Fasahar fasahar fina-finan lu'u-lu'u-babi na 2

(3) Rediyo Frequency Plasma CVD (RFCVD) RF za a iya amfani da shi don samar da plasma ta hanyoyi daban-daban guda biyu, da capacitive coupling method da inductive coupling. sputtering, musamman idan plasma ya ƙunshi argon. Capacitively hade plasma bai dace da girma high quality fina-finan lu'u-lu'u tunda ion bombardment daga plasma na iya haifar da mummunar lalacewa ga lu'u-lu'u. An haɓaka fina-finan lu'u-lu'u na polycrystalline ta amfani da RF da aka haifar da plasma a ƙarƙashin yanayin ajiya mai kama da plasma na microwave CVD. Hakanan an sami fina-finai na lu'u-lu'u masu kama da juna ta amfani da CVD mai haɓaka plasma mai haɓaka RF.

(4) DC Plasma CVD

DC plasma wata hanya ce ta kunna tushen iskar gas (gaba ɗaya cakuda H2, da gas na hydrocarbon) don haɓaka fim ɗin lu'u-lu'u.CVD plasma-taimaka CVD yana da ikon girma manyan wuraren fina-finai na lu'u-lu'u, kuma girman girman yankin girma yana iyakance ne kawai ta girman electrodes da wutar lantarki na DC. mm/h. Bugu da ƙari, tun da hanyoyi daban-daban na DC arc na iya ajiye fina-finai na lu'u-lu'u masu inganci a kan abubuwan da ba na lu'u-lu'u ba a cikin adadi mai yawa, suna samar da hanyar da za a iya kasuwa don ƙaddamar da fina-finai na lu'u-lu'u.

(5) Electron cyclotron resonance microwave plasma ingantacciyar sinadari mai tururi (ECR-MPECVD) Plasma na DC, RF plasma, da plasma na microwave wanda aka bayyana a baya duk sun rabu da bazuwar H2, ko hydrocarbons, zuwa rukunin atom hydrogen da carbon-hydrogen atom kungiyoyin, don haka suna ba da gudummawa ga samuwar fina-finai na lu'u-lu'u. Tun da electron cyclotron resonance plasma zai iya samar da babban yawa plasma (> 1x1011cm-3), ECR-MPECVD ya fi dacewa da girma da kuma ƙaddamar da fina-finai na lu'u-lu'u. Duk da haka, saboda ƙananan iskar gas (10-4- zuwa 10-2 Torr) da aka yi amfani da shi a cikin tsarin ECR, wanda ya haifar da ƙananan ƙididdiga na fina-finai na lu'u-lu'u kawai, hanyar da ake amfani da ita a halin yanzu shine fim din lu'u-lu'u.

-An fitar da wannan labarin ta hanyar masana'antar injin shafa Guangdong Zhenhua