Kuvugurura no guteza imbere irangi ryo gusiga irangi ry'umwuka mu buryo bwa vacuum sputtering

Gutera umwuka mubi ni ikintu aho uduce duto dufite ingufu (ubusanzwe ni iyoni nziza z’imyuka) tugera ku buso bw’ikintu gikomeye (hepfo cyitwa ibikoresho bigamije), bigatuma atome (cyangwa molekile) ziri ku buso bw’ibikoresho bigamije gusohokamo.

Iki kintu cyavumbuwe na Grove mu 1842 ubwo ibikoresho bya cathode byimurirwaga ku rukuta rw'umuyoboro w'amazi mu gihe cy'igerageza ryo kwiga kwangirika kwa cathodic. Ubu buryo bwo gusuka mu gice cyo hasi cy'urukuta rw'urukuta rw'urukuta rw'urukuta rw'amazi bwavumbuwe mu 1877, bitewe n'uko ubu buryo bwo gusuka mu rukuta rw'urukuta rw'amazi mu ntangiriro z'urukuta rw'amazi ni buke, umuvuduko wa filime ugenda buhoro, ugomba gushyirwa mu gikoresho gifite umuvuduko mwinshi kandi ukajya muri gaze ikora n'ibindi bibazo bitandukanye, bityo iterambere riratinda cyane kandi hafi ya ryose, gusa mu byuma by'agaciro bikoresha imiti, ibyuma birwanya imihindagurikire y'ikirere, dielectric, n'ibinyabutabire, ibikoresho biri ku bwinshi. Kugeza mu myaka ya 1970, bitewe n'ivuka ry'ikoranabuhanga rya magnetron sputtering, sputtering coating yatejwe imbere vuba, yatangiye kubyutsa umuhanda. Ibi biterwa nuko uburyo bwo gukurura magnetron bushobora kugabanywa n’umurima wa electromagnetic ugororotse kuri electrons, byongera amahirwe yo kugongana kwa electrons na molecules za gaze, ntibigabanya gusa voltage yongerwa kuri cathode, kandi byongera igipimo cyo gukurura kwa positive ions kuri cathode igamije, bigabanya amahirwe yo gukurura electrons kuri substrate, bityo bigagabanya ubushyuhe bwazo, hamwe n’ “umuvuduko mwinshi, ubushyuhe buke Ibiranga bibiri by’ingenzi ari byo “umuvuduko mwinshi n’ubushyuhe buke”.

Kugeza mu myaka ya 1980, nubwo byagaragaye ko ari imyaka cumi n'ibiri gusa, bitandukaniye muri laboratwari, mu by'ukuri mu bijyanye n'inganda zikora ibintu byinshi. Hamwe n'iterambere ry'ubumenyi n'ikoranabuhanga, mu myaka ya vuba aha mu bijyanye no gusiga irangi no gushyira ahagaragara amashanyarazi ya ion, hakoreshejwe amashanyarazi menshi ya ion ahujwe na modulation ya magnetic field, hamwe no guhuza amashanyarazi asanzwe ya dipole agizwe n'uburyo bushya bwo gusiga irangi; kandi bizaba ari ukwinjizwa k'amashanyarazi asimburana hagati y'umuyoboro w'amashanyarazi ku isoko ry'amashanyarazi ya magnetron. Iri koranabuhanga ryo gusiga irangi rya AC magnetron rikoresha amashanyarazi aciriritse, ryitwa twin target sputtering, ntirikuraho gusa ingaruka za "kubura" kwa anode, ahubwo rinakemura ikibazo cy' "uburozi" bwa cathode, binongera cyane uburyo bwo gusiga irangi rya magnetron, kandi bigatanga ishingiro rikomeye ryo gukora ibyuma binini binini. Ibi byazamuye cyane uburyo amashanyarazi ya magnetron ahagarara kandi bitanga ishingiro rikomeye ryo gukora ibyuma binini binini. Mu myaka ya vuba aha, gusiga irangi ryabaye ikoranabuhanga rigezweho ryo gutegura firime, rikora cyane mu bijyanye n'ikoranabuhanga ryo gusiga irangi ry'umwuka mu buryo bw'umwuka.

–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua