Lub hauv paus ntsiab lus ntawm lub tshuab nqus tsev evaporation txheej
1, Cov khoom siv thiab cov txheej txheem lub cev ntawm lub tshuab nqus tsev evaporation txheej txheem
Cov khoom siv nqus tsev evaporation txheej txheem feem ntau yog tsim los ntawm lub tshuab nqus tsev thiab lub tshuab tshem tawm. Hauv lub tshuab nqus tsev, muaj qhov chaw evaporation (piv txwv li, lub tshuab cua sov evaporation), lub substrate thiab lub substrate thav duab, lub tshuab cua sov substrate, lub tshuab tso pa tawm, thiab lwm yam.
Cov khoom siv txheej yog muab tso rau hauv qhov chaw evaporation ntawm lub tshuab nqus tsev, thiab nyob rau hauv qhov chaw nqus tsev siab, nws yog cua sov los ntawm qhov chaw evaporation kom evaporate. Thaum qhov nruab nrab ntawm cov pa molecules loj dua li qhov loj ntawm lub tshuab nqus tsev, tom qab cov atoms thiab cov molecules ntawm cov zaj duab xis vapor khiav tawm ntawm qhov chaw ntawm qhov chaw evaporation, tsis tshua muaj kev cuam tshuam los ntawm kev sib tsoo ntawm lwm cov molecules lossis atoms, thiab ncaj qha mus txog qhov chaw ntawm lub substrate uas yuav tsum tau coated. Vim yog qhov kub qis ntawm lub substrate, cov zaj duab xis vapor particles condense rau nws thiab tsim ib zaj duab xis.
Yuav kom txhim kho qhov kev sib txuas ntawm cov khoom siv evaporation thiab substrate, lub substrate tuaj yeem ua haujlwm los ntawm kev ua kom sov lossis ntxuav ion. Lub tshuab nqus tsev evaporation txheej txheem mus dhau cov txheej txheem lub cev hauv qab no los ntawm kev evaporation ntawm cov khoom, kev thauj mus los mus rau kev tso rau hauv zaj duab xis.
(1) Siv ntau txoj hauv kev los hloov lwm hom zog mus rau hauv lub zog thermal, cov khoom siv zaj duab xis raug cua sov kom ua pa lossis sublimate rau hauv cov khoom me me (atoms, molecules lossis atomic clusters) nrog qee qhov zog (0.1 txog 0.3 eV).
(2) Cov pa roj tawm ntawm qhov chaw ntawm zaj duab xis thiab raug thauj mus rau qhov chaw ntawm lub substrate ntawm qee qhov ceev ntawm kev txav mus los, tsis muaj kev sib tsoo, hauv kab ncaj.
(3) Cov khoom me me uas mus txog saum npoo ntawm lub substrate sib sau ua ke thiab nucleate, thiab tom qab ntawd loj hlob mus rau hauv ib zaj duab xis khov kho.
(4) Kev rov tsim kho dua lossis kev sib txuas tshuaj lom neeg ntawm cov atoms uas ua rau zaj duab xis.
2, Kev ua kom sov
(1) Kev ua kom sov tsis ua haujlwm
Kev ua kom sov tsis kam yog txoj kev ua kom sov yooj yim tshaj plaws thiab siv ntau tshaj plaws, feem ntau siv rau cov khoom siv txheej uas muaj qhov kub yaj qis dua 1500 ℃, cov hlau yaj siab hauv cov hlau lossis cov ntawv (W, Mo, Ti, Ta, boron nitride, thiab lwm yam) feem ntau yog ua rau cov khoom siv evaporation zoo, thauj cov khoom siv evaporation, los ntawm Joule cua sov ntawm hluav taws xob tam sim no kom yaj, ua kom qhuav lossis sublimate cov khoom plating, cov duab ntawm cov khoom siv evaporation feem ntau suav nrog ntau txoj hlua khi, U-puab, sine nthwv dej, phaj nyias, nkoj, pob tawb cone, thiab lwm yam. Tib lub sijhawm, txoj kev xav tau cov khoom siv evaporation kom muaj qhov kub yaj siab, qhov siab vapor qis, cov khoom siv tshuaj ruaj khov, tsis muaj tshuaj lom neeg nrog cov khoom siv txheej ntawm qhov kub siab, ua kom sov zoo, hloov pauv me me hauv lub zog ceev, thiab lwm yam. Nws siv cov hluav taws xob siab los ntawm qhov chaw evaporation kom ua rau nws kub thiab ua kom cov khoom siv zaj duab xis qhuav los ntawm kev cua sov ncaj qha, lossis muab cov khoom siv zaj duab xis rau hauv lub crucible ua los ntawm graphite thiab qee cov hlau oxides kub siab (xws li A202, B0) thiab lwm yam khoom siv rau kev ua kom sov tsis ncaj qha kom ua kom qhuav.
Cov txheej txheej evaporation uas tiv taus cua sov muaj cov kev txwv: cov hlau refractory muaj qhov siab vapor qis, uas nyuaj rau ua zaj duab xis nyias; qee cov khoom yooj yim los tsim cov hlau nrog cov hlau cua sov; nws tsis yooj yim kom tau txais cov khoom sib xws ntawm cov zaj duab xis alloy. Vim yog qhov yooj yim qauv, tus nqi qis thiab yooj yim ua haujlwm ntawm txoj kev evaporation cua sov tiv taus, nws yog ib qho kev siv ntau ntawm txoj kev evaporation.
(2) Kev ua kom sov ntawm lub teeb hluav taws xob
Kev ua kom cov khoom siv txheej txheej yaj los ntawm kev siv lub zog siab ntawm lub teeb hluav taws xob los ntawm kev muab tso rau hauv lub crucible tooj liab uas txias nrog dej. Qhov chaw ua kom yaj muaj xws li lub zog tso tawm hluav taws xob, lub zog ua kom nrawm ntawm lub teeb hluav taws xob, lub crucible (feem ntau yog lub crucible tooj liab), lub kauj hlau nplaum, thiab cov dej txias, thiab lwm yam. Hauv lub cuab yeej no, cov khoom siv cua sov raug muab tso rau hauv lub crucible uas txias nrog dej, thiab lub teeb hluav taws xob tsuas yog tua ib feem me me ntawm cov khoom siv, thaum feem ntau ntawm cov khoom seem tseem nyob rau qhov kub qis heev nyob rau hauv qhov txias ntawm lub crucible, uas tuaj yeem suav tias yog qhov seem ntawm lub crucible. Yog li, txoj kev ua kom cov hluav taws xob cua sov rau kev ua kom yaj tuaj yeem zam kev ua qias tuaj ntawm cov khoom siv txheej txheej thiab cov khoom siv ua kom yaj.
Cov qauv ntawm qhov chaw ua kom cov hluav taws xob yaj tau muab faib ua peb hom: cov phom ncaj (Cov phom Boules), cov phom nplhaib (hloov hluav taws xob) thiab cov phom e-phom (hloov hlau nplaum). Ib lossis ntau lub crucibles tuaj yeem muab tso rau hauv qhov chaw ua kom yaj, uas tuaj yeem ua kom yaj thiab tso ntau yam khoom sib txawv tib lub sijhawm lossis sib cais.
Cov qhov chaw ua kom cov hluav taws xob evaporation muaj cov txiaj ntsig hauv qab no.
① Qhov ceev ntawm lub teeb hluav taws xob ntawm lub teeb hluav taws xob tuaj yeem tau txais lub zog ceev dua li qhov chaw ua kom sov, uas tuaj yeem ua kom cov khoom siv melting siab, xws li W, Mo, Al2O3, thiab lwm yam.
②Cov khoom siv txheej txheem yog muab tso rau hauv lub crucible tooj liab uas txias dej, uas tuaj yeem zam kev evaporation ntawm cov khoom siv evaporation, thiab cov tshuaj tiv thaiv ntawm lawv.
③ Kub tuaj yeem ntxiv ncaj qha rau saum npoo ntawm cov khoom siv txheej, uas ua rau qhov ua tau zoo ntawm thermal siab thiab qhov poob ntawm kev coj cua sov thiab kev tawg cua sov qis.
Qhov tsis zoo ntawm txoj kev ua kom sov ntawm lub teeb hluav taws xob yog tias cov hluav taws xob tseem ceeb los ntawm rab phom hluav taws xob thiab cov hluav taws xob thib ob los ntawm qhov chaw ntawm cov khoom siv txheej yuav ionize cov evaporating atoms thiab cov roj molecules seem, uas yuav cuam tshuam rau qhov zoo ntawm zaj duab xis qee zaum.
(3) Kev ua kom sov sai sai
Kev siv cua sov induction siab zaus yog muab lub crucible nrog cov khoom siv txheej tso rau hauv nruab nrab ntawm lub kauj vuam siab zaus, kom cov khoom siv txheej tsim cov eddy tam sim no muaj zog thiab hysteresis nyhuv nyob rau hauv qhov induction ntawm lub zog hluav taws xob siab zaus, uas ua rau txheej zaj duab xis kub txog thaum nws vaporizes thiab evaporates. Lub hauv paus evaporation feem ntau muaj cov kauj dej txias zaus zaus thiab graphite lossis ceramic (magnesium oxide, txhuas oxide, boron oxide, thiab lwm yam) crucible. Lub zog fais fab zaus siab siv zaus ntawm kaum txhiab txog ntau pua txhiab Hz, lub zog nkag yog ntau txog ntau pua kilowatts, qhov me dua ntawm cov khoom siv membrane, qhov siab dua qhov induction zaus. Induction coil zaus feem ntau yog ua los ntawm cov raj tooj liab txias dej.
Qhov tsis zoo ntawm txoj kev ua kom sov induction cua sov evaporation siab yog tias nws tsis yooj yim los kho lub zog nkag, nws muaj cov txiaj ntsig hauv qab no.
①Tus nqi ua pa ntau
②Qhov kub ntawm qhov chaw evaporation yog sib xws thiab ruaj khov, yog li nws tsis yooj yim los tsim cov xwm txheej ntawm cov dej txheej txaws, thiab nws kuj tseem tuaj yeem zam qhov xwm txheej ntawm cov qhov pinholes ntawm zaj duab xis tso.
③Qhov chaw ua kom cov dej noo noo tau thauj ib zaug xwb, thiab qhov kub thiab txias yooj yim thiab yooj yim rau kev tswj.
Lub sijhawm tshaj tawm: Lub Kaum Hli-28-2022