Isici esiyinhloko sendlela yokuhwamuka kwe-vacuum yokufaka amafilimu izinga eliphezulu lokufakwa. Isici esiyinhloko sendlela yokuphalaza ububanzi bezinto zefilimu ezitholakalayo kanye nokufana okuhle kwesendlalelo sefilimu, kodwa izinga lokufakwa liphansi. Ukugqoka kwe-ion kuyindlela ehlanganisa lezi zinqubo ezimbili.
Isimiso sokumboza i-ion kanye nezimo zokwakheka kwefilimu
Isimiso sokusebenza sokumbozwa kwe-ion siboniswe ku-Pic. Igumbi le-vacuum liphonswa kungcindezi engaphansi kuka-10-4 Pa, bese ligcwaliswa ngegesi engasebenzi (isb. i-argon) kungcindezi engu-0.1 ~ 1 Pa. Ngemva kokusetshenziswa kwe-DC voltage engemihle efika ku-5 kV ku-substrate, kwakhiwa indawo ye-plasma yokukhishwa kwegesi ekhanyayo ephansi phakathi kwe-substrate kanye ne-crucible. Ama-ion egesi engasebenzi asheshiswa yinsimu kagesi futhi aqhumise ubuso be-substrate, ngaleyo ndlela ahlanze ubuso be-workpiece. Ngemva kokuba le nqubo yokuhlanza isiqediwe, inqubo yokumboza iqala ngokushiswa kwezinto ezizombozwa ku-crucible. Izinhlayiya zomusi eziphefumulayo zingena endaweni ye-plasma futhi zishayisane nama-ion nama-electron aphikisiwe angasebenzi kahle, kanti ezinye zezinhlayiya zomusi ziyahlukaniswa futhi ziqhumise i-workpiece kanye nobuso bokumboza ngaphansi kokusheshisa kwensimu kagesi. Enqubweni yokufaka ama-ion, akukhona nje kuphela ukufakwa kwama-ion amahle kodwa futhi nokuchitheka kwama-ion amahle ku-substrate, ngakho-ke ifilimu encane ingakhiwa kuphela uma umphumela wokufakwa umkhulu kunomphumela wokuchitheka.
Inqubo yokumboza ama-ion, lapho i-substrate ihlala igcwele ama-ion anamandla aphezulu, ihlanzekile kakhulu futhi inezinzuzo eziningana uma kuqhathaniswa nokumboza okuphumayo kanye nokuhwamuka.
(1) Ukunamathela okuqinile, ungqimba lokumboza aluphuki kalula.
(a) Enqubweni yokumboza ama-ion, inani elikhulu lezinhlayiya ezinamandla aphezulu ezikhiqizwa ukukhishwa kokukhanya zisetshenziselwa ukukhiqiza umphumela wokumpompa we-cathodic ebusweni be-substrate, ukumpompa nokuhlanza igesi namafutha afakwe ebusweni be-substrate ukuze kuhlanzwe ubuso be-substrate kuze kube yilapho yonke inqubo yokumboza isiqediwe.
(b) Esigabeni sokuqala sokumboza, ukukhafula nokufaka izinto ndawonye, okungakha ungqimba lokuguquka kwezingxenye esibonakalayo sesisekelo sefilimu noma ingxube yezinto zefilimu nezinto eziyisisekelo, ezibizwa ngokuthi “ungqimba lokusabalalisa okungamampunge”, olungathuthukisa ngempumelelo ukusebenza kokunamathela kwefilimu.
(2) Izakhiwo ezinhle zokugoqa. Esinye isizathu ukuthi ama-athomu ezinto zokumboza afakwa i-ion ngaphansi komfutho ophezulu futhi ashayisane nama-molecule egesi izikhathi eziningana ngesikhathi senqubo yokufinyelela i-substrate, ukuze ama-ion ezinto zokumboza ahlakazeke nxazonke kwe-substrate. Ngaphezu kwalokho, ama-athomu ezinto zokumboza afakwe i-ion afakwa ebusweni be-substrate ngaphansi kwesenzo sensimu kagesi, ngakho-ke yonke i-substrate ifakwa ngefilimu encane, kodwa i-evaporation coating ayikwazi ukufeza lo mphumela.
(3) Ikhwalithi ephezulu yengubo ibangelwa ukuchitheka kwama-condensate okubangelwa ukuqhuma okuqhubekayo kwefilimu efakwe ama-ion amahle, okuthuthukisa ubuningi besendlalelo sengubo.
(4) Ukukhetha okubanzi kwezinto zokumboza kanye nezingxenye ezingaphansi komhlaba kungambozwa ezintweni zensimbi noma ezingezona ezensimbi.
(5) Uma kuqhathaniswa nokufakwa komusi wamakhemikhali (i-CVD), inezinga lokushisa eliphansi le-substrate, ngokuvamile elingaphansi kuka-500°C, kodwa amandla ayo okunamathela afana ngokuphelele namafilimu okufakwa komusi wamakhemikhali.
(6) Izinga eliphezulu lokufakwa, ukwakheka kwefilimu okusheshayo, futhi kungamboza ubukhulu bamafilimu kusukela kumashumi ama-nanometer kuya kuma-micron.
Ububi bokumbozwa kwe-ion yilezi: ukujiya kwefilimu akukwazi ukulawulwa ngokunembile; ukuhlushwa kwamaphutha kuphezulu uma kudingeka ukumbozwa okuncane; futhi amagesi azongena ebusweni ngesikhathi sokumbozwa, okuzoshintsha izakhiwo zobuso. Kwezinye izimo, kwakheka imigodi kanye nama-nuclei (angaphansi kuka-1 nm).
Ngokuphathelene nesilinganiso sokufakwa, ukugqoka kwe-ion kufana nendlela yokuhwamuka. Ngokuphathelene nekhwalithi yefilimu, amafilimu akhiqizwa ukugqoka kwe-ion asondele noma angcono kunalawo alungiselelwe ngokutshiza.
Isikhathi sokuthunyelwe: Novemba-08-2022