Kuwana vacuum kunozivikanwawo se "vacuum pumping", zvinoreva kushandiswa kwemapombi akasiyana-siyana evacuum kubvisa mhepo iri mukati memudziyo, kuitira kuti kumanikidzwa kuri mukati memugero kudonhe kusvika pasi pemhepo imwe chete. Parizvino, kuti vacuum iwane zvishandiso zvinoshandiswa zvinosanganisira rotary vane mechanical vacuum pumps, Roots pumps, oil diffusion pumps, composite molecular pumps, molecular sieve adsorption pumps, titanium sublimation pumps, sputtering ion pumps uye cryogenic pumps nezvimwewo. Mumapombi aya, mapombi mana ekutanga anorongwa semapombi ekufambisa gasi (transfer vacuum pumps), zvinoreva kuti mamorekuru egasi anoramba achisvetwa muvacuum pumps uye anoburitswa kunze kuti abude; mapombi mana ekupedzisira anorongwa semapombi ekutora gasi (capture vacuum pumps), ayo anokomberedzwa nemamorekuru kana kuti akabatanidzwa nemakemikari pamadziro emukati mekamuri yekupomba kuti awane vacuum inodiwa. Mapombi ekutora gasi anonziwo mapombi evacuum asina mafuta nekuti haashandisi mafuta senzvimbo inoshanda. Kusiyana nemapombi ekutamisa, ayo anobvisa gasi zvachose, mamwe mapombi ekubata anogona kudzoserwa, zvichibvumira gasi rakaunganidzwa kana rakapfupikiswa kuti ridzoserwe musystem panguva yekudziyisa.
Mapombi evacuum anotapurirana akakamurwa kuita mapoka maviri makuru: evolumetric nemomentum transfer. Mapombi evacuum anotapurirana anowanzo sanganisira marotary vane mechanical pumps, liquid ring pumps, reciprocating pumps uye Roots pumps; mapombi evacuum anotapurirana anowanzo sanganisira mamolecular pumps, jet pumps, oil diffusion pumps. Mapombi evacuum anotapurirana anowanzo sanganisira mapombi e-ion anodziya uye anosputtering sputtering.
Kazhinji, maitiro ekuputira akasiyana, vacuum chamber vacuum inofanira kusvika padanho rakasiyana, uye mune tekinoroji ye vacuum, zvakanyanya kune background vacuum (inozivikanwawo se intrinsic vacuum) kuratidza nhanho yayo. Background vacuum inoreva vacuum ye vacuum coating chamber kuburikidza ne vacuum pombi kuti isangane nezvinodiwa zve coating process ye highest vacuum, uye saizi ye vacuum iyi, inonyanya kutsamira pakukwanisa kwe vacuum pumping. Vacuum coating room ne vacuum system yayo vacuum vacuum inogona kusvika highest vacuum inonzi limit vacuum (kana limit pressure). Tafura 1-2 inonyora working pressure range yemamwe ma common vacuum pumps uye last pressure inogona kuwanikwa. Zvikamu zvine mumvuri zvetafura zvinomiririra pressures dzinogona kuwanikwa ne vacuum pombi yega yega kana ikashandiswa pamwe chete nezvimwe zvishandiso.
–Chinyorwa ichi chakaburitswa namugadziri wemuchina wevacuum coatingGuangdong Zhenhua
Nguva yekutumira: Nyamavhuvhu-30-2024