Ko te tikanga, ko ngā tauhohenga CVD e whakawhirinaki ana ki ngā pāmahana teitei, nō reira ka kiia ko te thermally excited chemical vapor deposition (TCVD). I te nuinga o te wā ka whakamahia ngā matū kore-waro, ā, ka mahia i roto i ngā tauhohenga pakitara-wera me ngā tauhohenga pakitara-matao. Ko ōna tikanga wera ko te whakamahana auau reo irirangi (RF), te whakamahana irahiko infrared, te whakamahana ātete, me ētahi atu.
Te whakatakotoranga o te kohu matū pakitara wera
Ko te pūwero matū pakitara-wera he oumu wera-whakamahana, he mea whakamahana ki ngā huānga ātete, mō te whakaputanga wā-poto. Ko te tuhi o te whare whakaputanga pūwero matū pakitara-wera mō te paninga taputapu maramara e whakaaturia ana penei. Ka taea e tēnei pūwero matū pakitara-wera te pani i te TiN, TiC, TiCN me ētahi atu kiriata angiangi. Ka taea te hoahoa i te pūwero kia nui te rahi, kia mau ai te maha o ngā wāhanga, ā, ka taea te whakahaere tika i ngā āhuatanga mō te whakatakotoranga. E whakaatu ana te Pikitia 1 i tētahi taputapu paparanga epitaxial mō te tāpiri silicon o te hanga taputapu haurua-ira. Ka whakatakotoria te papa i roto i te oumu ki te ahunga poutū hei whakaiti i te poke o te mata whakatakotoranga e ngā matūriki, ā, ka nui ake te whakanui i te kawenga whakaputa. Ko ngā pūwero pakitara-wera mō te hanga haurua-ira ka whakahaerehia i ngā pēhanga iti.
Wā tuku: Whiringa-ā-rangi-08-2022