Igipfundikizo cyo gusiga imirasire ya Ion beam n'ishusho ya Ion beam

1. Igipfundikizo cy'umuraba wa iyoni

Ubuso bw'ibikoresho buterwaho umuyoboro wa iyoni ufite ingufu ziciriritse, kandi ingufu za iyoni ntizinjira mu rukuta rwa kristu rw'ibikoresho, ahubwo zishyira ingufu muri atome zigamije, bigatuma zisohoka zivuye ku buso bw'ibikoresho, hanyuma zigakora agace gato gashyirwa ku gikoresho. Kubera ko umuyoboro wa iyoni usohoka, ingufu za atome zikoreshwa mu ruganda rwa filime zisohoka ziba nyinshi cyane, kandi ibikoresho bigamije bishyirwamo umuyoboro wa iyoni mu kirere kinini, ubuziranenge bw'urwego rwa filime ni bwinshi, kandi filime nziza zishobora gushyirwamo, mu gihe urwego rwa filime rudahinduka rukarushaho kuba rwiza, ibyo bikaba bishobora kugera ku ntego yo kunoza imiterere y'urumuri n'imikorere y'urwego rwa filime. Intego yo gukoresha icyuma cya iyoni ni ugukora ibikoresho bishya bikozwe mu ruganda rwa filime.

2. Gukata imirasire ya iyoni

Gucukura imirasire ya Ion nabyo ni uburyo bwo gucukura imirasire ya Ion bukoresha ingufu ziciriritse ku buso bw'ibikoresho kugira ngo habeho gucukura no gucukura ku gice cy'ubutaka, ni igikoresho cya semiconductor, ibikoresho bya optoelectronic n'ibindi bice by'ikoranabuhanga rya graphics core. Ikoranabuhanga ryo gutegura utubumbe mu mirasire ya semiconductor rikubiyemo gutegura transistors za miliyoni kuri wafer ya silikoni imwe ifite umurambararo wa Φ12in (Φ304.8mm). Buri transistors yubakishijwe ibice byinshi bya filime ntoya zifite imirimo itandukanye, zigizwe n'urwego rukora, urwego rukingira, urwego rwo kwitandukanya, n'urwego ruyobora. Buri rwego rukora rufite imiterere yarwo, bityo nyuma y'uko buri rwego rwa filime ikora rumaze gushyirwaho, ibice bidafite akamaro bigomba gucukurwa n'urumuri rwa ion, bigatuma ibice bya filime by'ingirakamaro bisigara nta kibazo. Muri iki gihe, ubugari bw'insinga za chip bugeze kuri mm 7, kandi gucukura imirasire ya Ion ni ngombwa kugira ngo hategurwe imiterere myiza nk'iyo. Gucukura imirasire ya Ion ni uburyo bwo gucukura bwumye bufite ubuhanga bwo gucukura buhanitse ugereranije n'uburyo bwo gucukura butose bwakoreshejwe mu ntangiriro.

Ikoranabuhanga ryo gukata imirasire ya Ion hamwe no gukata imirasire ya Ion ikora hamwe n'ubwoko bubiri. Iya mbere ifite gukata imirasire ya Ion ya Argon, ni imwe mu mikorere ifatika; iya nyuma ifite gukata imirasire ya Ion ya Fluorine, imirasire ya Ion ya Fluorine hamwe n'ingufu nyinshi zo gukora uruhare rwo gukata, imirasire ya Ion ya Fluorine nayo ishobora gukata hamwe na SiO2.₂Si₃N4, GaAs, W n'izindi firime nto zifite uburyo bwo gukora ibintu mu buryo bwa shimi, byombi ni uburyo bwo gukora ibintu mu buryo bwa fiziki, ariko kandi ni uburyo bwo gukora ibintu mu buryo bwa shimi bw'ikoranabuhanga ryo gukata imirasire ya ion, uburyo bwo gukata buragenda bwihuta. Gukata imirasire ihumanya ikirere ni CF₄、C₂F₆、CCl4、BCl₃, n'ibindi, reactants zakozwe kuri SiF₄SiCl₄GCl₃na WF₆ ni imyuka ihumanya ikurwamo. Ikoranabuhanga ryo gukata imirasire ya iyoni ni ryo koranabuhanga ry'ingenzi mu gukora ibicuruzwa bigezweho.

–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua