I roto i te aukumete pupuhi me te whakatakotoranga plasmangā tukanga, he mea nui te momo pūhiko ki te whakatau i te pumau o te plasma, te pai o te pupuhi, te kiato kiriata, me te auau o te tukanga.
Ko ngā momo pūtake hiko e whakamahia whānuitia ana ko ngā pūtake hiko Auautanga Reo Irirangi (RF) me ngā pūtake hiko Auautanga Waenga (MF), he rerekē rawa ēnei i te auau whakahaere, te tikanga tukunga, te hototahitanga ki ngā ūnga, me te mahinga tukanga.
He mea nui te whiriwhiri i te pūtake hiko tika hei whakapai ake i te kounga paninga, te kaha whakaputa, me te pumau o te pūnaha.
Ko te tere o te mahi a ngā pūhiko hiko RF he 13.56 MHz, ā, e whakamahia ana mō ngā ūnga whakamahana pēnei i te SiO₂, te Al₂O₃, me te TiO₂.
Ngā Āhuatanga Hangarau:
Ka pupuri i te tukunga plasma pumau mā te mara hiko tauutuutu
Ārai i te kohikohinga utu i runga i ngā mata ūnga ārai
He pai mō te whakatakoto i ngā kiriata dielectric, ngā paninga whatu, me ngā paparanga waikura mahi
He tino pai te ōritetanga o te plasma mō ngā tono kiriata tino tika
Ngā Painga:
Hototahi ki ngā whāinga kore-arataki
Te tukunga pumau me te pupuhi ōrite
Te mana whakahaere hanganga teitei me te mahi whatu pai rawa atu
Ngā Here:
Te utu nui ake o te pūnaha
He iti ake te mātotoru o te mana me te iti o te tere whakatakotoranga
Ngā whakaritenga taurite ārai uaua
Ko ngā pūhiko hiko Auautanga Waenga (MF) e mahi ana i te awhe 10–200 kHz, ā, e whakamahia whānuitia ana i roto i ngā pūnaha magnetron-rua me ngā tukanga pupuhi tauhohe, inā koa mō ngā paninga whakarewa me te waikura whakarewa.
Ngā Āhuatanga Hangarau:
Ka whakamahi i te tukunga whakawhiti-rua, ka whakaiti i te kohikohinga utu ki runga i ngā mata ūnga
Ka whakaiti pai i te āwhata, ka whakapai ake i te pumau o te tukanga
Ka tautoko i te kiato mana teitei ake, ka taea ai te tere whakatakotoranga teitei ake
He pai mō te paninga rohe nui me te whakaputa papatipu ahumahi
Ngā Painga:
Te tere whakatakotoranga teitei me te kaha whakaputa pai ake
He pai mō ngā ūnga kawe hiko me te pupuhi tauhohe
Te whakanui ake i te pehitanga o te pewa me te pono o te mahi
He iti te utu me te tiaki māmā ake
Ngā Here:
Kāore i te pai mō ngā ūnga tino ārai
Me arotau pea te ōritetanga o te parāoa mā te hoahoa papa aukume me te rere o te hau
| Tūemi Whakataurite | Pūnaha Hiko RF | Pūnaha Hiko MF |
|---|---|---|
| Auautanga Whakahaere | 13.56 MHz | 10–200 kHz |
| Hototahi Whāinga | Ngā Whāinga Whakamarumaru / Waikura | Ngā Whāinga Whakarewa / Tauhohe |
| Reiti Whakatakotoranga | Waenga ki te Iti | Teitei |
| Te Pehi i te Āwhata | Waenga | Tino pai |
| Te Pūmautanga o te Plasma | Teitei | Teitei |
| Utu Pūnaha | Teitei ake | I raro |
| Ngā tono noa | Kiriata Whatu me te Mahi | Ngā Paninga Ahumahi me ngā Paninga Whakapaipai |
Mō ngā rauemi tino ārai (ngā kiriata whatu me ngā kiriata hiko-kore), ko ngā pūhiko hiko RF tonu te otinga pai rawa atu.
Mō ngā paninga whakarewa, te whakatakotoranga wāhi nui, me te tauhohenga pupuhi (TiN, ITO, CrOx), ka tukuna e ngā pūhiko hiko MF te kaha whakaputa me te whai huatanga utu.
I roto i te whakaputanga ahumahi nui, ka tukuna e ngā pūtake hiko MF te pumau tukanga mo te wa roa.
Mō ngā paninga whatu kounga teitei me ngā paninga mahi tino tika, ka whakaratohia e ngā pūhiko hiko RF te ōritetanga me te whakahaere hanganga pai ake.
He rerekē ngā painga o ngā pūhiko hiko RF me MF i roto i ngā tono paninga korehau, ko tō rātou pai ka whakatauhia e ngā āhuatanga rauemi e hiahiatia ana, te momo paninga, te kaha whakaputa, me ngā whakaaro utu.
I te whanaketanga tonu o te paninga ahumahi, kei te noho ko ngā pūhiko hiko MF te whiringa matua mō te whakaputa papatipu tino whai hua, tino ōrite hoki, i te mea kei te noho tonu ngā pūhiko hiko RF hei mea nui mō te whakatakotoranga kiriata whatu me te dielectric.
I te tirohanga whakamua, e tūmanakohia ana ka whakarei ake ngā hoahoanga hiko ranu me ngā hangarau whakahaere hiko atamai i te pumau o te tukanga me te mahi paninga.
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Wā tuku: Hanuere-27-2026