Vacuum Sputtering Coating Kubyutsa no Gutezimbere

Gusohora ni ibintu aho imbaraga zingufu (ubusanzwe ion nziza za gaze) zikubita hejuru yikintu gikomeye (munsi cyitwa ibikoresho bigenewe), bigatuma atome (cyangwa molekile) hejuru yibikoresho byateganijwe kugirango zivemo.

Iki kintu cyavumbuwe na Grove mu 1842 igihe ibikoresho bya cathode byimurwaga ku rukuta rw'umuyoboro wa vacuum mu gihe cyo gukora ubushakashatsi bwo kwangirika kwa catodiki. Ubu buryo bwo gusohora muri substrate yoherejwe na firime yoroheje yavumbuwe mu 1877, kubera gukoresha ubu buryo bwo gushira ama firime yoroheje mugihe cyambere cyikigereranyo cyo gusohora ni gito, umuvuduko wa firime gahoro, ugomba gushyirwaho mugikoresho cyumuvuduko ukabije kandi ukanyura muri gaze yibasiwe nibindi bibazo byinshi, bityo iterambere rikaba ritinda cyane kandi rikaba ryaravanyweho, gusa mubikoresho bya chimique byangiza, ibikoresho byangiza, byangiza, byangiza, byangiza, bikabyaza umusaruro. Kugeza mu myaka ya za 70, kubera ko hagaragaye ikoranabuhanga rya magnetron sputtering tekinoroji, guteranya ibicuruzwa byatejwe imbere byihuse, bitangira kwinjira mubyuka byumuhanda. Ibi ni ukubera ko uburyo bwa magnerron bushobora kubuzwa na ORTHOGOLL HOLIKA kuri electron, yongera ikibazo cya veleking ya electrose, kandi igabanya amahirwe yo gutera ibisasu, kandi bigabanya ibisasu bya electrate, bityo bigabanya ubushyuhe bwayo, Hamwe n "" umuvuduko mwinshi, ubushyuhe buke bwibintu bibiri byingenzi byerekana "umuvuduko mwinshi nubushyuhe buke".

Kugeza mu myaka ya za 1980, nubwo byagaragaye imyaka icumi gusa, iragaragara muri laboratoire, mubyukuri mubikorwa byinganda zikora inganda. Hamwe niterambere ryiterambere rya siyanse nubuhanga, mumyaka yashize mubijyanye no gutwikira no gutangiza ion beam yongerewe imbaraga, gukoresha ikoreshwa ryumurongo mugari winkomoko ikomeye ya ion ihujwe no guhinduranya imbaraga za magnetique, hamwe no guhuza dipole isanzwe igizwe nuburyo bushya bwo gusohora; kandi bizaba intangiriro yo guhuza intera-interineti ihinduranya amashanyarazi kuri magnetron sputtering target source. Ubu buryo bwa tekinoroji ya AC magnetron ikoresha, bwitwa twin target sputtering, ntibikuraho gusa ingaruka zo "kubura" kwa anode, ahubwo binakemura ikibazo cy "uburozi" bwa cathode, buteza imbere cyane ituze rya magnetron, kandi bitanga umusingi ukomeye wo gukora inganda zikora inganda zoroheje. Ibi byazamuye cyane ituze rya magnetron kandi bitanga umusingi ukomeye wo gukora inganda zikora inganda zoroshye. Mu myaka yashize, gusohora ibintu byahindutse tekinoroji ishyushye yo gutegura firime, ikora mubijyanye na tekinoroji ya vacuum.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua