Kukonzanso ndi Kukonza Zophimba za Vacuum Sputtering

Kutulutsa mpweya ndi chinthu chomwe tinthu tamphamvu (nthawi zambiri ma ayoni abwino a mpweya) timagunda pamwamba pa chinthu cholimba (chomwe chimatchedwa chinthu chomwe chikufunidwa pansipa), zomwe zimapangitsa maatomu (kapena mamolekyu) pamwamba pa chinthu chomwe chikufunidwacho kutulukamo.

Chodabwitsa ichi chinapezeka ndi Grove mu 1842 pamene zinthu za cathode zinasamutsidwira kukhoma la chubu chopanda mpweya panthawi yoyesera kuti aphunzire za kutumphuka kwa cathodic. Njira yotulutsira madzi mu substrate yotulutsira madzi mu filimu yopyapyala inapezeka mu 1877, chifukwa cha kugwiritsa ntchito njira iyi, kutulutsira madzi mu filimu yopyapyala kumayambiriro kwa nthawi yotulutsira madzi kumakhala kochepa, liwiro la filimu yocheperako, iyenera kukhazikitsidwa mu chipangizo cha kuthamanga kwambiri ndikudutsa mu mpweya wa affective ndi mavuto ena angapo, kotero chitukukocho chimakhala chochedwa kwambiri ndipo pafupifupi chatha, kokha mu zitsulo zamtengo wapatali zomwe zimagwiritsidwa ntchito ndi mankhwala, zitsulo zotsutsa, ma dielectric, ndi mankhwala, zinthu zomwe zimagwiritsidwa ntchito pang'ono. Mpaka zaka za m'ma 1970, chifukwa cha kubuka kwa ukadaulo wotulutsira madzi wa magnetron, utoto wotulutsira madzi wapangidwa mwachangu, unayamba kubwezeretsedwanso kwa msewu. Izi zili choncho chifukwa njira yolumikizira maginito imatha kuchepetsedwa ndi malo ozungulira maginito pama elekitironi, zomwe zimapangitsa kuti ma elekitironi ndi mamolekyu a gasi azigundana, osati kungochepetsa mphamvu yamagetsi yomwe imawonjezeredwa ku cathode, komanso kusintha kuchuluka kwa ma ayoni abwino omwe amatuluka pa cathode yomwe ikufunidwa, kuchepetsa mwayi woti ma elekitironi aphulike pa substrate, potero kuchepetsa kutentha kwake, ndi "liwiro lalikulu, kutentha kochepa." Makhalidwe awiri akuluakulu a "liwiro lalikulu ndi kutentha kochepa".

Kumayambiriro kwa zaka za m'ma 1980, ngakhale kuti zinkaoneka ngati zaka khumi ndi ziwiri zokha, zimasiyana kwambiri ndi labotale, makamaka m'munda wa mafakitale opanga zinthu zambiri. Ndi kupita patsogolo kwa sayansi ndi ukadaulo, m'zaka zaposachedwa m'munda wa sputtering coating ndi kuyambitsidwa kwa ion beam kunakulitsa sputtering, kugwiritsa ntchito kuwala kwakukulu kwamphamvu kwa ion current source kuphatikiza ndi magnetic field modulation, komanso kuphatikiza kwa dipole sputtering kopangidwa ndi njira yatsopano yoputtering; ndipo kudzakhala kuyambitsa kwa magetsi apakatikati osinthasintha amagetsi ku gwero la magnetron sputtering target. Ukadaulo wa sputtering wa AC magnetron wapakatikati, wotchedwa twin target sputtering, sikuti umangochotsa "kusowa" kwa anode, komanso umathetsa vuto la "poisoning" la cathode, zomwe zimathandizira kwambiri kukhazikika kwa sputtering ya magnetron, ndikupereka maziko olimba opangira mafilimu opyapyala amitundu yosiyanasiyana. Izi zasintha kwambiri kukhazikika kwa sputtering ya magnetron ndikupereka maziko olimba opangira mafilimu opyapyala amitundu yosiyanasiyana. M'zaka zaposachedwapa, kuphimba kwa sputtering kwakhala ukadaulo wokonzekera filimu watsopano, wogwira ntchito m'munda wa ukadaulo wophimba vacuum.

– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua