Kusiyana Pakati pa Mphamvu Zamagetsi Zothamanga Kwambiri ndi Zapakati mu Vacuum Coating

Mu magnetronkuyeretsa ndi kuyeretsa plasmaNjira zamagetsi, mtundu wa magetsi umagwira ntchito yofunika kwambiri pozindikira kukhazikika kwa plasma, kugwira ntchito bwino kwa madontho, kuchuluka kwa filimu, komanso kubwerezabwereza kwa njira.

Mitundu yamagetsi yomwe imagwiritsidwa ntchito kwambiri ndi magetsi a Radio Frequency (RF) ndi magetsi a Medium Frequency (MF), omwe amasiyana kwambiri malinga ndi kuchuluka kwa ma frequency ogwirira ntchito, njira yotulutsira, kuyanjana kwa cholinga, ndi magwiridwe antchito a njira.

Kusankha magetsi oyenera ndikofunikira kwambiri kuti pakhale bwino utoto, mphamvu yopangira, komanso kukhazikika kwa makina.

Mphamvu zamagetsi za RF nthawi zambiri zimagwira ntchito pa 13.56 MHz ndipo zimagwiritsidwa ntchito makamaka pothira ma sputtering target monga SiO₂, Al₂O₃, ndi TiO₂.

Zinthu Zaukadaulo:

Imasunga kutuluka kwa plasma kokhazikika kudzera mumagetsi osinthika

Zimaletsa kusonkhana kwa mphamvu pamalo otetezera kutentha

Yoyenera kuyika mafilimu a dielectric, zokutira zowala, ndi zigawo zogwira ntchito za oxide

Amapereka kufanana kwabwino kwa plasma pakugwiritsa ntchito mafilimu olondola kwambiri

Ubwino:

Yogwirizana ndi zolinga zosayendetsa magetsi

Kutulutsa madzi kokhazikika komanso kutulutsa madzi kofanana

Kuwongolera kwakukulu kwa kapangidwe kake komanso magwiridwe antchito apamwamba kwambiri

Zoletsa:

Mtengo wokwera wa dongosolo

Kuchuluka kwa mphamvu yotsika komanso kuchuluka kochepa kwa malo osungira

Zofunikira zofananira zovuta za impedance

Mphamvu zamagetsi za Medium Frequency (MF) nthawi zambiri zimagwira ntchito pakati pa 10–200 kHz ndipo zimagwiritsidwa ntchito kwambiri mu ma dual-magnetron systems ndi njira zosinthira mphamvu zamagetsi, makamaka pazophimba zachitsulo ndi zitsulo-oxide.

Zinthu Zaukadaulo:

Amagwiritsa ntchito kutulutsa kwa bipolar alternating, kuchepetsa kuchuluka kwa mphamvu pamalo omwe akufuna

Amachepetsa bwino kugwedezeka kwa ma arc, ndikuwonjezera kukhazikika kwa njira

Imathandizira mphamvu zambiri, zomwe zimathandiza kuti mitengo yoyika ikhale yokwera kwambiri

Yoyenera kwambiri kupaka utoto waukulu komanso kupanga zinthu zambiri m'mafakitale

Ubwino:

Kuchuluka kwa malo osungiramo katundu komanso kuchuluka kwa malo osungiramo katundu

Yabwino kwambiri pa zolinga zoyendetsera komanso kutulutsa madzi mwachangu

Kuchepetsa kwa arc komanso kudalirika kwa magwiridwe antchito

Yotsika mtengo komanso yokonza mosavuta

Zoletsa:

Sikoyenera kugwiritsa ntchito zinthu zoteteza kwambiri kutentha

Kufanana kwa plasma kungafunike kukonzedwanso kudzera mu mphamvu ya maginito ndi kapangidwe ka kayendedwe ka mpweya

Pa zipangizo zotetezera kutentha kwambiri (mafilimu a kuwala ndi a dielectric), magetsi a RF akadali njira yabwino kwambiri

Pazophimba zitsulo, malo akuluakulu oikamo magetsi, ndi kutulutsa madzi (TiN, ITO, CrOx), magetsi a MF amapereka mphamvu yochulukirapo komanso kugwiritsa ntchito bwino ndalama.

Mu mafakitale ambiri opanga magetsi, magetsi a MF amapereka kukhazikika kwabwino kwa nthawi yayitali

Pazophimba zapamwamba zowunikira komanso zolondola, magetsi a RF amapereka kufanana kowonjezereka komanso kuwongolera kapangidwe kake.

Mphamvu zamagetsi za RF ndi MF zimapereka ubwino wosiyana pakugwiritsa ntchito zokutira vacuum, chifukwa kuyenerera kwawo kumatsimikiziridwa ndi katundu wa zinthu zomwe mukufuna, mtundu wa zokutira, mphamvu yopangira, ndi mtengo wake.

Pamene zokutira za mafakitale zikupitirirabe kusintha, magetsi a MF akukhala chisankho chachikulu pakupanga zinthu zambiri moyenera komanso mokhazikika, pomwe magetsi a RF akadali ofunikira kwambiri pakupanga mafilimu a optical-grade ndi dielectric.

Poganizira zam'tsogolo, zomangamanga zamagetsi zosakanikirana ndi ukadaulo wanzeru wowongolera mphamvu zikuyembekezeka kupititsa patsogolo kukhazikika kwa njira ndi magwiridwe antchito ophimba.

-Nkhaniyi yasindikizidwa ndizida zophikira zotsukira wopanga Zhenhua Vacuum