Itandukaniro riri hagati y'amashanyarazi akoresha inshuro nyinshi n'akoresha inshuro ziciriritse mu gutwikira ibyuma bivamo umwuka

Muri magnetrongusohora amaraso no gushyira mu marasoUburyo bwo gukora, ubwoko bw'amashanyarazi bugira uruhare runini mu kugena uburyo plasma ihagaze neza, imikorere myiza yo gusohora amata, ubucucike bwa filime, n'uburyo bwo gusubiramo ibikorwa.

Ubwoko bw'amashanyarazi akoreshwa cyane ni amashanyarazi ya Radio Frequency (RF) n'amashanyarazi ya Medium Frequency (MF), atandukanye cyane mu bijyanye n'umuvuduko w'imikorere, uburyo bwo gusohora, uburyo bwo guhuza intego, n'imikorere y'imikorere.

Guhitamo amashanyarazi akwiye ni ingenzi mu kunoza ireme ry'ipamba, umusaruro uvamo, no guhagarara neza kwa sisitemu.

Ingufu za RF zikunze gukora kuri 13.56 MHz kandi zikoreshwa cyane cyane mu gukwirakwiza ibipimo by’ubushyuhe nka SiO₂, Al₂O₃, na TiO₂.

Ibiranga tekiniki:

Irinda ko plasma isohoka mu buryo buhamye binyuze mu ishanyarazi risimburana

Birinda ubwinshi bw'amashanyarazi ku buso bukingira ubushyuhe

Bikwiriye gushyiramo filime za dielectric, irangi ry'urumuri, n'ibice by'ingufu bya okiside

Itanga uburyo bwiza bwo gukoresha plasma mu buryo bunoze cyane

Ibyiza:

Ihuye n'ibipimo bidakoresha amashanyarazi

Gusohora amazi mu buryo buhamye no gusohora amazi mu buryo bumwe

Igenzura ryinshi ry'ibikubiye mu nganda n'imikorere myiza y'urumuri

Inzitizi:

Igiciro cy'ubuhanga kiri hejuru

Ubucucike bw'ingufu buri hasi n'igipimo gito cyo gushyiramo

Ibisabwa mu guhuza impedance mu buryo bugoye

Ingufu zikoreshwa mu gupima ikirere hagati (MF) zikunze gukora hagati ya 10–200 kHz kandi zikoreshwa cyane muri sisitemu ebyiri za magnetron no mu buryo bwo gukwirakwiza amashanyarazi, cyane cyane ku bikoresho by'icyuma n'iby'icyuma bikozwe muri okiside.

Ibiranga tekiniki:

Ikoresha uburyo bwo gusohora umwuka uhindagurika mu buryo bwa bipolar, ikagabanya ubwinshi bw'amashanyarazi ku buso bw'intego

Bigabanya neza uburyo bwo guhagarara, bikongera uburyo bwo guhagarara neza

Ishyigikira ubucucike bw'ingufu nyinshi, bigatuma igipimo cyo gushyiramo ibintu kiri hejuru

Ikwiriye cyane gusiga irangi mu buso bunini no mu nganda

Ibyiza:

Igipimo cyo hejuru cyo gutanga amafaranga n'umusaruro mwiza cyane

Ni byiza cyane ku ntego ziyobora amashanyarazi no kuvura indwara ziterwa n'ingufu

Kongera ubushobozi bwo gukumira arc no kwizera imikorere yayo

Ihendutse kandi yoroheye kuyibungabunga

Inzitizi:

Ntibikwiriye ahantu harinda ubushyuhe bwinshi

Ubumwe bwa plasma bushobora gusaba kunozwa binyuze mu gushushanya imbaraga za rukuruzi n'imigendekere ya gaze

Ku bikoresho bikingira cyane (filime z'urumuri n'iz'amashanyarazi), amashanyarazi ya RF aracyari igisubizo cyiza

Ku bijyanye n'ingufu z'icyuma, gusiga ahantu hanini, no gusohora ingufu (TiN, ITO, CrOx), ingufu za MF zitanga umusaruro mwiza kandi zigatanga umusaruro mwiza.

Mu nganda zikora amashanyarazi menshi, ingufu za MF zitanga uburyo bwo gukomeza ibikorwa mu gihe kirekire

Ku bijyanye n'imyambaro yo mu rwego rwo hejuru ikora neza kandi ikora neza, ingufu za RF zitanga uburyo bwo guhuza no kugenzura imiterere y'ibikoresho.

Ingufu za RF na MF buri imwe itanga inyungu zihariye mu gukoresha irangi riva mu cyuma, kuko ubushobozi bwazo bugenwa n'imiterere y'ibikoresho byifashishwa, ubwoko bw'irangi, ubushobozi bwo gukora, n'ikiguzi.

Uko irangi ry’inganda rikomeza gutera imbere, ingufu za MF zirimo kuba amahitamo akomeye kugira ngo hakorwe neza kandi habeho imikorere myiza, mu gihe ingufu za RF zikomeje kuba ngombwa mu gushyira filime y’amashanyarazi mu rwego rwa optique na dielectric.

Mu gihe kiri imbere, imiterere y’ingufu zivanze n’ikoranabuhanga rigezweho ryo kugenzura ingufu byitezwe ko bizarushaho kunoza uburyo ibintu bihagaze neza no gusiga irangi.

-Iyi nkuru yasohotse naibikoresho byo gusiga irangi ry'umwuka uruganda rwa Zhenhua Vacuum