Mumagnetronkusvuta uye kuiswa kweplasmamaitiro, rudzi rwemagetsi runoita basa rakakosha pakuona kugadzikana kweplasma, kushanda zvakanaka kwemuchina wekubuda kwemvura, huwandu hwemafirimu, uye kudzokorora kwemaitiro.
Mhando dzemagetsi dzinonyanya kushandiswa ndedzeRadio Frequency (RF) power supplies neMedium Frequency (MF), idzo dzinosiyana zvakanyanya maererano nefrequency yekushanda, discharge mechanism, target compatibility, uye process performance.
Kusarudza simba remagetsi rakakodzera kwakakosha pakuvandudza kunaka kwe coating, processing output, uye kugadzikana kwesystem.
Masimba eRF anowanzo shanda pa13.56 MHz uye anonyanya kushandiswa pakuisa zvinhu zvinodzivirira kupisa zvakaita seSiO₂, Al₂O₃, uye TiO₂.
Zvimiro zveUnyanzvi:
Inochengetedza kuburitswa kweplasma kwakasimba kuburikidza nemagetsi anochinjana
Inodzivirira kuungana kwechaja panzvimbo dzinodzivirira kupisa
Yakakodzera kuisa mafirimu e dielectric, machira e optical, uye functional oxide layers
Inopa kufanana kwakanaka kweplasma pamafirimu anoshandiswa nemazvo
Zvakanakira:
Inoenderana nezvinangwa zvisiri zvekufambisa mhepo
Kubuda kwemvura kwakasimba uye kusviba kwakafanana
Kudzora kwakawanda kwekugadzira uye kushanda kwepamusoro kwemaziso
Miganhu:
Mutengo wepamusoro wehurongwa
Kuwanda kwesimba rakaderera uye mwero mudiki wekuisa zvinhu
Zvinodiwa zvekufananidza impedance zvakaoma
Magetsi eMedium Frequency (MF) anowanzo shanda muchikamu che10–200 kHz uye anoshandiswa zvakanyanya mu dual-magnetron systems uye maitiro e reactive sputtering, kunyanya kune metallic ne metal-oxide coatings.
Zvimiro zveUnyanzvi:
Inoshandisa bipolar alternating discharge, ichideredza kuunganidzwa kwechaji panzvimbo dzakatarwa
Zvinobudirira zvinoderedza arcing, zvichivandudza kugadzikana kwemaitiro
Inotsigira huwandu hwesimba rakawanda, zvichiita kuti mitengo yekuisa zvinhu ikwire
Yakakodzera kuputira munzvimbo huru uye kugadzirwa kwemaindasitiri akawanda
Zvakanakira:
Mwero wepamusoro wekuisa uye kugona kwepamusoro
Yakanakira zvinangwa zvinofambisa mhepo uye zvinokanganisa mhepo
Kudzikiswa kwearc kwakawedzerwa uye kuvimbika kwekushanda
Inochengetedza mari shoma uye kugadzirisa kuri nyore
Miganhu:
Hazvina kukodzera nzvimbo dzinodzivirira kupisa zvakanyanya
Kufanana kweplasma kungada kugadziriswa kuburikidza nemagnetic field uye dhizaini yekuyerera kwegasi
| Chinhu Chekuenzanisa | Simba reRF | Simba reMF |
|---|---|---|
| Kushanda Kakawanda | 13.56 MHz | 10–200 kHz |
| Kuenderana Kwakanangwa | Zvinangwa zvekudzivirira / Oxide | Zvinangwa zvesimbi / zvinopindura |
| Mwero weKuisa Mari | Pakati Nepakati kusvika Pazasi | Yakakwirira |
| Kudzvinyirira Arc | Zviri pakati nepakati | Zvakanakisa |
| Kugadzikana kwePlasma | Yakakwirira | Yakakwirira |
| Mutengo weSisitimu | Yepamusoro | Zasi |
| Maitiro Akajairika | Mafirimu Ekuona Uye Anoshanda | Mapendi eIndasitiri & Ekushongedza |
Kune zvinhu zvinodzivirira kupisa zvakanyanya (mafirimu emaziso uye e-dielectric), magetsi eRF anoramba ari mhinduro inosarudzwa
Pakuputira simbi, kuisa simba munzvimbo yakakura, uye kupwanya simba (TiN, ITO, CrOx), magetsi eMF anopa simba repamusoro uye kushanda zvakanaka kwemari.
Mukugadzirwa kwemaindasitiri akawanda, magetsi eMF anopa kugadzikana kuri nani kwenguva refu
Kune machira emagetsi epamusoro-soro uye anoshanda nemazvo, magetsi eRF anopa hunhu hwakafanana uye kutonga kwemusanganiswa.
Magetsi eRF neMF anopa mabhenefiti akasiyana mukushandiswa kwe vacuum coating, uye kukodzera kwawo kunoenderana nehunyanzvi hwezvinhu, rudzi rwe coating, kugona kwekugadzira, uye mitengo.
Sezvo kuputira kwemaindasitiri kuri kuramba kuchichinja, magetsi eMF ari kuve sarudzo huru yekugadzira huwandu hunoshanda zvakanyanya uye hwakafanana, nepo magetsi eRF achiramba akakosha pakuisa mafirimu emagetsi uye emagetsi.
Tichitarisa mberi, magadzirirwo emagetsi akasanganiswa uye matekinoroji ekutonga simba akangwara anotarisirwa kuwedzera kugadzikana kwemaitiro uye kushanda kwependi.
-Chinyorwa ichi chakabudiswa namidziyo yekunamira ye vacuum mugadziri Zhenhua Vacuum
Nguva yekutumira: Ndira-27-2026