Nā ʻokoʻa ma waena o nā lako mana kiʻekiʻe-pinepine a me ka waena-pinepine i ka uhi ʻana o ka Vacuum

I loko o ka magnetronka hoʻoheheʻe ʻana a me ka waiho ʻana o ka plasmanā kaʻina hana, ke ʻano o ka lako mana e hoʻokani i kahi hana koʻikoʻi i ka hoʻoholo ʻana i ke kūpaʻa plasma, ka pono sputtering, ka nui o ke kiʻiʻoniʻoni, a me ka hana hou ʻana o ke kaʻina hana.

ʻO nā ʻano lako mana i hoʻohana nui ʻia ʻo ia nā lako mana Radio Frequency (RF) a me nā lako mana Medium Frequency (MF), kahi ʻokoʻa nui ma ke ʻano o ka alapine hana, ka ʻano hoʻokuʻu, ka hoʻohālikelike ʻana i ka pahuhopu, a me ka hana kaʻina hana.

He mea nui ke koho ʻana i ka lako mana kūpono no ka hoʻonui ʻana i ka maikaʻi o ka uhi ʻana, ka throughput hana, a me ke kūpaʻa o ka ʻōnaehana.

ʻO ka maʻamau, hana nā lako mana RF ma 13.56 MHz a hoʻohana nui ʻia no nā pahuhopu insulating sputtering e like me SiO₂, Al₂O₃, a me TiO₂.

Nā Hiʻohiʻona ʻenehana:

Mālama i ka hoʻokuʻu plasma paʻa ma o kahi kahua uila ʻē aʻe

Kāohi i ka hōʻiliʻili ʻana o ka uku ma nā ʻili pahuhopu insulating

He kūpono no ka waiho ʻana i nā kiʻiʻoniʻoni dielectric, nā uhi optical, a me nā papa oxide hana

Hāʻawi i ka like ʻana o ka plasma maikaʻi loa no nā noi kiʻiʻoniʻoni kiʻekiʻe

Nā Pōmaikaʻi:

Kūlike me nā pahuhopu alakaʻi ʻole

Hoʻokuʻu paʻa a me ka sputtering like

Ka mana hoʻohui kiʻekiʻe a me ka hana optical kiʻekiʻe

Nā Palena:

ʻO ke kumukūʻai ʻōnaehana kiʻekiʻe

ʻO ka nui o ka mana haʻahaʻa a me ka helu waiho palena

Nā koi hoʻohālikelike impedance paʻakikī

ʻO ka maʻamau, hana nā lako mana Medium Frequency (MF) ma ka pae 10-200 kHz a hoʻohana nui ʻia i nā ʻōnaehana dual-magnetron a me nā kaʻina hana sputtering reactive, ʻoi aku hoʻi no nā uhi metala a me ka metal-oxide.

Nā Hiʻohiʻona ʻenehana:

Hoʻohana i ka hoʻokuʻu bipolar alternating, e hōʻemi ana i ka hōʻiliʻili ʻana o ka uku ma nā ʻili i manaʻo ʻia

Hoʻemi pono i ke arcing, e hoʻomaikaʻi ana i ke kūpaʻa o ke kaʻina hana

Kākoʻo i ka nui o ka mana, e hiki ai ke kiʻekiʻe aʻe i nā helu waiho ʻana

He kūpono no ka uhi ʻana i nā wahi nui a me ka hana nui ʻana o nā ʻoihana

Nā Pōmaikaʻi:

ʻO ka nui o ka waiho ʻana a me ka throughput kiʻekiʻe

Kūpono no nā pahuhopu conductive a me ka reactive sputtering

Hoʻonui ʻia ka hoʻopau ʻana i ke arc a me ka hilinaʻi hana

Kūʻai kūpono me ka mālama maʻalahi

Nā Palena:

ʻAʻole kūpono no nā pahuhopu hoʻokaʻawale kiʻekiʻe

Pono paha ka hoʻonui ʻana i ke ʻano like o ka plasma ma o ke kahua magnetic a me ka hoʻolālā kahe kinoea

No nā mea hoʻokaʻawale kiʻekiʻe (nā kiʻiʻoniʻoni optical a me dielectric), ʻo nā lako mana RF ka hopena makemake nui ʻia

No nā uhi metala, ka waiho ʻana ma kahi nui, a me ka reactive sputtering (TiN, ITO, CrOx), hāʻawi nā lako mana MF i ka throughput kiʻekiʻe a me ka pono kumukūʻai.

I ka hana ʻoihana nui, hāʻawi nā lako mana MF i ka paʻa kaʻina hana lōʻihi.

No nā uhi hana optical kiʻekiʻe a me ka pololei, hāʻawi nā lako mana RF i ka like like a me ka kaohi haku mele ʻana.

Hāʻawi nā lako mana RF a me MF i nā pono kūikawā i nā noi uhi vacuum, me ko lākou kūpono i hoʻoholo ʻia e nā waiwai o ka mea i manaʻo ʻia, ke ʻano uhi, ka hiki ke hana, a me nā noʻonoʻo kumukūʻai.

I ka hoʻomau ʻana o ka ulu ʻana o ka uhi ʻana i nā ʻoihana, ke lilo nei nā lako mana MF i koho nui no ka hana nui ʻana me ka pono kiʻekiʻe a me ke kūlike, ʻoiai ʻo nā lako mana RF e pono mau ana no ka waiho ʻana o nā kiʻiʻoniʻoni optical-grade a me dielectric.

I ka wā e hiki mai ana, manaʻo ʻia nā ʻano hana mana hybrid a me nā ʻenehana kaohi mana akamai e hoʻoikaika hou aku i ke kūpaʻa o ke kaʻina hana a me ka hana uhi ʻana.

-Ua paʻi ʻia kēia ʻatikala enā lako hana uhi vacuum mea hana Zhenhua Vacuum