Mbali yaikulu ya njira yotulutsira mpweya mu vacuum poika mafilimu ndi kuchuluka kwa mpweya wotuluka. Mbali yaikulu ya njira yotulutsira mpweya ndi mitundu yosiyanasiyana ya zipangizo zomwe zilipo pa filimu komanso kufanana kwa filimuyo, koma kuchuluka kwa mpweya wotuluka ndi kochepa. Kuphimba kwa ayoni ndi njira yomwe imaphatikiza njira ziwirizi.
Mfundo yopangira ma ion ndi momwe filimu imapangidwira
Mfundo yogwirira ntchito ya ion coating ikuwonetsedwa mu Chithunzi. Chipinda chotsukira mpweya chimapopedwa kufika pa mphamvu yochepera 10-4 Pa, kenako chimadzazidwa ndi mpweya wosagwira ntchito (monga argon) kufika pa mphamvu ya 0.1 ~ 1 Pa. Pambuyo poti magetsi a DC osagwira ntchito afika pa 5 kV agwiritsidwa ntchito pa substrate, malo otulutsa mpweya wochepa wa plasma amakhazikitsidwa pakati pa substrate ndi crucible. Ma ions a mpweya wosagwira ntchito amafulumizitsidwa ndi mphamvu yamagetsi ndikuphulitsa pamwamba pa substrate, motero amatsuka pamwamba pa workpiece. Njira yoyeretsera iyi ikatha, njira yophikira imayamba ndi nthunzi ya zinthu zomwe ziyenera kuphimbidwa mu crucible. Tinthu ta nthunzi tomwe timaphikidwa mu plasma timalowa mu plasma zone ndikugundana ndi ma ions ndi ma electron osagwira ntchito, ndipo tinthu tina ta nthunzi timaphwanyidwa ndikuphulitsa workpiece ndi pamwamba pa covering pansi pa mphamvu ya magetsi. Mu ndondomeko yopangira ma ion, sikuti pamakhala kuyika ma ion abwino okha komanso kutayikira kwa ma ion abwino pa substrate, kotero filimu yopyapyala imatha kupangidwa pokhapokha ngati zotsatira zake zili zazikulu kuposa zotsatira zake.
Njira yophikira ma ion, momwe pansi pake nthawi zonse imadzazidwa ndi ma ion amphamvu kwambiri, ndi yoyera kwambiri ndipo ili ndi zabwino zingapo poyerekeza ndi kupopera ndi kupopera madzi.
(1) Kumamatira mwamphamvu, wosanjikiza wokutira sumasuka.
(a) Mu njira yophimba ma ion, tinthu tambirimbiri tomwe timapangidwa ndi kuwala timagwiritsidwa ntchito popanga mphamvu yotulutsa ma sputter pamwamba pa substrate, kutulutsa ndi kuyeretsa mpweya ndi mafuta omwe amamatiridwa pamwamba pa substrate kuti ayeretse pamwamba pa substrate mpaka njira yonse yophimba itatha.
(b) Poyamba kuphimba, kupopera ndi kuyika zinthu pamodzi, zomwe zimatha kupanga gawo losinthira la zigawo zomwe zili mkati mwa filimu kapena kusakaniza kwa zinthu zomwe zili mkati mwa filimuyo ndi zinthu zomwe zili pansi pake, zomwe zimatchedwa "pseudo-diffusion layer", zomwe zingathandize bwino kuti filimuyo igwire bwino ntchito.
(2) Kapangidwe kabwino kozungulira. Chifukwa chimodzi ndichakuti maatomu a zinthu zophimba amasinthidwa kukhala ayoni pansi pa mphamvu yayikulu ndipo amagundana ndi mamolekyu a mpweya kangapo panthawi yofika pansi, kotero kuti ma ayoni a zinthu zophimba amatha kufalikira mozungulira pansi. Kuphatikiza apo, maatomu a zinthu zophimba amaikidwa pamwamba pa substrate pansi pa mphamvu yamagetsi, kotero substrate yonse imayikidwa ndi filimu yopyapyala, koma zophimba za evaporation sizingakwaniritse izi.
(3) Ubwino wa chophimbacho ndi chifukwa cha kuphulika kwa ma condensate komwe kumachitika chifukwa cha kuphulika kosalekeza kwa filimu yokhala ndi ma ayoni abwino, zomwe zimapangitsa kuti chivundikirocho chikhale cholimba.
(4) Zipangizo zosiyanasiyana zokutira ndi zinthu zina zitha kuphimbidwa pa zinthu zachitsulo kapena zosakhala zachitsulo.
(5) Poyerekeza ndi chemical vapor deposition (CVD), ili ndi kutentha kochepa kwa substrate, nthawi zambiri pansi pa 500°C, koma mphamvu yake yomatira imafanana kwathunthu ndi mafilimu omatira nthunzi ya mankhwala.
(6) Kuchuluka kwa kuyika kwa filimu, kupanga filimu mwachangu, komanso makulidwe a mafilimu kuyambira makumi a nanometers mpaka ma microns.
Zoyipa za kupaka ma ion ndi izi: makulidwe a filimuyi sangayang'aniridwe bwino; kuchuluka kwa zolakwika kumakhala kwakukulu pamene kupaka pang'ono kukufunika; ndipo mpweya umalowa pamwamba panthawi yopaka, zomwe zimasintha mawonekedwe a pamwamba. Nthawi zina, mabowo ndi ma nuclei (osakwana 1 nm) zimapangidwanso.
Ponena za kuchuluka kwa ma ion, ma ion coverage ndi ofanana ndi njira yotulutsira evaporation. Ponena za mtundu wa filimu, mafilimu opangidwa ndi ma ion coverage ali pafupi kapena abwino kuposa omwe amakonzedwa ndi ma sputtering.
Nthawi yotumizira: Novembala-08-2022