Isici esiyinhloko sendlela yokuhwamuka kwe-vacuum yokufaka amafilimu izinga eliphezulu lokubeka. Isici esiyinhloko sendlela ye-sputtering ububanzi bezinto zefilimu ezitholakalayo kanye nokufana okuhle kwesendlalelo sefilimu, kodwa izinga lokubeka liphansi. I-ion coating iyindlela ehlanganisa lezi zinqubo ezimbili.
Isimiso se-ion coating kanye nezimo zokwakheka kwefilimu
Umgomo wokusebenza we-ion coating ukhonjiswe ku-Pic. Igumbi le-vacuum liphonswa ekucindezelweni okungaphansi kwe-10-4 Pa, bese ligcwaliswa ngegesi ye-inert (isb i-argon) ekucindezelweni kwe-0.1 ~ 1 Pa. Ngemuva kokuthi i-voltage ye-DC engalungile efika ku-5 kV isetshenziswe ku-substrate, indawo ye-plasma yokukhanya kwegesi ephansi iyasungulwa phakathi kwe-substrate ne-crucible. I-ion yegesi ye-inert isheshisa inkambu kagesi futhi ibhomu ebusweni be-substrate, ngaleyo ndlela ihlanza ubuso bomsebenzi. Ngemuva kokuthi le nqubo yokuhlanza isiqediwe, inqubo yokumboza iqala ngokushisa kwezinto okumele zifakwe ku-crucible. Izinhlayiya ze-vaporized vaporized zingena endaweni ye-plasma futhi zishayisane nama-ion angenayo angenayo nama-electron ahlukanisiwe, futhi ezinye izinhlayiya zomhwamuko ziyahlukaniswa futhi ziqhume ucezu lokusebenzela kanye nendawo enamathelayo ngaphansi kokusheshisa kwensimu kagesi. Enqubweni yokucwenga kwe-ion, akukhona nje ukubekelwa phansi kodwa futhi nokufafazwa kwama-ion aqondile ku-substrate, ngakho-ke ifilimu elizacile lingakhiwa kuphela uma umthelela we-deposition mkhulu kunomphumela wokufafaza.
Inqubo yokumboza i-ion, lapho i-substrate ihlale igcwele ama-ion anamandla amakhulu, ihlanzeke kakhulu futhi inezinzuzo eziningi uma iqhathaniswa ne-sputtering kanye ne-evaporation coating.
(1)Ukunamathela okuqinile, ungqimba olunamathelayo aluqedwa kalula.
(a)Enqubweni yokumboza i-ion, inani elikhulu lezinhlayiya ezinamandla amakhulu ezikhiqizwe ukukhishwa okukhanyayo zisetshenziselwa ukukhiqiza umphumela we-cathodic sputtering ebusweni be-substrate, ukuhlambalaza nokuhlanza igesi namafutha adsorbed ebusweni be-substrate ukuze kuhlanzwe indawo engaphansi kuze kuqedwe yonke inqubo yokumboza.
(b)Esigabeni sokuqala sokumboza, ukuphalaza kanye nokufakwa kuhlangana ndawonye, okungakha ungqimba olushintshayo lwezingxenye ekuxhumaneni kwesisekelo sefilimu noma ingxube yento yefilimu nesisekelo, esibizwa ngokuthi “i-pseudo-diffusion layer”, engathuthukisa ngempumelelo ukusebenza kokunamathela kwefilimu.
(2)Izindawo ezinhle zokugoqa. Esinye sezizathu ukuthi ama-athomu ezinto zokumboza afakwa ionized ngaphansi kwengcindezi ephezulu futhi ashayisane nama-molecule egesi izikhathi eziningana phakathi nenqubo yokufinyelela ku-substrate, ukuze ama-ion wezinto zokumboza ahlakazeke azungeze i-substrate. Ngaphezu kwalokho, ama-athomu e-ionized coating afakwa ebusweni be-substrate ngaphansi kwesenzo sensimu kagesi, ngakho-ke yonke i-substrate ifakwe ngefilimu encane, kodwa ukuhwamuka kwe-evaporation akukwazi ukufeza lo mphumela.
(3)Ikhwalithi ephezulu yokwemboza ingenxa yokufafaza kwama-condensate okubangelwa ukuqhunyiswa kwamabhomu okuqhubekayo kwefilimu efakwe ngama-ion aqondile, okuthuthukisa ukuminyana kongqimba.
(4) Ukukhethwa okubanzi kwezinto zokumboza nama-substrates kungambozwa ezintweni ezinsimbi noma ezingezona ezensimbi.
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Ukungalungi kokugqoka kwe-ion yilezi: ubukhulu befilimu abukwazi ukulawulwa ngokunembile; ukuhlushwa kweziphambeko kuphezulu lapho kudingeka ukunamathela okuhle; namagesi azongena ebusweni ngesikhathi sokumboza, okuzoshintsha izakhiwo ezingaphezulu. Kwezinye izimo, ama-cavities nama-nuclei (ngaphansi kwe-1 nm) nawo akhiwa.
Ngokuqondene nesilinganiso sokubeka, ukunamathela kwe-ion kuqhathaniswa nendlela yokuhwamuka. Ngokuqondene nekhwalithi yefilimu, amafilimu akhiqizwa ukumbozwa kwe-ion aseduze noma angcono kunalawo alungiselelwe ngokufafaza.
Isikhathi sokuthumela: Nov-08-2022