Ku-magnetronukukhishwa kwe-plasma kanye nokufakwa kwe-sputterizinqubo, uhlobo lokunikezwa kwamandla ludlala indima ebalulekile ekunqumeni ukuzinza kwe-plasma, ukusebenza kahle kokuchitheka, ubuningi befilimu, kanye nokuphindaphindwa kwenqubo.
Izinhlobo zamandla ezisetshenziswa kakhulu yizinsiza zamandla ze-Radio Frequency (RF) kanye nezinsiza zamandla ze-Medium Frequency (MF), ezihluka kakhulu ngokwemvamisa yokusebenza, indlela yokukhipha, ukuhambisana kwenhloso, kanye nokusebenza kwenqubo.
Ukukhetha ugesi ofanele kubalulekile ukuze kuthuthukiswe ikhwalithi yokumboza, ukukhiqiza, kanye nokuzinza kwesistimu.
Izinsiza zamandla ze-RF zivame ukusebenza ku-13.56 MHz futhi zisetshenziselwa kakhulu ukubhoboza ama-insulation target njenge-SiO₂, i-Al₂O₃, kanye ne-TiO₂.
Izici Zobuchwepheshe:
Igcina ukukhishwa kwe-plasma okuzinzile ngensimu kagesi eshintshanayo
Ivimbela ukunqwabelana kweshaja ezindaweni ezihlosiwe zokuvikela umswakama
Ifaneleka ukufaka amafilimu e-dielectric, izembozo ze-optical, kanye nezendlalelo ze-oxide ezisebenzayo
Inikeza ukufana okuhle kakhulu kwe-plasma kwezicelo zefilimu ezinembe kakhulu
Izinzuzo:
Iyahambisana nezinhloso ezingezona ezihambisa ugesi
Ukukhishwa okuzinzile kanye nokuchitheka okufanayo
Ukulawula okuphezulu kokwakheka kanye nokusebenza okuphezulu kokukhanya
Imikhawulo:
Izindleko zesistimu eziphakeme
Ubuningi bamandla aphansi kanye nesilinganiso sokufakwa okulinganiselwe
Izidingo zokufanisa i-impedance eziyinkimbinkimbi
Izinsiza zamandla ze-Medium Frequency (MF) zivame ukusebenza kububanzi be-10–200 kHz futhi zisetshenziswa kabanzi ezinhlelweni ze-dual-magnetron kanye nezinqubo ze-reactive sputtering, ikakhulukazi ezimbozweni zensimbi nezensimbi-oxide.
Izici Zobuchwepheshe:
Isebenzisa ukukhishwa okushintshashintshayo kwe-bipolar, inciphisa ukuqongelela kweshaja ezindaweni eziqondiwe
Kunciphisa ngempumelelo ukugoba, kuthuthukise ukuzinza kwenqubo
Isekela ukuminyana kwamandla okuphezulu, okuvumela amazinga aphezulu okufakwa
Ifaneleka kahle ukumbozwa kwendawo enkulu kanye nokukhiqizwa kwezimboni ngobuningi
Izinzuzo:
Izinga lokufaka eliphezulu kanye nomphumela ongcono kakhulu
Ilungele ama-targets okuqhuba kanye nokugeleza okusebenzayo
Ukweqiswa kwe-arc okuthuthukisiwe kanye nokuthembeka kokusebenza
Isebenza kahle ngokulungiswa okulula
Imikhawulo:
Akufanelekile ezindaweni ezivikela kakhulu umswakama
Ukufana kwe-plasma kungadinga ukwenziwa ngcono ngokusebenzisa insimu yamagnetic kanye nomklamo wokugeleza kwegesi
| Into Yokuqhathanisa | Ukunikezwa Kwamandla e-RF | Ukunikezwa Kwamandla kwe-MF |
|---|---|---|
| Imvamisa Yokusebenza | 13.56 MHz | 10–200 kHz |
| Ukuhambisana Okuqondiwe | Ama-Insulation / Oxide Target | Ama-Target ensimbi/asabelayo |
| Izinga Lokufaka Imali | Okuphakathi kuya Okuphansi | Phezulu |
| Ukucindezelwa kwe-Arc | Okumaphakathi | Kuhle kakhulu |
| Ukuzinza kwePlasma | Phezulu | Phezulu |
| Izindleko Zesistimu | Okuphakeme | Ngaphansi |
| Izicelo Ezijwayelekile | Amafilimu Okukhanya Nokusebenza | Izembozo Zezimboni Nezokuhlobisa |
Ngezinto ezivikela kakhulu umswakama (amafilimu e-optical kanye ne-dielectric), izinsiza zikagesi ze-RF zihlala ziyisisombululo esithandwayo
Ngezimbozo zensimbi, ukufakwa kwendawo enkulu, kanye nokusputter okusabelayo (i-TiN, i-ITO, i-CrOx), izinsiza zikagesi ze-MF zinikeza ukusebenza okuphezulu kanye nokusebenza kahle kwezindleko.
Ekukhiqizweni kwezimboni okunomthamo omkhulu, izinsiza zikagesi ze-MF ziletha ukuzinza okungcono kwenqubo yesikhathi eside
Ukuze uthole izembozo ezisebenzayo ezibonakalayo nezinembile, izinsiza zamandla ze-RF zinikeza ukufana okuthuthukisiwe kanye nokulawula ukwakheka.
Izimpahla zikagesi ze-RF kanye ne-MF ngayinye inikeza izinzuzo ezihlukile ekusetshenzisweni kokumboza nge-vacuum, ngokufaneleka kwazo kunqunywa yizakhiwo zezinto eziqondiwe, uhlobo lokumboza, umthamo wokukhiqiza, kanye nokucatshangelwa kwezindleko.
Njengoba ukugqoka kwezimboni kuqhubeka nokuguquka, izimpahla zikagesi ze-MF ziba ukukhetha okuyinhloko kokukhiqizwa kwesisindo okusebenzayo kakhulu nokungaguquguquki, kuyilapho izimpahla zikagesi ze-RF zisalokhu zibalulekile ekufakweni kwefilimu ye-optical-grade kanye ne-dielectric.
Uma sibheka phambili, izakhiwo zamandla ezihlanganisiwe kanye nobuchwepheshe bokulawula amandla obuhlakaniphile kulindeleke ukuthi kuthuthukise ukuzinza kwenqubo kanye nokusebenza kokumboza.
-Lesi sihloko sishicilelwe nguimishini yokumboza nge-vacuum umenzi we-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Jan-27-2026