Nheyo yekuputira kwemvura ye vacuum
1, Midziyo uye maitiro emuviri ekudzivirira kwemvura kubva muvacuum
Midziyo yekuputira vacuum evaporation inoumbwa zvakanyanya nekamuri re vacuum uye sisitimu yekubvisa. Mukati mekamuri re vacuum, mune manyuko emvura (semuenzaniso hita yemvura), furemu ye substrate ne substrate, hita ye substrate, sisitimu ye exhaust, nezvimwewo.
Chipfeko chinoiswa panzvimbo inobuda mvura mukamuri inobuda mvura, uye pasi pemamiriro ekunze akakwirira, chinodziiswa nechinhu chinobuda mvura kuti chibude. Kana avhareji yehuwandu hwemamorekuru emvura yakakura kupfuura saizi yekamuri inobuda mvura, mushure mekunge maatomu nemamorekuru emhepo yefirimu abuda pamusoro penzvimbo inobuda mvura, haawanzo kanganiswa nekusangana kwemamwe mamorekuru kana maatomu, uye anosvika zvakananga pamusoro penzvimbo inofanira kuputirwa. Nekuda kwekupisa kwakaderera kwechikamu chinobuda mvura, zvidimbu zvemhepo yefirimu zvinoungana pairi zvoita firimu.
Kuti zvinhu zvinake kunamira kwemamorekuru emvura nesubstrate, substrate inogona kuvhurwa nekudziya kana kuchenesa maion zvakanaka. Kuvhara kwevacuum evaporation kunopfuura nenzira dzinotevera kubva pakubuda kwemvura, kutakurwa kusvika pakuiswa mufirimu.
(1) Ichishandisa nzira dzakasiyana-siyana dzekushandura mamwe marudzi esimba kuita simba rinopisa, firimu rinopiswa kuti ripararire kana kuti riite zvidimbu zvegasi (maatomu, mamorekuru kana maatomu) zvine simba rakati (0.1 kusvika 0.3 eV).
(2) Zvidimbu zvegasi zvinobva pamusoro pefirimu zvoendeswa pamusoro pe substrate nekumhanya kwakati, pasina kuroverana, mumutsara wakatwasuka.
(3) Zvidimbu zvegasi zvinosvika pamusoro pe substrate zvinobatana uye zvinokura kuita firimu rechikamu chakasimba.
(4) Kugadziriswazve kana kubatana kwemakemikari kwemaatomu anoumba firimu.
2, Kudziya kwemvura
(1) Kuramba kupisa kwemvura
Kudzivirira kupisa evaporation ndiyo nzira iri nyore uye inonyanya kushandiswa yekupisa, inowanzo shandiswa pazvinhu zvekuputira zvine poindi yekunyunguduka iri pasi pe1500℃, simbi dzine poindi yekunyunguduka yakawanda muchimiro chewaya kana sheet (W, Mo, Ti, Ta, boron nitride, nezvimwewo) dzinowanzo gadzirwa kuita chimiro chakakodzera che evaporation source, dzakazadzwa nezvinhu zvekunyunguduka, kuburikidza nekupisa kweJoule kwemagetsi kuti zvinyunguduke, zvinyunguduke kana kuti zvinyunguduke plating material, chimiro che evaporation source chinonyanya kusanganisira multi-strand spiral, U-shaped, sine wave, thin plate, boat, cone basket, nezvimwewo. Panguva imwe chete, nzira iyi inoda kuti evaporation source material ive ne poindi yekunyunguduka yakakwirira, low saturation vapor pressure, stable chemical properties, isina chemical reaction nezvinhu zvekuputira pakupisa kwakanyanya, good heat resistance, difficulty density, nezvimwewo. Inoshandisa high current kuburikidza ne evaporation source kuti iite kuti ipise uye iparadze firimu material nekupisa zvakananga, kana kuisa firimu material mu crucible yakagadzirwa ne graphite nedzimwe high tembiricha resistant metal oxides (senge A202, B0) nezvimwe zvinhu zvekupisa zvisina kunanga kuti zvinyunguduke.
Kuvhara kwekupisa ne evaporation coating kune miganhu: simbi dzinoramba dzichiita evaporation dzine pressure shoma yeutsi, izvo zvakaoma kugadzira firimu rakatetepa; zvimwe zvinhu zviri nyore kugadzira alloy newaya yekupisa; hazvisi nyore kuwana musanganiswa wakafanana wefirimu re alloy. Nekuda kwechimiro chiri nyore, mutengo wakaderera uye kushanda kuri nyore kwe resistance heating evaporation method, inzira yakajairika yekushandisa evaporation method.
(2) Kupisa kwedanda remaerekitironi
Kubuda kwechiedza cheElectron beam inzira yekubuda kwechinhu chinofukidza nekupisa nedanda remaerekitironi rine simba rakawanda nekuchiisa mugomba remhangura rinotonhorerwa nemvura. Kubuda kwechiedza kunosanganisira sosi inoburitsa maerekitironi, sosi inomhanyisa maerekitironi, gomba remhangura (kazhinji kacho gomba remhangura), gomba remagineti, uye seti yemvura inotonhorera, nezvimwewo. Muchishandiso ichi, chinhu chinodziya chinoiswa mugomba rinotonhorerwa nemvura, uye danda remaerekitironi rinoputika chikamu chidiki chechinhu, nepo ruzhinji rwezvinhu zvasara ruchiramba ruri patembiricha yakaderera pasi pekutonhorera kwegomba remhangura, iro rinogona kuonekwa sechikamu chinoputika chegomba remhangura. Saka, nzira yekupisa danda remaerekitironi kuti ribude inogona kudzivirira kusvibiswa pakati pechinhu chinofukidza nechinhu chinobuda.
Maumbirwo echinhu chinoburitsa mvura kubva mugomba remaerekitironi anogona kukamurwa kuita mhando nhatu: pfuti dzakatwasuka (pfuti dzeBoules), pfuti dzering (dzinotsauswa nemagetsi) uye pfuti dzemagetsi (dzinotsauswa nemagnetic). Chinotsauswa chimwe chete kana kupfuura chinogona kuiswa munzvimbo inoburitsa mvura kubva mugomba, icho chinogona kutsauswa nekuisa zvinhu zvakasiyana panguva imwe chete kana zvakasiyana.
Manyuko emhepo emagetsi emagetsi ane zvakanakira zvinotevera.
①Kuwanda kwechiedza chemagetsi chinoputika nemhepo kunogona kuwana simba rakawanda kupfuura simba rinodziya rinopikisa, izvo zvinogona kudzima zvinhu zvine mwero wekunyunguduka, zvakaita seW, Mo, Al2O3, nezvimwewo.
②Chinhu chekufukidza chinoiswa muchinhu chinotonhorera chemhangura chinotonhodzwa nemvura, icho chinogona kudzivirira kubuda kwemvura kubva pachinhu chinobuda, uye kusangana pakati pazvo.
③Kupisa kunogona kuwedzerwa zvakananga pamusoro pechinhu chinoputira, izvo zvinoita kuti kushanda zvakanaka kwekupisa kuve kwakakwira uye kurasikirwa kwemhepo inofambisa kupisa nemwaranzi yekupisa kuve kwakaderera.
Dambudziko renzira yekupisa mwenje we electron beam evaporation nderekuti maerekitironi ekutanga kubva mupfuti ye electron uye maerekitironi echipiri kubva pamusoro pechinhu chinoputira zvinozoisa maatomu ari kubuda uye mamorekuru egasi akasara, izvo zvinozokanganisa kunaka kwefirimu dzimwe nguva.
(3) Kupisa kwakanyanya kunokonzerwa nekupisa
Kupisa kwemhepo kwakanyanya (High-frequency induction heating evaporation) kunoreva kuisa crucible ine zvinhu zvekufukidza pakati pe high-frequency spiral coil, kuitira kuti zvinhu zvekufukidza zvigadzire simba rakasimba re eddy current uye hysteresis effect pasi pe induction ye high-frequency electromagnetic field, izvo zvinoita kuti firimu ripise kusvika raita utsi uye rapera. Sosi yekubuda kwemhepo inowanzo kuve ne water-cooled high-frequency coil uye graphite kana ceramic crucible (magnesium oxide, aluminium oxide, boron oxide, nezvimwewo). High frequency power supply inoshandisa frequency ye10,000 kusvika kumazana ezviuru eHz, simba rekupinda rinenge riine makilowatts akawanda kusvika mazana ezviuru, vhoriyamu ye membrane material idiki, induction frequency yakakwira. Induction coil frequency inowanzo gadzirwa nechubhu yemhangura inotonhodzwa nemvura.
Dambudziko rekushandisa nzira yekupisa inopisa ine frequency yakakwira nderekuti hazvisi nyore kugadzirisa simba rekuisa, ine zvakanakira zvinotevera.
①Kukwira kwemvura inobuda mumuviri
②Kupisa kwechinhu chinobuda mvura kwakafanana uye kwakasimba, saka hazvisi nyore kuti madonhwe anoputira abude, uye zvinogonawo kudzivirira maburi ane maburi pafirimu rakaiswa.
③Kunobva mvura inobuda mumhepo kunoiswa kamwe chete, uye tembiricha iri nyore kudzora.
Nguva yekutumira: Gumiguru-28-2022