Ịgbasa bụ ihe na-eme mgbe ụmụ irighiri ihe dị ike (na-abụkarị ion nke gas dị mma) na-ada n'elu ihe siri ike (n'okpuru ebe a na-akpọ ihe ezubere iche), na-eme ka atom (ma ọ bụ molecules) dị n'elu ihe a na-achọsi ike gbapụ na ya.
Grove chọtara ihe a na 1842 mgbe a na-akwaga ihe cathode na mgbidi nke oghere oghere n'oge nnwale iji mụọ corrosion cathodic. Nke a na usoro sputtering na mkpụrụ deposition nke mkpa fim a chọpụtara na 1877, n'ihi na iji usoro a deposition nke mkpa fim na mmalite nkebi nke sputtering ọnụego bụ ala, ngwa ngwa film ọsọ, a ga-edozi na ngwaọrụ nke elu-nrụgide na-agafe n'ime mmetụta gas na ndị ọzọ a usoro nke nsogbu, otú mmepe bụ nnọọ ngwa ngwa na fọrọ nke nta kpochapụ, refractive metal, refractive metal, naanị na refractive metal. dielectrics, na ogige kemịkalụ, ihe na ọnụ ọgụgụ dị nta nke ngwa. Ruo n'afọ 1970, n'ihi mmalite nke nkà na ụzụ magnetron sputtering, a na-emepụta mkpuchi mkpuchi ngwa ngwa, malitere ịbanye na revival nke okporo ụzọ. Nke a bụ n'ihi na usoro magnetron sputtering nwere ike igbochi site orthogonal electromagnetic field na electrons, na-amụba ohere nke nkukota nke electrons na gas ụmụ irighiri, ọ bụghị nanị na-ebelata voltaji agbakwunyere na cathode, na melite sputtering ọnụego nke nti ion na cathode lekwasịrị anya, na-ebelata ihe gbasara nke puru omume nke bombu nke electrons na obere okpomọkụ, site na ibelata okpomọkụ nke ikuku abụọ, site na ibelata okpomọkụ nke electrons. isi njirimara nke "oke ọsọ na obere okpomọkụ".
Ka 1980, ọ bụ ezie na ọ pụtara nanị iri na abụọ afọ, ọ pụtara na laabu, n'ezie n'ime ubi nke ulo oru uka mmepụta. Na n'ihu mmepe nke sayensị na nkà na ụzụ, na-adịbeghị anya na ubi nke sputtering mkpuchi na iwebata nke ion doo enwe enwekwu sputtering, ojiji nke a obosara doo nke ike dị ugbu a isi iyi jikọtara magnetik field modulation, na na Nchikota nke ot dipole sputtering mejupụtara ọhụrụ sputtering mode; na ọ ga-abụ iwebata nke etiti-ugboro ọzọ na-enye ike dị ugbu a na isi iyi nke na-agbasa magnetron. Nke a na-ajụ AC magnetron sputtering technology, nke a na-akpọ ejima lekwasịrị sputtering, ọ bụghị nanị na-ewepụ "ọdịdị" mmetụta nke anode, ma na-edozi "nsi" nsogbu nke cathode, nke ukwuu mma nkwụsi ike nke magnetron sputtering, na-enye a siri ike ntọala maka mmepụta mmepụta nke compound mkpa fim. Nke a emeela ka nkwụsi ike nke magnetron dị mma ma nye ntọala siri ike maka mmepụta mmepụta ihe nke ihe nkiri dị mkpa. N'ime afọ ndị na-adịbeghị anya, mkpuchi sputtering aghọwo teknụzụ nkwadebe ihe nkiri na-ekpo ọkụ na-apụta, na-arụ ọrụ n'ọhịa nke teknụzụ mkpuchi oghere.
–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua
Oge nzipu: Dec-05-2023