Qhov Sib Txawv Ntawm Cov Khoom Siv Fais Fab Zaus Siab Thiab Zaus Nruab Nrab Hauv Kev Txheej Tshuab Nqus Tsev

Hauv magnetronkev siv plasma sputtering thiab kev tso dej tawmcov txheej txheem, hom fais fab mov ua lub luag haujlwm tseem ceeb hauv kev txiav txim siab txog kev ruaj khov ntawm plasma, kev ua haujlwm ntawm sputtering, qhov ceev ntawm zaj duab xis, thiab kev rov ua dua ntawm cov txheej txheem.

Cov hom fais fab siv dav tshaj plaws yog cov khoom siv fais fab Radio Frequency (RF) thiab cov khoom siv fais fab Medium Frequency (MF), uas txawv ntau ntawm qhov zaus ua haujlwm, lub tshuab tso tawm, kev sib raug zoo ntawm lub hom phiaj, thiab kev ua haujlwm ntawm cov txheej txheem.

Kev xaiv lub hwj chim tsim nyog yog qhov tseem ceeb rau kev ua kom zoo dua qhov zoo ntawm cov txheej txheem, kev tsim khoom ntau lawm, thiab kev ruaj khov ntawm lub kaw lus.

Cov khoom siv fais fab RF feem ntau ua haujlwm ntawm 13.56 MHz thiab feem ntau yog siv rau kev sputtering insulating targets xws li SiO₂, Al₂O₃, thiab TiO₂.

Cov Nta Kev Txawj:

Tswj cov plasma tso tawm ruaj khov los ntawm kev hloov pauv hluav taws xob

Tiv thaiv kom tsis txhob muaj cov nqi hluav taws xob ntau dhau rau ntawm cov nplaim hluav taws xob uas tiv thaiv tau

Haum rau kev tso cov yeeb yaj kiab dielectric, cov txheej txheem kho qhov muag, thiab cov txheej oxide ua haujlwm

Muab cov plasma uniformity zoo heev rau cov ntawv thov zaj duab xis siab

Cov txiaj ntsig:

Sib xws nrog cov hom phiaj tsis-conductive

Kev tso tawm ruaj khov thiab kev sib xyaw ua ke

Kev tswj hwm cov khoom sib xyaw siab thiab kev ua haujlwm zoo dua ntawm lub teeb pom kev zoo

Cov Kev Txwv:

Tus nqi ntawm lub kaw lus siab dua

Qhov ceev fais fab tsawg dua thiab qhov tso nyiaj tsawg

Cov kev cai sib phim impedance nyuaj

Cov khoom siv fais fab Nruab Nrab Zaus (MF) feem ntau ua haujlwm hauv 10–200 kHz thiab siv dav hauv cov kab ke dual-magnetron thiab cov txheej txheem reactive sputtering, tshwj xeeb tshaj yog rau cov xim hlau thiab hlau-oxide coatings.

Cov Nta Kev Txawj:

Siv cov bipolar alternating discharge, txo cov nqi sib sau ua ke ntawm cov nto ntawm lub hom phiaj

Txo qhov arcing, txhim kho kev ruaj ntseg ntawm cov txheej txheem

Txhawb nqa lub zog ceev dua, ua rau muaj kev tso dej ntau dua

Zoo rau kev txheej txheej loj thiab kev tsim khoom loj hauv kev lag luam

Cov txiaj ntsig:

Tus nqi tso tawm siab thiab kev xa khoom zoo dua

Zoo tagnrho rau cov hom phiaj conductive thiab reactive sputtering

Kev tiv thaiv arc zoo dua thiab kev ntseeg siab ua haujlwm

Tus nqi tsim nyog nrog kev saib xyuas yooj yim

Cov Kev Txwv:

Tsis haum rau cov hom phiaj uas rwb thaiv tsev heev

Kev sib npaug ntawm cov ntshav yuav xav tau kev ua kom zoo dua los ntawm kev tsim cov khoom siv magnetic thiab cov roj ntws

Rau cov ntaub ntawv rwb thaiv tsev siab heev (cov yeeb yaj kiab kho qhov muag thiab dielectric), cov khoom siv fais fab RF tseem yog qhov kev daws teeb meem zoo tshaj plaws

Rau cov txheej hlau, kev tso dej loj hauv thaj chaw, thiab kev sib xyaw ua ke (TiN, ITO, CrOx), cov khoom siv fais fab MF muab kev ua haujlwm zoo dua thiab kev siv nyiaj tsawg.

Hauv kev tsim khoom lag luam ntau, MF cov khoom siv fais fab xa cov txheej txheem ruaj khov zoo dua mus sij hawm ntev

Rau cov txheej txheem kho qhov muag siab thiab kev ua haujlwm raug, cov khoom siv fais fab RF muab kev sib xws zoo dua thiab kev tswj hwm cov khoom sib xyaw.

Cov khoom siv fais fab RF thiab MF txhua tus muaj cov txiaj ntsig sib txawv hauv kev siv lub tshuab nqus tsev, nrog rau lawv qhov kev tsim nyog txiav txim siab los ntawm cov khoom siv lub hom phiaj, hom txheej, peev xwm tsim khoom, thiab kev txiav txim siab txog tus nqi.

Raws li kev lag luam txheej txheem txuas ntxiv mus, cov khoom siv fais fab MF tau dhau los ua qhov kev xaiv tseem ceeb rau kev ua haujlwm siab, kev sib xws siab, thaum cov khoom siv fais fab RF tseem yog qhov tseem ceeb rau kev tso cov yeeb yaj kiab optical thiab dielectric.

Saib mus tom ntej, cov qauv fais fab sib xyaw thiab cov thev naus laus zis tswj fais fab ntse yuav txhim kho kev ruaj khov ntawm cov txheej txheem thiab kev ua haujlwm ntawm cov txheej txheem.

- Tsab xov xwm no tau luam tawm los ntawmcov khoom siv nqus tsev txheej Chaw tsim khoom Zhenhua Lub Tshuab Nqus Tsev