i te pumau o te sputtering magnetron, ā, e whakarato ana i te turanga pakari mō te hanga ahumahi o ngā kiriata angiangi matū. Kua tino whakapai ake tēnei i te pumau o te sputtering magnetron, ā, kua whakarato i te turanga pakari mō te hanga ahumahi o ngā kiriata angiangi matū. I ngā tau tata nei, kua huri te paninga mirumiru hei hangarau hanga kiriata hou e kaha ana te whakamahi, e kaha ana hoki ki te ao o te hangarau paninga korehau.
–Nā tekaihanga mīhini paninga korehauGuangdong Zhenhua
Wā tuku: Hakihea-05-2023