Sputtering yog qhov tshwm sim uas cov khoom muaj zog (feem ntau yog cov ions zoo ntawm cov pa roj) ntaus rau saum npoo ntawm cov khoom (hauv qab hu ua cov khoom siv), ua rau cov atoms (los yog cov molecules) nyob rau saum npoo ntawm cov khoom siv kom dim ntawm nws.
Qhov tshwm sim no tau pom los ntawm Grove hauv xyoo 1842 thaum cov khoom siv cathode tau tsiv mus rau phab ntsa ntawm lub tshuab nqus tsev thaum lub sijhawm sim los kawm cathodic corrosion. Qhov no sputtering txoj kev nyob rau hauv lub substrate deposition ntawm nyias films twb nrhiav tau nyob rau hauv 1877, vim hais tias siv txoj kev no deposition ntawm nyias films nyob rau hauv thaum ntxov theem ntawm lub sputtering tus nqi yog tsawg, qeeb zaj duab xis ceev, yuav tsum tau teem nyob rau hauv lub ntaus ntawv ntawm high-pressure thiab kis mus rau hauv cov pa phem thiab lwm yam teeb meem, yog li txoj kev loj hlob qeeb heev thiab ze li ntawm tshem tawm, tsuas yog nyob rau hauv lub preactory reacts hlau thiab reacts hlau. chemical compounds, cov ntaub ntawv ntawm ib tug me me ntawm daim ntawv thov. Txog thaum xyoo 1970, vim yog qhov tshwm sim ntawm magnetron sputtering technology, sputtering txheej tau tsim sai heev, pib nkag mus rau kev txhawb siab ntawm txoj kev. Qhov no yog vim hais tias txoj kev magnetron sputtering tuaj yeem txwv los ntawm orthogonal electromagnetic teb ntawm electrons, nce qhov tshwm sim ntawm kev sib tsoo ntawm electrons thiab roj molecules, tsis tsuas yog txo qhov voltage ntxiv rau cathode, thiab txhim kho tus sputtering tus nqi ntawm zoo ions ntawm lub hom phiaj cathode, txo qhov tshwm sim ntawm bombardment ntawm electrons nyob rau hauv lub ntsiab kub ntawm ob lub ntsiab kub. Cov yam ntxwv ntawm "kev kub ceev thiab qis kub".
Txog rau xyoo 1980, txawm hais tias nws tshwm sim tsuas yog kaum xyoo, nws sawv tawm ntawm chav kuaj, tiag tiag rau hauv thaj chaw ntawm kev lag luam loj. Nrog rau kev txhim kho ntxiv ntawm kev tshawb fawb thiab thev naus laus zis, nyob rau xyoo tas los no hauv thaj chaw ntawm sputtering txheej thiab kev taw qhia ntawm ion beam txhim kho sputtering, kev siv cov kab dav dav ntawm qhov muaj zog ion tam sim no ua ke nrog kev sib nqus teb, thiab nrog kev sib xyaw ua ke ntawm cov pa dipole sputtering tsim los ntawm hom tshiab sputtering; thiab yuav yog qhov kev taw qhia ntawm qhov nruab nrab zaus hloov pauv tam sim no fais fab mov rau magnetron sputtering lub hom phiaj. Qhov nruab nrab zaus AC magnetron sputtering thev naus laus zis, hu ua ntxaib lub hom phiaj sputtering, tsis tsuas yog tshem tawm qhov "tso" cov nyhuv ntawm anode, tab sis kuj daws qhov teeb meem "kev lom" ntawm cathode, uas zoo heev txhim kho kev ruaj ntseg ntawm magnetron sputtering, thiab muab lub hauv paus ruaj khov rau kev tsim khoom ntawm cov yeeb yaj kiab nyias. Qhov no tau zoo heev txhim kho kev ruaj ntseg ntawm magnetron sputtering thiab muab lub hauv paus ruaj khov rau industrialized zus tau tej cov compound nyias zaj duab xis. Nyob rau hauv xyoo tas los no, sputtering txheej tau dhau los ua cov txheej txheem kub txheej txheej txheej txheej, ua haujlwm hauv kev siv tshuab nqus tsev.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua
Post lub sij hawm: Dec-05-2023