Farfaɗo da Ci Gaban Rufin Injin Turawa

Sputtering wani abu ne da ke faruwa inda barbashi masu kuzari (yawanci ions na iskar gas masu kyau) suka afka saman wani abu mai ƙarfi (wanda ake kira a ƙasan abin da aka nufa), wanda ke sa atom (ko ƙwayoyin halitta) a saman abin da aka nufa su tsere daga gare shi.

Grove ta gano wannan lamari a shekarar 1842 lokacin da aka ƙaura da kayan cathode zuwa bangon bututun iska yayin gwaji don nazarin lalatawar cathodic. An gano wannan hanyar fesawa a cikin adana siraran fim a cikin substrate a cikin 1877, saboda amfani da wannan hanyar, fesawa na siraran fim a farkon matakan fesawa yana da ƙarancin gudu, dole ne a saita shi a cikin na'urar matsin lamba mai yawa kuma ya shiga cikin iskar gas da sauran matsaloli, don haka ci gaban yana da jinkiri sosai kuma kusan an kawar da shi, kawai a cikin karafa masu daraja masu amsawa ta sinadarai, karafa masu hana ruwa gudu, dielectrics, da mahaɗan sinadarai, kayan aiki akan ƙananan aikace-aikace. Har zuwa shekarun 1970, saboda fitowar fasahar fesawa ta magnetron, an haɓaka rufin fesawa cikin sauri, ya fara shiga farfaɗo da hanya. Wannan saboda hanyar fitar da magnetron na iya zama takura ta hanyar filin lantarki na orthogonal akan electrons, yana ƙara yiwuwar karo na electrons da ƙwayoyin iskar gas, ba wai kawai rage ƙarfin lantarki da aka ƙara wa cathode ba, da kuma inganta yawan sputtering na ions masu kyau akan cathode da aka nufa, rage yuwuwar fashewar electrons akan substrate, ta haka rage zafinsa, tare da "babban gudu, ƙarancin zafin jiki Babban halaye guda biyu na "babban gudu da ƙarancin zafin jiki".

Zuwa shekarun 1980, kodayake ya bayyana shekaru goma sha biyu kacal, ya bambanta daga dakin gwaje-gwaje, a zahiri a fannin samar da kayayyaki masu yawa a masana'antu. Tare da ci gaba da ci gaban kimiyya da fasaha, a cikin 'yan shekarun nan a fannin rufewar sputtering da kuma gabatar da hasken ion wanda ya inganta sputtering, amfani da babban haske na tushen ion mai ƙarfi tare da daidaitawar filin maganadisu, da kuma haɗin sputtering dipole na gargajiya wanda ya ƙunshi sabon yanayin sputtering; kuma zai zama gabatarwar wutar lantarki mai canzawa ta matsakaici-mita zuwa tushen manufa na magnetron sputtering. Wannan fasahar sputtering magnetron AC mai matsakaicin-mita, wacce ake kira sputtering tagwaye, ba wai kawai ta kawar da tasirin "ɓacewa" na anode ba, har ma tana magance matsalar "guba" ta cathode, wanda ke inganta kwanciyar hankali na magnetron sputtering sosai, kuma yana samar da tushe mai ƙarfi don samar da fina-finai masu siriri na mahadi a masana'antu. Wannan ya inganta kwanciyar hankali na magnetron sputtering sosai kuma ya samar da tushe mai ƙarfi don samar da fina-finai masu siriri na mahadi a masana'antu. A cikin 'yan shekarun nan, rufin sputtering ya zama fasahar shirya fim mai zafi, mai aiki a fannin fasahar rufewa ta injin.

– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua