Kuyika nthunzi ya mankhwala yotenthedwa ndi kutentha

Kawirikawiri ma CVD reactions amadalira kutentha kwambiri, komwe kumatchedwa thermally excited chemical vapor deposition (TCD). Nthawi zambiri imagwiritsa ntchito inorganic precursors ndipo imachitika mu hot-wall ndi cold-wall reactors. Njira zake zotenthetsera zimaphatikizapo kutentha kwa radio frequency (RF), infrared radiation heating, resistance heating, ndi zina zotero.

Kutentha kwa nthunzi ya mankhwala opangidwa ndi khoma
Kwenikweni, chotenthetsera mpweya wa mankhwala opangidwa ndi khoma lotentha ndi ng'anjo yotenthetsera, yomwe nthawi zambiri imatenthedwa ndi zinthu zotsutsa, kuti ipangidwe nthawi ndi nthawi. Chithunzi cha malo opangira mpweya wa mankhwala opangidwa ndi khoma lotentha kuti chikhale ndi zokutira zida za chip chikuwonetsedwa motere. Chotenthetsera mpweya wa mankhwala opangidwa ndi khoma lotenthachi chimatha kuphimba TiN, TiC, TiCN ndi mafilimu ena owonda. Chotenthetserachi chingapangidwe kukhala chachikulu mokwanira kenako n’kusunga zigawo zambiri, ndipo mikhalidwe imatha kulamulidwa bwino kwambiri kuti chikhale ndi zinthu zambiri, ndipo zinthu zitha kuyendetsedwa bwino kuti chikhale ndi zinthu zambiri. Chithunzi 1 chikuwonetsa chipangizo cha epitaxial layer cha silicon doping cha kupanga zida za semiconductor. Gawo lapansi mu ng'anjo limayikidwa molunjika kuti lichepetse kuipitsidwa kwa pamwamba pa malo oikidwa ndi tinthu tating'onoting'ono, ndikuwonjezera kwambiri katundu wopangidwa. Chotenthetsera mpweya wa madzi opangidwa ndi khoma lotentha nthawi zambiri chimagwiritsidwa ntchito pamavuto otsika.