Ko te āhuatanga matua o te tikanga mimiti korehau mō te whakatakoto kiriata ko te tere whakatakoto teitei. Ko te āhuatanga matua o te tikanga ruku ko te whānuitanga o ngā rauemi kiriata e wātea ana me te ōritetanga pai o te paparanga kiriata, engari he iti te tere whakatakoto. Ko te paninga katote he tikanga e whakakotahi ana i ēnei tukanga e rua.
Te kaupapa o te paninga katote me ngā tikanga hanganga kiriata
Kei te whakaaturia te kaupapa mahi o te paninga katote i te Pikitia. Ka papua te rūma korehau ki te pēhanga i raro i te 10-4 Pa, kātahi ka whakakīia ki te hau korehau (hei tauira, te argon) ki te pēhanga o te 0.1~1 Pa. Whai muri i te whakamahinga o te ngaohiko DC kino tae atu ki te 5 kV ki te papa, ka whakatūria he rohe plasma tukunga mura hau pēhanga iti i waenganui i te papa me te oko. Ka whakatereterehia ngā katote hau korehau e te papa hiko ka pupuhi i te mata o te papa, ka horoia te mata o te mea mahi. Whai muri i te otinga o tēnei tukanga horoi, ka tīmata te tukanga paninga me te mimiti o te rauemi hei paninga ki roto i te oko. Ka tomo ngā matūriki kohu mimiti ki te rohe plasma ka tukinga ki ngā katote pai korehau me ngā irahiko kua wehea, ā, ka wehea ētahi o ngā matūriki kohu ka pupuhi i te mea mahi me te mata paninga i raro i te whakateretere o te papa hiko. I roto i te tukanga whakakikorua katote, ehara i te mea ko te whakatakotoranga anake engari ko te ruperupe o ngā katote pai ki runga i te papa, nō reira ka taea te hanga i te kiriata angiangi ina nui ake te pānga whakatakotoranga i te pānga ruperupe.
Ko te tukanga paninga katote, e whakakiia tonutia ana te papa ki ngā katote pūngao-nui, he tino ma, ā, he maha ngā painga ki te whakataurite ki te paninga pupuhi me te paninga mimiti.
(1) He kaha te piri, kāore e ngawari te tihore o te paparanga paninga.
(a) I roto i te tukanga paninga katote, ka whakamahia he maha o ngā matūriki pūngao-teitei i hangaia e te tukunga kanapa hei whakaputa i te pānga pupuhi katote ki runga i te mata o te papa, ka pupuhihia, ka horoia te hau me te hinu e piri ana ki runga i te mata o te papa hei pure i te mata o te papa tae noa ki te otinga o te tukanga paninga katoa.
(b) I te tīmatanga o te paninga, ka noho tahi te ruperupe me te whakatakotoranga, ka taea te hanga i tētahi paparanga whakawhiti o ngā wāhanga i te atanga o te turanga kiriata, i tētahi ranunga rānei o te rauemi kiriata me te rauemi turanga, e kiia nei ko te "paparanga pseudo-diffusion", ka taea te whakapai ake i te mahi piri o te kiriata.
(2) Ngā āhuatanga takai pai. Ko tētahi take he mea ka whaka-ionia ngā ngota o te rauemi paninga i raro i te pēhanga teitei, ā, ka tukinga ki ngā ngota hau i ngā wā maha i te tukanga o te tae atu ki te papa, kia taea ai te marara ngā katote rauemi paninga huri noa i te papa. Hei tāpiri, ka whakatakotoria ngā ngota rauemi paninga kua whaka-ionia ki runga i te mata o te papa i raro i te mahi a te mara hiko, kia whakatakotoria ai te papa katoa ki te kiriata angiangi, engari kāore e taea e te paninga mimiti te whakatutuki i tēnei pānga.
(3) Ko te kounga teitei o te paninga nā te pupuhi o ngā wai whakapūpū i puta mai i te pupuhi tonu o te kiriata kua whakatakotoria ki ngā katote pai, e whakapai ake ana i te mātotoru o te paparanga paninga.
(4) He whānuitanga o ngā rauemi paninga me ngā papa ka taea te pani ki ngā rauemi whakarewa, ki ngā rauemi kore-whakarewa rānei.
(5)Ki te whakatauritea ki te matū whakapūtanga mamaoa (CVD), he iti ake te pāmahana o te papa, i raro iho i te 500°C, engari he rite tonu tōna kaha piri ki ngā kiriata matū whakapūtanga mamaoa.
(6) He tere te whakatakotoranga, he tere te hanganga o te kiriata, ā, he matotoru pea o ngā kiriata mai i ngā tekau nanometa ki ngā maikorona.
Ko ngā ngoikoretanga o te paninga katote: kāore e taea te whakahaere tika i te matotoru o te kiriata; he nui te kukū o ngā hapa ina hiahiatia he paninga pai; ā, ka uru ngā hau ki te mata i te wā e pania ana, ka huri i ngā āhuatanga o te mata. I ētahi wā, ka puta hoki ngā kōhao me ngā karihi (iti iho i te 1 nm).
Mō te tere whakatakoto, he rite te paninga katote ki te tikanga mimiti. Mō te kounga o te kiriata, he tata, he pai ake rānei ngā kiriata i hangaia mā te paninga katote i ērā i hangaia mā te pupuhi.
Wā tuku: Whiringa-ā-rangi-08-2022