Kwimagnetronukutshiza kunye nokufakwa kweplasmaiinkqubo, uhlobo lombane ludlala indima ebalulekileyo ekumiseleni uzinzo lweplasma, ukusebenza kakuhle kokutshiza, uxinano lwefilimu, kunye nokuphindaphinda kwenkqubo.
Iintlobo zombane ezisetyenziswa kakhulu zii-power supply zeRadio Frequency (RF) kunye nee-power supply zeMedium Frequency (MF), ezahluka kakhulu ngokwe-operating frequency, indlela yokukhupha, ukuhambelana kwethagethi, kunye nokusebenza kwenkqubo.
Ukukhetha umbane ofanelekileyo kubalulekile ukuze kuphuculwe umgangatho wokugquma, ukuveliswa kwemveliso, kunye nozinzo lwenkqubo.
Izixhobo zamandla ze-RF zihlala zisebenza kwi-13.56 MHz kwaye zisetyenziselwa ikakhulu ukutshiza iithagethi zokukhusela ezifana ne-SiO₂, i-Al₂O₃, kunye ne-TiO₂.
Iimpawu zobugcisa:
Igcina ukukhutshwa kweplasma okuzinzileyo ngokusebenzisa intsimi yombane etshintshanayo
Ithintela ukuqokelelwa kwentlawulo kwiindawo ezijolise kuzo zokukhusela ubushushu
Ifanelekile ukufaka iifilimu ze-dielectric, iingubo ezibonakalayo, kunye neengqimba ze-oxide ezisebenzayo
Ibonelela ngokufana kweplasma okugqwesileyo kwizicelo zefilimu ezichanekileyo kakhulu
Iingenelo:
Iyahambelana neethagethi ezingezizo eziqhuba umbane
Ukukhupha amanzi okuzinzileyo kunye nokutshiza okufanayo
Ulawulo oluphezulu lokwakheka kunye nokusebenza okuphezulu kokukhanya
Imida:
Iindleko eziphezulu zenkqubo
Uxinano lwamandla aphantsi kunye nezinga lokufaka elilinganiselweyo
Iimfuno zokudibanisa i-impedance ezintsonkothileyo
Izixhobo zamandla zeMedium Frequency (MF) zihlala zisebenza kuluhlu lwe-10–200 kHz kwaye zisetyenziswa kakhulu kwiinkqubo ze-dual-magnetron kunye neenkqubo ze-reactive sputtering, ingakumbi kwiingubo zesinyithi kunye neze-metal-oxide.
Iimpawu zobugcisa:
Isebenzisa ukukhupha okuguquguqukayo, ukunciphisa ukuqokelelwa kwentlawulo kwiindawo ekujoliswe kuzo
Iyanciphisa ngokufanelekileyo i-arcing, iphucula uzinzo lwenkqubo
Ixhasa uxinano lwamandla aphezulu, ivumela amazinga aphezulu okubeka
Ifanelekile kakhulu ekugqumeni indawo enkulu kunye nemveliso yobuninzi bemizi-mveliso
Iingenelo:
Izinga eliphezulu lokufaka kunye nomphumo ophezulu
Ilungele iithagethi zokuqhuba kunye nokutshiza okusebenzayo
Ukuphuculwa koxinzelelo lwe-arc kunye nokuthembeka kokusebenza
Isebenza kakuhle ngexabiso eliphantsi kunye nokugcinwa okulula
Imida:
Ayifanelekanga kwiindawo ezikhusela kakhulu ubushushu
Ukufana kweplasma kunokufuna ukulungiswa ngokusebenzisa intsimi yamagnetic kunye noyilo lokuhamba kwegesi
| Into yokuthelekisa | Ubonelelo lwaMandla eRF | Ubonelelo lwaMandla lweMF |
|---|---|---|
| Isantya sokuSebenza | 13.56 MHz | 10–200 kHz |
| Ukuhambelana kweTarget | Iithagethi zokwambathisa/ze-Oxide | Iithagethi zeMetallic/Reactive |
| Izinga lokuFakelwa kweMali | Phakathi ukuya Phantsi | Phezulu |
| Ucinezelo lwe-Arc | Iphakathi | Igqwesile |
| Uzinzo lwePlasma | Phezulu | Phezulu |
| Iindleko zeNkqubo | Phezulu | Ezantsi |
| Izicelo eziqhelekileyo | Iifilimu ze-Optical kunye ne-Functional | Iingubo zoMzi-mveliso nezoMhlobiso |
Kwizixhobo ezikhusela kakhulu (iifilimu ze-optical kunye ne-dielectric), izixhobo zombane ze-RF zihlala zisisombululo esikhethwayo
Kwiingubo zesinyithi, ukubekwa kwindawo enkulu, kunye nokutshiza okusabelayo (iTiN, i-ITO, i-CrOx), izixhobo zamandla ze-MF zibonelela ngokuphumelela okuphezulu kunye nokusebenza kakuhle kweendleko.
Kwimveliso yemizi-mveliso emikhulu, izixhobo zamandla ze-MF zibonelela ngozinzo olungcono lwenkqubo yexesha elide
Kwizinto zokwaleka ezibonakalayo nezisebenza ngokuchanekileyo, izixhobo zamandla ze-RF zibonelela ngokufana okuphuculweyo kunye nolawulo lokwakheka.
Izixhobo zamandla ze-RF kunye ne-MF nganye zibonelela ngeenzuzo ezahlukeneyo kwizicelo zokugquma nge-vacuum, ukufaneleka kwazo kuxhomekeke kwiipropati zezinto ezijoliswe kuzo, uhlobo lokugquma, amandla emveliso, kunye nokuqwalaselwa kweendleko.
Njengoko uphahla lwemizi-mveliso luqhubeka lutshintsha, izixhobo zamandla ze-MF ziba lukhetho oluphambili kwimveliso yobuninzi esebenza kakuhle, ehambelanayo, ngelixa izixhobo zamandla ze-RF zihlala ziyimfuneko kwifilimu ye-optical-grade kunye ne-dielectric.
Ukujonga phambili, uyilo lwamandla adibeneyo kunye neetekhnoloji zolawulo lwamandla ezikrelekrele kulindeleke ukuba ziphucule ngakumbi uzinzo lwenkqubo kunye nokusebenza kokwaleka.
-Eli nqaku lipapashwe nguizixhobo zokugquma nge-vacuum umenzi we-Zhenhua Vacuum
Ixesha leposi: Jan-27-2026