Babban fasalin hanyar ƙafewar iska don adana fina-finai shine babban adadin ajiya.Babban fasalin hanyar sputtering shine nau'in nau'in kayan fim da aka samu da kuma daidaitaccen nau'in fim ɗin fim, amma ƙimar ƙaddamarwa yana da ƙasa.Ion shafi hanya ce da ta haɗu da waɗannan matakai guda biyu.
Ion shafi ka'idar da kuma yanayin samuwar fim
An nuna ka'idar aiki na murfin ion a cikin Hoton.Ana yin famfo ɗakin datti zuwa matsa lamba a ƙasa 10-4 Pa, sa'an nan kuma cika da iskar gas (misali argon) zuwa matsa lamba na 0.1 ~ 1 Pa. Bayan an yi amfani da wutar lantarki mara kyau na DC har zuwa 5 kV zuwa ga substrate, An kafa yankin plasma ƙaramar matsin iskar gas mai walƙiya tsakanin maƙallan da keɓaɓɓu.ions iskar gas da ba za a iya amfani da su ba suna haɓaka ta hanyar wutar lantarki kuma suna bombard saman ƙasa, don haka tsaftace farfajiyar aikin.Bayan an kammala wannan aikin tsaftacewa, tsarin sutura yana farawa tare da vaporization na kayan da za a rufe a cikin kullun.The vaporized tururi barbashi shiga plasma zone da karo tare da dissociated inert tabbatacce ions da electrons, da kuma wasu daga cikin tururi barbashi an dissociated da bombard da workpiece da shafi surface karkashin hanzari na lantarki filin.A cikin tsari na ion plating, ba kawai ajiya ba amma har ma da zubar da ions masu kyau a kan substrate, don haka za a iya samar da fim na bakin ciki kawai lokacin da tasirin ƙaddamarwa ya fi girma fiye da tasirin sputtering.
Tsarin suturar ion, wanda koyaushe ana bombarded da substrate tare da ions masu ƙarfi, yana da tsabta sosai kuma yana da fa'idodi da yawa idan aka kwatanta da sputtering da shafe shafe.
(1) Strong mannewa, shafi Layer ba ya kwasfa da sauƙi.
(a) A cikin tsarin suturar ion, ana amfani da babban adadin adadin kuzari mai ƙarfi da aka samar ta hanyar fitarwa mai haske don samar da tasirin sputtering cathodic akan farfajiyar ma'aunin, sputtering da tsaftace iskar gas da mai da aka tallata a saman farfajiyar. substrate don tsarkake farfajiyar ƙasa har sai an kammala aikin shafa duka.
(b) A farkon mataki na shafi, sputtering da deposition coexist, wanda zai iya samar da wani canji Layer na aka gyara a cikin dubawa na fim tushe ko cakuda fim kayan da tushe abu, da ake kira "pseudo-diffusion Layer", wanda zai iya inganta ingantaccen aikin adhesion na fim ɗin.
(2) Kyawawan kaddarorin kunsa.Daya dalili shi ne cewa rufi abu atom suna ionized a karkashin babban matsa lamba da kuma karo da iskar gas kwayoyin sau da yawa a lokacin aiwatar da kai da substrate, sabõda haka, da rufi abu ions iya warwatse a kusa da substrate.Bugu da ƙari, ana ajiye nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i) wanda aka ajiye a saman saman substrate a ƙarƙashin aikin wutar lantarki,don haka duk abin da aka ajiye tare da fim na bakin ciki, amma murfin evaporation ba zai iya cimma wannan sakamako ba.
(3) Babban ingancin rufin shine saboda sputtering na condensates lalacewa ta hanyar da akai bombardment na ajiye fim tare da m ions, wanda inganta yawa na shafi Layer.
(4)A fadi da zaɓi na shafi kayan da substrates za a iya mai rufi a kan karfe ko wadanda ba karfe kayan.
(5) Idan aka kwatanta da sinadari mai tururi (CVD), yana da ƙananan zafin jiki, yawanci ƙasa da 500 ° C, amma ƙarfin mannewa yana da cikakkiyar kwatankwacin sinadarai na jigilar sinadarai.
(6)Maɗaukakin ƙima, haɓakar fim mai sauri, kuma yana iya ɗaukar kaurin fina-finai daga dubun nanometers zuwa microns.
Rashin lahani na murfin ion shine: kauri na fim ba za a iya sarrafa shi daidai ba;ƙaddamar da lahani yana da girma lokacin da ake buƙatar sutura mai kyau;kuma iskar gas za su shiga cikin farfajiya yayin rufewa, wanda zai canza kaddarorin saman.A wasu lokuta, cavities da nuclei (kasa da 1 nm) suma suna samuwa.
Dangane da adadin ajiya, rufin ion yayi daidai da hanyar ƙafewa.Dangane da ingancin fina-finai, fina-finan da ion shafi ke samarwa suna kusa ko mafi kyau fiye da waɗanda aka shirya ta sputtering.
Lokacin aikawa: Nuwamba-08-2022