Farfadowa da Ci gaba da Rufe Vacuum sputtering

Sputtering wani al'amari ne wanda kwayoyin halitta masu kuzari (yawanci tabbataccen ions of gas) suka bugi saman wani kauri (a kasa da ake kira abin da ake nufi), yana haifar da atom (ko kwayoyin halitta) a saman abin da ake nufi don tserewa daga gare ta.

Grove ya gano wannan al'amari a cikin 1842 lokacin da kayan cathode suka yi ƙaura zuwa bangon wani bututun ruwa yayin gwaji don nazarin lalata cathodic. Wannan sputtering Hanyar a cikin substrate jijiya na bakin ciki fina-finai da aka gano a cikin 1877, saboda yin amfani da wannan hanya na jijiya na bakin ciki fina-finai a farkon matakai na sputtering kudi ne low, jinkirin fim gudun, dole ne a kafa a cikin na'urar na high-matsa lamba da kuma shiga cikin m gas da kuma sauran jerin matsaloli, don haka da ci gaba ne sosai jinkirin da kuma kusan kawar da refractive karfe, refractive karfe, kawai a cikin sinadaran refractive. dielectrics, da sinadaran mahadi, kayan a kan ƙananan adadin aikace-aikace. Har zuwa 1970s, saboda bullar fasahar sputtering magnetron, an haɓaka suturar sputtering da sauri, ya fara shiga farfaɗowar hanya. Wannan shi ne saboda hanyar magnetron sputtering za a iya ƙuntata ta hanyar orthogonal electromagnetic filin a kan electrons, ƙara yiwuwar karo na electrons da gas kwayoyin, ba kawai rage irin ƙarfin lantarki kara da cathode, da kuma inganta sputtering kudi na tabbatacce ions a kan manufa cathode, rage yiwuwar bombardment na electrons, low zafin jiki a can a kan rage yawan zafin jiki na electrons. manyan halaye na "high gudun da ƙananan zafin jiki".

Har zuwa 1980s, ko da yake ya bayyana ne kawai dozin shekaru, shi tsaye daga dakin gwaje-gwaje, da gaske a cikin fagen masana'antu taro samar. Tare da ci gaba da ci gaban kimiyya da fasaha, a cikin 'yan shekarun nan a fagen sputtering shafi da kuma gabatar da ion katako inganta sputtering, da yin amfani da wani fadi da katako mai karfi na yanzu ion tushen hade da Magnetic filin modulation, da kuma tare da al'ada sputtering dipole sputtering hada da wani sabon sputtering yanayin; kuma zai zama gabatarwar tsaka-tsaki-mita madadin samar da wutar lantarki na yanzu zuwa tushen maƙasudin sputtering magnetron. Wannan matsakaici-mita AC magnetron sputtering fasahar, da ake kira tagwaye manufa sputtering, ba kawai kawar da "bacewar" sakamako na anode, amma kuma warware "guba" matsala na cathode, wanda ƙwarai inganta zaman lafiyar magnetron sputtering, da kuma samar da wani m tushe ga masana'antu samar da fili na bakin ciki fina-finai. Wannan ya inganta sosai da kwanciyar hankali na magnetron sputtering kuma ya ba da tushe mai ƙarfi don samar da masana'antu na masana'antu na bakin ciki. A cikin 'yan shekarun nan, sputtering shafi ya zama zafi kunno kai fim shirye-shiryen fasahar, aiki a fagen injin shafa fasahar.

–An fitar da wannan labarininjin shafa injin injinGuangdong Zhenhua