Diamond yoroheje ya firime ikoranabuhanga-umutwe2

. argon. Plasma ifatanije ntishobora gukwirakwizwa na firime nziza ya diyama yo mu rwego rwo hejuru kubera ko ion ibisasu biva muri plasma bishobora kwangiza cyane diyama. Filime ya diyama ya polycrystalline yakuze ikoresheje plasma iterwa na RF mu bihe byo kubitsa bisa na plasma ya microwave CVD. Filime ya diyama ya epitaxial epitaxial na yo yabonetse hakoreshejwe CVD iterwa na plasma yatewe na RF.

(4) DC Plasma CVD

DC plasma nubundi buryo bwo gukora isoko ya gaze (muri rusange ivangwa rya H2, na gaze ya hydrocarubone) kugirango ikure rya firime ya diyama.CVD ifashwa na plasma ya CVD ifite ubushobozi bwo gukura ahantu hanini ya firime ya diyama, kandi ingano y’ahantu ikura igarukira gusa ku bunini bwa electrode no gutanga amashanyarazi ya DC.Indi nyungu ya DC ya plasma ifashwa na CD ni yo yashizweho na DC. Byongeye kandi, kubera ko uburyo butandukanye bwa DC arc bushobora kubitsa firime nziza ya diyama nziza kurwego rwo hejuru rutari diyama ku gipimo cyo hejuru cyo hejuru, zitanga uburyo bwo kugurisha ibicuruzwa bya firime ya diyama.

. Kubera ko plasma ya cyclotron resonance plasma ishobora kubyara plasma nyinshi (> 1x1011cm-3), ECR-MPECVD irakwiriye cyane gukura no gushira firime ya diyama.Nyamara, kubera umuvuduko muke wa gazi (10-4- 10-2 Torr) ikoreshwa mubikorwa bya ECR, bigatuma igipimo cya firime ya diyama kigabanuka cyane, ubu buryo bukwiranye na laboratoire ya diyama.

–Iyi ngingo yasohowe n uruganda rukora imashini ya vacuum Guangdong Zhenhua