Umgaqo wokugquma nge-vacuum evaporation
1, Izixhobo kunye nenkqubo ebonakalayo yokwaleka nge-vacuum evaporation
Izixhobo zokugquma umphunga wevacuum zenziwe ikakhulu yigumbi levacuum kunye nenkqubo yokufuduka. Ngaphakathi kwigumbi levacuum, kukho umthombo wokufuduka (umz. i-evaporation heater), i-substrate kunye nesakhelo se-substrate, i-substrate heater, inkqubo yokukhupha umoya, njl.njl.
Izinto zokugquma zifakwa kumthombo wokufuma wegumbi lokufunxa, kwaye phantsi kweemeko eziphezulu zokufuma, zifudunyezwa ngumthombo wokufuma ukuze ziphume. Xa umlinganiselo oqhelekileyo weemolekyuli zomphunga umkhulu kunobungakanani obuchanekileyo begumbi lokufunxa, emva kokuba iiathom kunye neemolekyuli zomphunga wefilimu ziphumile kumphezulu womthombo wokufuma, azithintelwa kukungqubana kwezinye iimolekyuli okanye iiathom, kwaye zifikelela ngqo kumphezulu wegumbi lokufunxa. Ngenxa yobushushu obuphantsi begumbi lokufunxa, amasuntswana omphunga wefilimu ayajiya phezu kwayo aze enze ifilimu.
Ukuze kuphuculwe ukunamathela kweemolekyuli zomphunga kunye ne-substrate, i-substrate ingasetyenziswa ngokufudumeza okanye ukucoca ii-ion ngokufanelekileyo. I-vacuum evaporation coating idlula kwiinkqubo ezilandelayo zomzimba ukusuka ekuphumeni kwezinto, ukuthuthwa ukuya ekufakweni kwifilimu.
(1) Kusetyenziswa iindlela ezahlukeneyo zokuguqula ezinye iintlobo zamandla zibe ngamandla obushushu, izinto zefilimu ziyafudunyezwa ukuze ziphele okanye zinyibilike zibe ngamasuntswana egesi (iiathomu, iimolekyuli okanye amaqela eeathomu) ngomlinganiselo othile wamandla (0.1 ukuya kwi-0.3 eV).
(2) Amasuntswana egesi aphuma kumphezulu wefilimu aze athuthwe aye kumphezulu wesiseko ngesantya esithile sokuhamba, ngokuyintloko ngaphandle kokungqubana, kumgca othe tye.
(3) Amasuntswana egesi afikelela kumphezulu wesiseko adibane aze ahlangane, aze akhule abe yifilimu yesigaba esiqinileyo.
(4) Ukuhlelwa ngokutsha okanye ukubopha iikhemikhali kweeathom ezenza ifilimu.
2, Ukufudumeza komphunga
(1) Ukumelana nokufuma kobushushu
Ukuxhathisa ukufudumeza umphunga yindlela elula nesetyenziswa kakhulu yokufudumeza, esetyenziswa ngokubanzi kwizinto zokugquma ezineqondo lokunyibilika elingaphantsi kwe-1500℃, iintsimbi ezineqondo lokunyibilika eliphezulu kwimilo yentsimbi okanye yeshiti (W, Mo, Ti, Ta, boron nitride, njl.njl.) zihlala zenziwe zibe yimilo efanelekileyo yomthombo wokufuma, zigcwele izinto zokufuma, ngokusebenzisa ubushushu bukaJoule bombane ukuze zinyibilike, zikhuphe umphunga okanye zinciphise izinto zokugquma, imilo yomthombo wokufuma ibandakanya ikakhulu i-multi-strand spiral, efana no-U, i-sine wave, ipleyiti encinci, isikhephe, ibhasikithi yekhowuni, njl. Kwangaxeshanye, le ndlela ifuna ukuba izinto zomthombo wokufuma zibe neqondo lokunyibilika eliphezulu, uxinzelelo lomphunga oluphantsi, iipropati zeekhemikhali ezizinzileyo, zingabi nampendulo yeekhemikhali ngezinto zokugquma kubushushu obuphezulu, ukumelana nobushushu obuhle, utshintsho oluncinci kubuninzi bamandla, njl. Isebenzisa umbane ophezulu ngomthombo wokufuma ukuze ifudumale kwaye ikhuphe izinto zefilimu ngokufudumeza ngqo, okanye ibeke izinto zefilimu kwi-crucible eyenziwe nge-graphite kunye nee-oxides ezithile zesinyithi ezimelana nobushushu obuphezulu (ezifana ne-A202, B0) kunye nezinye izinto zokufudumeza ngokungathanga ngqo ukuze zikhuphe umphunga.
I-resistant heating evaporation coating inemida: ii-refractory metals zinoxinzelelo oluphantsi lomphunga, olunzima ukwenza ifilimu encinci; ezinye izinto kulula ukuzenza i-alloy ngentambo yokufudumeza; akulula ukufumana ulwakhiwo olufanayo lwefilimu ye-alloy. Ngenxa yesakhiwo esilula, ixabiso eliphantsi kunye nokusebenza okulula kwendlela yokufudumeza evaporation evaporation, yindlela eqhelekileyo yokusebenzisa indlela yokufudumeza.
(2) Ukufuma kobushushu be-electron beam
Ukufuma kwe-electron beam yindlela yokufutha izinto zokugquma ngokuziqhumisa nge-electron beam enobunzima obuphezulu ngokuzibeka kwi-crucible yobhedu epholisiweyo ngamanzi. Umthombo wokufuma uquka umthombo wokukhupha i-electron, umthombo wamandla okukhawulezisa i-electron, i-crucible (ngesiqhelo i-copper crucible), i-magnetic field coil, kunye ne-cooling water set, njl. Kule sixhobo, izinto ezifudunyezwayo zifakwa kwi-crucible epholisiweyo ngamanzi, kwaye i-electron beam iqhuma inxalenye encinci kakhulu yezinto, ngelixa uninzi lwezinto eziseleyo zihlala kubushushu obuphantsi kakhulu phantsi kwesiphumo sokupholisa se-crucible, esinokuthathwa njengenxalenye ye-crucible eqhumayo. Ke ngoko, indlela yokufudumeza i-electron beam yokufudumeza ukufuma ingathintela ungcoliseko phakathi kwezinto zokugquma kunye nezinto zomthombo wokufuma.
Ulwakhiwo lomthombo wokufuma we-electron beam lunokwahlulwa lube ziintlobo ezintathu: izibhamu ezithe tye (iiBoules guns), izibhamu ezirhangqiweyo (ezijijekileyo ngombane) kunye nezibhamu ze-e (ezijijekileyo ngombane). Isixhobo esinye okanye ezingaphezulu zingafakwa kwindawo yokufuma, ezinokufuma kwaye zifake izinto ezininzi ezahlukeneyo ngaxeshanye okanye ngokwahlukeneyo.
Imithombo ye-electron beam evaporation inezi nzuzo zilandelayo.
①Ubuninzi bemitha yombane yomthombo wokuphuma komphunga we-electron beam bunokufumana ubunzima obukhulu kakhulu kunomthombo wokufudumeza ochaseneyo, obunokuphehla izinto ezinamaqondo aphezulu okunyibilika, ezifana ne-W, i-Mo, i-Al2O3, njl.
②Izinto zokugquma zifakwa kwi-crucible yobhedu epholiswe ngamanzi, enokuthintela ukufuma kwezinto eziphuma kwi-evaporation source, kunye nempendulo phakathi kwazo.
③Ubushushu bungongezwa ngqo kumphezulu wezinto zokugquma, nto leyo eyenza ukusebenza kakuhle kobushushu kube phezulu kwaye ukulahleka kokuhanjiswa kobushushu kunye nemitha yobushushu kube phantsi.
Ingxaki yendlela yokufudumeza umqadi we-electron kukuba ii-electron eziphambili ezivela kwisibhamu se-electron kunye nee-electron zesibini ezivela kumphezulu wezinto zokugquma ziya kuyi-ionisa ii-athomu eziphumayo kunye neemolekyuli zegesi eziseleyo, nto leyo eya kuchaphazela umgangatho wefilimu ngamanye amaxesha.
(3) Ukufudumala okufudumeza rhoqo
Ukufudumeza okufudumezayo okuqhutywa rhoqo okuphezulu kukubeka i-crucible enezinto zokugquma embindini we-high-frequency spiral coil, ukuze izinto zokugquma zivelise i-eddy current enamandla kunye ne-hysteresis effect phantsi kokungeniswa kwe-high-frequency electromagnetic field, ebangela ukuba umaleko wefilimu ufudumale ude uphele kwaye uphele. Umthombo wokufuma ngokubanzi uquka i-high-frequency coil epholiswe ngamanzi kunye ne-graphite okanye i-ceramic (i-magnesium oxide, i-aluminium oxide, i-boron oxide, njl.njl.). Umbane oqhutywa rhoqo usebenzisa i-frequency ukusuka kwi-10 lamawaka ukuya kumakhulu aliqela e-Hz, amandla okufaka angama-kilowatts aliqela ukuya kumakhulu aliqela, okukhona umthamo wezinto ze-membrane uncinci, kokukhona i-induction frequency iphezulu. I-induction coil frequency idla ngokwenziwa ngetyhubhu yobhedu epholiswe ngamanzi.
Ingxaki yendlela yokufudumeza ubushushu evaporation eqhuba rhoqo kukuba akulula ukulungisa amandla okufaka, inezi nzuzo zilandelayo.
①Izinga eliphezulu lokuphuma komphunga
②Ubushushu bomthombo wokufuma buyafana kwaye buzinzile, ngoko ke akulula ukuvelisa isiganeko sokutshiza kwamaconsi okugquma, kwaye kunokuthintela isiganeko semingxuma efihliweyo kwifilimu egciniweyo.
③Umthombo womphunga ulayishwa kube kanye, kwaye ubushushu bulula kwaye kulula ukulawula.
Ixesha lokuthumela: Okthobha-28-2022