(3) Radio Frequency Plasma CVD (RFCVD)RF itha kugwiritsidwa ntchito popanga madzi a m'magazi mwa njira ziwiri zosiyana, njira yolumikizira ya capacitive ndi inductive coupling.RF plasma CVD imagwiritsa ntchito pafupipafupi 13.56 MHz. plasma ndi kuti pafupipafupi madzi a m'magazi si mulingo woyenera sputtering, makamaka ngati madzi a m'magazi muli argon.Capacitively pamodzi plasma si oyenera kukula apamwamba diamondi mafilimu popeza ion bombardment ku madzi a m'magazi kungayambitse kuwonongeka kwambiri kwa diamondi. Mafilimu a dayamondi a Polycrystalline adakula pogwiritsa ntchito plasma yopangidwa ndi RF pansi pamikhalidwe yofanana ndi microwave plasma CVD.Makanema a diamondi a Homogeneous epitaxial adapezedwanso pogwiritsa ntchito CVD-induced plasma-enhanced CVD.
(4) DC Plasma CVD
DC plasma ndi njira ina activated gasi gwero (nthawi zambiri osakaniza H2, ndi mpweya wa hydrocarbon) kwa diamondi film kukula.DC plasma-assisted CVD amatha kukulitsa madera lalikulu la mafilimu diamondi, ndi kukula kwa dera kukula ndi malire kokha ndi kukula kwa maelekitirodi ndi DC magetsi. Amayikidwa pamlingo wa 80 mm / h. Kuphatikiza apo, popeza njira zosiyanasiyana za DC arc zimatha kuyika makanema apamwamba kwambiri a diamondi pamagawo osakhala a diamondi pamitengo yayikulu, amapereka njira yogulitsira yoyika mafilimu a diamondi.
(5) Electron cyclotron resonance microwave plasma enhanced chemical vapor deposition (ECR-MPECVD) The DC plasma, RF plasma, ndi microwave plasma zomwe tafotokoza kale zonse zimasiyanitsidwa ndi kuwola H2, kapena ma hydrocarbons, kukhala magulu a atomiki a haidrojeni ndi kaboni-hydrogen atomu, potero amathandizira kupanga filimu yopyapyala ya diamondi. Popeza elekitironi cyclotron resonance plasma akhoza kutulutsa mkulu osalimba plasma (> 1x1011cm-3), ECR-MPECVD ndi oyenera kukula ndi mafunsidwe a diamondi films. labotale.
-Nkhaniyi yatulutsidwa ndi wopanga makina opukutira vacuum Guangdong Zhenhua
Nthawi yotumiza: Jun-19-2024