Tuurtu waa dhacdo ay qaybaha tamarta (sida caadiga ah ions of gases) ku dhuftaan dusha adag (hoos loo yaqaan walxaha la beegsanayo), taasoo keenaysa atamka (ama molecules) oogada walaxda la beegsanayo inay ka baxsadaan.
Dhacdadan waxaa helay Grove 1842-kii markii walxaha cathode loo haajiray gidaarka tuubada faakuumka inta lagu jiro tijaabada lagu baranayo daxalka cathodic. Habkan sputtering ee dhigaalka substrate ee filimada khafiifka ah ayaa la helay sannadkii 1877, iyadoo ay sabab u tahay isticmaalka habkan dhigista filimada khafiifka ah ee marxaladaha hore ee heerka sputtering waa hooseeyaa, xawaaraha filimka gaabis ah, waa in la dhigay in qalabka cadaadiska sare iyo gudubto galay gaaska saamaynta leh iyo dhibaatooyin kale oo taxane ah, sidaa darteed horumarka waa mid aad u gaabis ah oo ku dhawaad la baabi'iyo biraha biraha qaaliga ah, refractive biraha oo kaliya ee biraha birta ah, refractive biraha qaali ah. dielectrics, iyo xeryahooda kiimikaad, walxo tiro yar oo codsiyo ah. Ilaa 1970-meeyadii, sababtoo ah soo ifbaxa tignoolajiyada sputtering magnetron, dahaarka sputtering ayaa si degdeg ah loo horumariyay, bilaabay inuu galo dib u soo noolaynta ee wadada. Tani waa sababta oo ah habka xajinta magnetron waxaa lagu xakameyn karaa goobta korantada korantada ee elektaroonigga, kordhinta suurtogalnimada isku dhaca elektaroonigga iyo gaaska molecules, ma aha oo kaliya waxay yaraynaysaa korantada lagu daro cathode, waxayna wanaajisaa heerka faafinta ee ions togan ee cathode bartilmaameedka, yaraynta ixtimaalka bamka, heerkulka hoos u dhaca, hoos u dhigista heerkulka sare ee elektiroonigga sifooyinka ugu muhiimsan ee "xawaaraha sare iyo heerkulka hoose".
Ilaa 1980-meeyadii, inkasta oo ay u muuqatay dhowr iyo toban sano, waxay ka soo baxday shaybaarka, oo runtii galay beerta wax soo saarka ballaaran ee warshadaha. Iyada oo horumarinta dheeraadka ah ee sayniska iyo tignoolajiyada, sannadihii la soo dhaafay ee berrinkii sputtering daahan iyo hordhaca ah ee alwaaxdii ion la wanaajiyey sputtering, isticmaalka alwaax ballaaran oo il hadda xoog leh oo ay weheliyaan modulation field magnetic, iyo isku darka sputtering dipole caadiga ah ka kooban hab cusub sputtering; waxayna noqon doontaa hordhaca dhexdhexaadinta-soo noqnoqoshada beddelka tamarta hadda jirta ee isha la beegsanayo ee sputtering magnetron. Tani waxay soo noqnoqotay AC magnetron technology sputtering dhexdhexaad ah, loo yaqaan sputtering bartilmaameedka mataanaha ah, ma aha oo kaliya baabi'inta "muuqaal" saamaynta anode ah, laakiin sidoo kale xalliyo dhibaatada "sumo" ee cathode ah, taas oo si weyn u hagaajinaysaa xasilloonida ee sputtering magnetron, oo waxay bixisaa aasaas adag wax soo saarka warshadaha ee filimada khafiifka ah. Tani waxay si weyn u wanaajisay xasilloonida xajinta magnetron waxayna siisay aasaas adag oo loogu talagalay wax soo saarka warshadaha ee filimada khafiifka ah. Sanadihii la soo dhaafay, daahan sputtering waxa ay noqotay tignoolajiyada diyaarinta filimada soo baxaya kulul, firfircoon beerta tignoolajiyada daahan vacuum.
–Maqaalkan waxa soo saaraysoo saaraha mashiinka daahan vacuumGuangdong Zhenhua
Waqtiga boostada: Dec-05-2023