Sputtering (Sputtering) chiitiko chekuti simba (kazhinji maion egasi) anorova pamusoro pechinhu chakasimba (pazasi chinonzi chinonangwa), zvichiita kuti maatomu (kana kuti mamorekuru) ari pamusoro pechinhu chaakananga kuti atize kubva pachiri.
Chiitiko ichi chakawanikwa naGrove muna 1842 apo cathode zvinhu zvakaendeswa kumadziro echubhu yevacuum panguva yekuedza kudzidza cathodic corrosion. Iyi nzira yekuputira mu substrate deposition yemafirimu matete yakawanikwa muna 1877, nekuda kwekushandisa nzira iyi kuiswa kwemafirimu matete mukutanga kweiyo sputtering rate yakaderera, inononoka firimu kumhanya, inofanira kuisirwa mumudziyo wekudzvanya uye kupinda mugasi rinokanganisa uye mamwe matambudziko akatevedzana, saka kukura kunonoka uye kusingaite simbi, simbi inopera. dielectrics, uye makemikari emushonga, zvinhu pahuwandu hushoma hwekushandisa. Kusvika kuma1970, nekuda kwekubuda kweiyo magnetron sputtering tekinoroji, sputtering coating yakagadziridzwa nekukurumidza, yakatanga kupinda mukumutsiridza mugwagwa. Izvi zvinodaro nekuti iyo magnetron sputtering nzira inogona kumanikidzwa ne orthogonal electromagnetic field pamaerekitironi, ichiwedzera mukana wekudhumhana kwemaerekitironi nemamolekemu egasi, kwete chete kuderedza voltage yakawedzerwa kune cathode, uye kunatsiridza kuputika kweiyoni yakanaka pane inotangwa cathode, kuderedza mukana weiyo maerekitironi, nekuderedza tembiricha yaro ipapo. "high speed, yakaderera tembiricha Mamiriro maviri makuru e "high speed uye yakaderera tembiricha".
Kusvika kuma1980, kunyangwe yaingoratidzika makore gumi nemaviri, inomira kunze kubva murabhoritari, ichipinda mumunda wekugadzirwa kwemaindasitiri. Nekumwe kusimukira kwesainzi uye tekinoroji, mumakore achangopfuura mundima yekuputira kupuruzira uye kuiswa kweiyoni danda kunowedzera kupuruzira, kushandiswa kwedanda rakakura reiyo yakasimba ikozvino sosi yakasanganiswa nemagnetic field modulation, uye nekubatanidzwa kwezvakajairwa dipole sputtering inoumbwa neimwe nzira yekupuruzira; uye ichave iyo yekusuma yepakati-frequency inotsinhanisa yazvino magetsi kune iyo magnetron sputtering target source. Iyi yepakati-frequency AC magnetron sputtering tekinoroji, inodaidzwa kuti twin target sputtering, haingobvisi "kunyangarika" kweanode, asi inogadzirisa dambudziko re "chepfu" yecathode, iyo inovandudza zvakanyanya kugadzikana kwemagnetron sputtering, uye inopa hwaro hwakasimba hwekugadzirwa kwemaindasitiri kwemafirimu akaonda matete. Izvi zvakavandudza zvakanyanya kugadzikana kwemagnetron sputtering uye zvakapa hwaro hwakasimba hwekugadzirwa kwemaindasitiri kwemafirimu akaonda matete. Mumakore achangopfuura, sputtering coating yave inopisa iri kubuda firimu yekugadzirira tekinoroji, inoshanda mumunda wevacuum coating tekinoroji.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua
Nguva yekutumira: Zvita-05-2023