(3) Xov tooj cua Frequency Plasma CVD (RFCVD) RF tuaj yeem siv los tsim cov ntshav los ntawm ob txoj kev sib txawv, txoj kev sib txuas capacitive thiab inductive coupling method.RF plasma CVD siv zaus ntawm 13.56 MHz.Qhov zoo ntawm RF plasma yog tias nws diffuses tshaj ib qho chaw loj dua li ntawm RF. capacitively coupled plasma yog qhov zaus ntawm cov plasma tsis zoo rau sputtering, tshwj xeeb tshaj yog yog hais tias cov ntshav muaj argon.Capacitively coupled plasma tsis haum rau loj hlob zoo pob zeb diamond films vim ion bombardment los ntawm lub plasma tuaj yeem ua rau muaj kev puas tsuaj loj rau pob zeb diamond. Polycrystalline pob zeb diamond films tau loj hlob siv RF induced plasma nyob rau hauv deposition tej yam kev mob zoo li microwave plasma CVD.Homogeneous epitaxial pob zeb diamond films kuj tau siv RF-induced plasma-enhanced CVD.
(4) DC Plasma CVD
DC plasma yog lwm txoj hauv kev ua kom cov pa roj (feem ntau yog sib xyaw ntawm H2, thiab hydrocarbon gas) rau pob zeb diamond zaj duab xis kev loj hlob.DC plasma-pab CVD muaj peev xwm loj hlob thaj tsam loj ntawm pob zeb diamond films, thiab qhov loj ntawm thaj chaw loj hlob tsuas yog txwv los ntawm qhov loj ntawm cov electrodes thiab DC fais fab mov.Lwm qhov zoo ntawm DC txhaj tshuaj CVD daim ntawv ntawm DC plasma-assass. cov yeeb yaj kiab tau txais los ntawm qhov system no tau muab tso rau ntawm tus nqi ntawm 80 mm / h. Tsis tas li ntawd, txij li ntau txoj hauv kev DC arc tuaj yeem tso cov pob zeb zoo nkauj zoo nkauj ntawm cov pob zeb diamond uas tsis yog pob zeb diamond ntawm cov nqi tso nyiaj siab, lawv muab txoj hauv kev lag luam rau kev tso nyiaj ntawm pob zeb diamond films.
(5) Electron cyclotron resonance microwave plasma enhanced chemical vapor deposition (ECR-MPECVD) Lub DC plasma, RF plasma, thiab microwave plasma tau piav ua ntej tag nrho cov dissociate thiab decompose H2, los yog hydrocarbons, rau hauv atomic hydrogen thiab carbon-hydrogen atom pawg, yog li ua rau cov pob zeb diamond nyias. Txij li thaum electron cyclotron resonance plasma tuaj yeem tsim cov plasma siab ceev (> 1x1011cm-3), ECR-MPECVD yog qhov tsim nyog rau kev loj hlob thiab kev tso nyiaj ntawm cov pob zeb diamond films.Txawm li cas los xij, vim cov roj tsis tshua muaj siab (10-4- txog 10-2 Torr) siv rau hauv cov txheej txheem ECR, uas ua rau lub pob zeb diamond tsuas yog deposition tus nqi ntawm zaj duab xis tam sim no. chav kuaj.
-Cov kab lus no yog tso tawm los ntawm lub tshuab nqus tsev txheej tshuab chaw tsim tshuaj paus Guangdong Zhenhua
Post lub sij hawm: Jun-19-2024