Isimiso sokumboza nge-vacuum evaporation
1, Imishini kanye nenqubo ebonakalayo yokumboza nge-vacuum evaporation
Imishini yokumboza ukuhwamuka kwe-vacuum yakhiwe kakhulu yigumbi lokuvaleka kanye nohlelo lokukhipha umoya. Ngaphakathi kwegumbi lokuvaleka umoya, kukhona umthombo wokuhwamuka (isb. i-heater yokuhwamuka), uhlaka lwe-substrate kanye ne-substrate, i-heater ye-substrate, uhlelo lokukhipha umoya, njll.
Izinto zokumboza zifakwa emthonjeni wokuhwamuka kwegumbi lokuvaleka, futhi ngaphansi kwezimo eziphezulu ze-vacuum, zishiswa ngumthombo wokuhwamuka ukuze zihwamuke. Lapho isilinganiso samahhala sama-molecule omhwamuko sikhulu kunosayizi oqondile wegumbi lokuvaleka, ngemva kokuba ama-athomu nama-molecule omhwamuko wefilimu ephumile ebusweni bomthombo wokuhwamuka, akuvamile ukuthintelwa ukushayisana kwamanye ama-molecule noma ama-athomu, futhi afinyelele ngqo ebusweni be-substrate ezogqokwa. Ngenxa yokushisa okuphansi kwe-substrate, izinhlayiya zomhwamuko wefilimu ziyahlangana phezu kwayo bese zakha ifilimu.
Ukuze kuthuthukiswe ukunamathela kwama-molecule okuhwamuka kanye ne-substrate, i-substrate ingasetshenziswa ngokushisa okufanele noma ukuhlanza ama-ion. Isembozo sokuhwamuka kwe-vacuum sidlula ezinqubweni ezilandelayo zomzimba kusukela ekuhwamukeni kwezinto, ukuthuthwa kuya ekufakweni kwefilimu.
(1) Kusetshenziswa izindlela ezahlukahlukene zokuguqula ezinye izinhlobo zamandla zibe amandla okushisa, izinto zefilimu ziyashiswa ukuze ziphele noma zincibilike zibe izinhlayiya zegesi (ama-athomu, ama-molecule noma amaqoqo e-athomu) ngenani elithile lamandla (0.1 kuya ku-0.3 eV).
(2) Izinhlayiya zegesi ziyaphuma ebusweni befilimu bese zithuthwa ziye ebusweni be-substrate ngesivinini esithile sokunyakaza, ngokuyisisekelo ngaphandle kokushayisana, ngendlela eqondile.
(3) Izinhlayiya zegesi ezifika ebusweni be-substrate ziyahlangana bese ziyahlangana, bese zikhula zibe ifilimu yesigaba esiqinile.
(4) Ukuhlelwa kabusha noma ukuhlanganiswa kwamakhemikhali kwama-athomu akha ifilimu.
2, Ukushisa kokuhwamuka
(1) Ukumelana nokuhwamuka kokushisa
Ukushiswa kokushisa okumelana nakho kuyindlela elula nesetshenziswa kakhulu yokushisa, evame ukusetshenziswa ezintweni zokumboza ezinezinga lokuncibilika elingaphansi kuka-1500℃, izinsimbi ezinamazinga aphezulu okuncibilika ngesimo sensimbi noma seshidi (W, Mo, Ti, Ta, boron nitride, njll.) zivame ukwenziwa zibe uhlobo olufanele lomthombo wokuhwamuka, zigcwele izinto zokuhwamuka, ngokushisa kukaJoule kwamandla kagesi ukuze kuncibilikiswe, kuhwamuke noma kuncibilikiswe izinto zokumboza, isimo somthombo wokuhwamuka sihlanganisa kakhulu i-multi-strand spiral, efana no-U, i-sine wave, ipuleti elincane, isikebhe, ubhasikidi wekhoni, njll. Ngesikhathi esifanayo, indlela idinga ukuthi izinto zomthombo wokuhwamuka zibe nezinga eliphezulu lokuncibilika, umfutho womusi ophansi, izakhiwo zamakhemikhali ezizinzile, zingabi nokusabela kwamakhemikhali nezinto zokumboza ekushiseni okuphezulu, ukumelana okuhle nokushisa, ushintsho oluncane ekuxineni kwamandla, njll. Isebenzisa amandla aphezulu ngomthombo wokuhwamuka ukuze ifudumale futhi ihwamuke izinto zefilimu ngokushisa okuqondile, noma ifake izinto zefilimu esitsheni esenziwe nge-graphite kanye nama-oxide athile ensimbi amelana nokushisa okuphezulu (njenge-A202, B0) nezinye izinto zokushisa okungaqondile ukuze kuhwamuke.
Ukumelana nokushisa kokushisa kokumelana nokuhwamuka kunemikhawulo: izinsimbi eziphikisayo zinengcindezi ephansi yomhwamuko, okunzima ukwenza ifilimu encane; ezinye izakhi kulula ukwenza i-alloy ngentambo yokushisa; akulula ukuthola ukwakheka okufanayo kwefilimu ye-alloy. Ngenxa yesakhiwo esilula, intengo ephansi kanye nokusebenza okulula kwendlela yokumelana nokuhwamuka kokushisa, kuyindlela evamile kakhulu yokusebenzisa indlela yokuhwamuko.
(2) Ukuhwamuka kokushisa kwe-electron beam
Ukuhwamuka komsebe we-electron kuyindlela yokuhwamuka kwezinto zokumboza ngokuziqhumisa ngomsebe we-electron onamandla aphezulu ngokuwubeka ku-crucible yethusi epholile ngamanzi. Umthombo wokuhwamuka uqukethe umthombo wokukhipha ama-electron, umthombo wamandla wokusheshisa ama-electron, i-crucible (ngokuvamile i-crucible yethusi), i-magnetic field coil, kanye nesethi yamanzi apholile, njll. Kule divayisi, izinto ezifudumalayo zifakwa ku-crucible epholile ngamanzi, kanti umsebe we-electron uqhumisa ingxenye encane kakhulu yezinto, kuyilapho iningi lezinto ezisele lihlala ekushiseni okuphansi kakhulu ngaphansi komphumela wokupholisa we-crucible, ongabhekwa njengengxenye eqhumile ye-crucible. Ngakho-ke, indlela yokushisa umsebe we-electron ukuze kuhwamuke ingagwema ukungcola phakathi kwezinto zokumboza nezinto zomthombo wokuhwamuka.
Isakhiwo somthombo wokuhwamuka kwe-electron beam singahlukaniswa ngezinhlobo ezintathu: izibhamu eziqondile (izibhamu ze-Boules), izibhamu ezindandatho (eziphambukile ngogesi) kanye nezibhamu ze-e (eziphambukile ngogesi). Isibhamu esisodwa noma ngaphezulu singafakwa endaweni yokuhwamuka, esingahwamuka futhi sifake izinto eziningi ezahlukene ngesikhathi esisodwa noma ngokwehlukana.
Imithombo yokuhwamuka kwemisebe ye-electron inezinzuzo ezilandelayo.
①Ubuningi bemisebe ephezulu yomthombo wokuhwamuka kwe-electron beam bombardment bungathola ubukhulu bamandla obukhulu kakhulu kunomthombo wokushisa omelana nawo, okungahwamukisa izinto ezisezingeni eliphezulu lokuncibilika, njenge-W, Mo, Al2O3, njll.
②Izinto ezimbozwayo zifakwa esitsheni sethusi esipholile ngamanzi, esingagwema ukuhwamuka kwezinto eziwumthombo wokuhwamuka, kanye nokusabela phakathi kwazo.
③Ukushisa kungangezwa ngqo ebusweni bezinto zokumboza, okwenza ukusebenza kahle kokushisa kube phezulu kanye nokulahlekelwa kokuhanjiswa kokushisa kanye nemisebe yokushisa kube phansi.
Ububi bendlela yokuhwamuka kokushisa ngomsebe we-electron ukuthi ama-electron ayinhloko avela esibhamu se-electron kanye nama-electron esibili avela ebusweni bezinto zokumboza azokhipha ama-athomu ahwamukayo kanye nama-molecule egesi asele, okuzothinta ikhwalithi yefilimu ngezinye izikhathi.
(3) Ukuhwamuka kokushisa kokungeniswa okuvama kakhulu
Ukuhwamuka kokushisa kokungeniswa kwemvamisa ephezulu kuwukubeka i-crucible enezinto zokumboza phakathi kwe-high-frequency spiral coil, ukuze izinto zokumboza zikhiqize ugesi onamandla we-eddy kanye nomphumela we-hysteresis ngaphansi kokungeniswa kwensimu ye-electromagnetic yemvamisa ephezulu, okubangela ukuthi ungqimba lwefilimu lushise kuze kube yilapho luhwamuka futhi luhwamuke. Umthombo wokuhwamuka ngokuvamile uqukethe i-high-frequency coil epholiswe ngamanzi kanye ne-graphite noma i-ceramic (magnesium oxide, aluminium oxide, boron oxide, njll.). Ukunikezwa kwamandla emvamisa ephezulu kusebenzisa imvamisa esuka ku-1000 kuya ku-1000 Hz, amandla okufaka angama-kilowatts amaningana kuya kwamakhulu amaningana, uma ivolumu yezinto ze-membrane incane, kulapho imvamisa yokungeniswa iphakama khona. Imvamisa ye-induction coil ivame ukwenziwa ngethubhu yethusi epholiswe ngamanzi.
Ububi bendlela yokuhwamuka kokushisa okufudumezayo okuvama kakhulu ukuthi akulula ukulungisa amandla okufaka kahle, inezinzuzo ezilandelayo.
①Izinga eliphezulu lokuhwamuka kwamanzi
②Izinga lokushisa lomthombo wokuhwamuka liyafana futhi lizinzile, ngakho-ke akulula ukukhiqiza isenzakalo sokuchaphaza kwamaconsi okumboza, futhi kungagwema nesenzakalo semigodi ephepheni elifakiwe.
③Umthombo wokuhwamuka ulayishwa kanye, futhi izinga lokushisa lilula futhi kulula ukulilawula.
Isikhathi sokuthunyelwe: Okthoba-28-2022