Eyona nto iphambili kwindlela yokufutha i-vacuum evaporation kwiifilimu zokufaka iifilimu yizinga eliphezulu lokufaka iifilimu. Eyona nto iphambili kwindlela yokufutha kuluhlu olubanzi lwezinto zefilimu ezikhoyo kunye nokufana okuhle komaleko wefilimu, kodwa izinga lokufaka iifilimu liphantsi. I-ion coating yindlela edibanisa ezi nkqubo zimbini.
Umgaqo wokugquma i-ion kunye neemeko zokwakheka kwefilimu
Umgaqo wokusebenza we-ion coating uboniswe kwiPic. Igumbi le-vacuum liphonswa kuxinzelelo olungaphantsi kwe-10-4 Pa, lize lizaliswe yigesi engasebenziyo (umz. i-argon) kuxinzelelo lwe-0.1 ~ 1 Pa. Emva kokuba i-DC voltage engalunganga ukuya kuthi ga kwi-5 kV isetyenzisiwe kwi-substrate, kusekwa indawo yeplasma yokukhupha igesi ekhanyayo enoxinzelelo oluphantsi phakathi kwe-substrate kunye ne-crucible. Ii-ion zegesi engasebenziyo zikhawuleziswa yintsimi yombane kwaye ziqhumise umphezulu we-substrate, ngaloo ndlela zicoca umphezulu we-workpiece. Emva kokuba le nkqubo yokucoca igqityiwe, inkqubo yokugcoba iqala ngokufudumeza izinto eziza kugqunywa kwi-crucible. Ii-particles zomphunga ezivuthululweyo zingena kwi-plasma zone kwaye zingqubane nee-ions kunye nee-electron ezidityanisiweyo ezingenayo, kwaye ezinye zee-particles zomphunga ziyaqhekeka kwaye ziqhumise i-workpiece kunye nomphezulu wogquma phantsi kokukhawulezisa kwentsimi yombane. Kwinkqubo yokufaka ii-ion plating, akukho kuphela ukubekwa kwee-ions ezilungileyo kodwa kukwakho nokutshiza kwee-ions ezilungileyo kwi-substrate, ngoko ke ifilimu encinci inokwakheka kuphela xa isiphumo sokubekwa sikhulu kunesiphumo sokukhupha ii-ions.
Inkqubo yokugquma ii-ion, apho i-substrate ihlala igcwele ii-ion ezinamandla aphezulu, icocekile kakhulu kwaye ineenzuzo ezininzi xa kuthelekiswa nokugquma kunye nokugquma umphunga.
(1) Ukunamathela okuqinileyo, umaleko wokugquma awusuki lula.
(a) Kwinkqubo yokugquma ii-ion, inani elikhulu lamasuntswana anamandla aphezulu aveliswa kukukhupha ukukhanya asetyenziselwa ukuvelisa isiphumo sokugquma kwe-cathodic kumphezulu we-substrate, ukugquma nokucoca igesi kunye neoyile efunxwe kumphezulu we-substrate ukucoca umphezulu we-substrate de yonke inkqubo yokugquma igqitywe.
(b) Kwinqanaba lokuqala lokugquma, ukutshiza kunye nokubeka izinto ndawonye, okunokwenza umaleko wotshintsho lwezinto kwindawo edibanisa isiseko sefilimu okanye umxube wezinto zefilimu kunye nezinto ezisisiseko, ezibizwa ngokuba yi-"pseudo-diffusion layer", enokuphucula ngempumelelo ukusebenza kokunamathela kwefilimu.
(2) Iipropati ezilungileyo zokusonga. Esinye isizathu kukuba iiathom zezinto zokugquma ziyayi-ionized phantsi koxinzelelo oluphezulu kwaye zingqubana neemolekyuli zegesi amaxesha amaninzi ngexesha lenkqubo yokufikelela kwi-substrate, ukuze ii-ion zezinto zokugquma zisasazeke zijikeleze i-substrate. Ukongeza, iiathom zezinto zokugquma eziyi-ionized zibekwe phezu komphezulu we-substrate phantsi kwesenzo sentsimi yombane, ngoko ke yonke i-substrate ibekwe ngefilimu encinci, kodwa i-evaporation coating ayinakufezekisa esi siphumo.
(3) Umgangatho ophezulu wengubo ubangelwa kukutshiza kwe-condensates okubangelwa kukuqhushumba rhoqo kwefilimu efakwe ii-ions ezintle, nto leyo ephucula uxinano lwengubo.
(4) Ukhetho olubanzi lwezinto zokugquma kunye nezinto ezisetyenziswa phantsi komhlaba zinokugqunywa kwizinto zesinyithi okanye ezingezizo zesinyithi.
(5) Xa ithelekiswa ne-chemical vapor deposition (CVD), inobushushu obuphantsi be-substrate, obuhlala bungaphantsi kwama-500°C, kodwa amandla ayo okunamathela afana ngokupheleleyo neefilimu ze-chemical vapor deposition.
(6) Izinga eliphezulu lokufakwa kwefilimu, ukwakheka kwefilimu ngokukhawuleza, kunye nobukhulu beefilimu obunokugquma ukusuka kumashumi ee-nanometer ukuya kwii-microns.
Iingxaki zokugquma ii-ion zezi: ubukhulu befilimu abunakulawulwa ngokuchanekileyo; uxinano lweziphene luphezulu xa kufuneka ukugquma okuncinci; kwaye iigesi ziya kungena kumphezulu ngexesha lokugquma, nto leyo eya kutshintsha iimpawu zomphezulu. Kwezinye iimeko, imingxuma kunye neenuclei (ezingaphantsi kwe-1 nm) nazo ziyakhiwa.
Ngokuphathelele izinga lokufakwa kwe-ion, i-ion coating iyafana nendlela yokuphuma komoya. Ngokuphathelele umgangatho wefilimu, iifilimu eziveliswa yi-ion coating zisondele okanye zingcono kunezo zilungiselelwe ngokutshiza.
Ixesha lokuthumela: Novemba-08-2022