Umgaqo we-vacuum evaporation coating
1, Izixhobo kunye nenkqubo yomzimba yokugquma umphunga
Isixhobo sokugquma ivacuum evaporation senziwe ikakhulu ngamagumbi okufunxa kunye nenkqubo yokukhupha. Ngaphakathi kwegumbi le-vacuum, kukho umthombo we-evaporation (oko kukuthi i-evaporation heater), i-substrate kunye ne-substrate frame, i-substrate heater, inkqubo yokukhupha, njl.
Izinto zokugquma zifakwe kumthombo wokuphuphuma kwegumbi lokucoca, kwaye phantsi kweemeko eziphezulu ze-vacuum, zifudunyezwa ngumthombo we-evaporation ukuze uphume. Xa umndilili okhululekileyo weeathom zomphunga mkhulu kunobukhulu bomgca wegumbi lokufunxa, emva kokuba iiathom kunye neeathom zomphunga wefilim zibalekile kumphezulu womthombo womphunga, azifane zithintelwe kukungqubana kwezinye iiathom okanye iiathom, kwaye zifike ngokuthe ngqo kumphezulu wesubstrate eza kugqunywa. Ngenxa yokushisa okuphantsi kwe-substrate, i-particle vapor particles idibanisa kuyo kwaye yenze ifilimu.
Ukuze kuphuculwe ukunamathela kweeamolekyu ze-evaporation kunye ne-substrate, i-substrate inokuthi isebenze ngokufudumeza okufanelekileyo okanye ukucoca i-ion. Isigqubuthelo somphunga sevacuum sihamba kwezi nkqubo zilandelayo zomzimba ukusuka kumoya wezinto eziphathekayo, ukuthuthwa ukuya ekufakweni kwifilimu.
(1) Ukusebenzisa iindlela ezahlukahlukeneyo zokuguqula ezinye iindlela zamandla kumandla obushushu, izinto zefilimu zifudunyezwa ukuba zibe ngumphunga okanye zibe ngamasuntswana egesi (athom, iimolekyuli okanye amaqoqo eathom) kunye nomlinganiselo othile wamandla (0.1 ukuya kwi-0.3 eV).
(2) I-Gaseous particles ishiya umphezulu wefilimu kwaye ihanjiswa kwindawo ye-substrate ngesantya esithile sokunyakaza, ngokusisiseko ngaphandle kokungqubana, kumgca ochanekileyo.
(3)Amasuntswana egesi afikelela kumphezulu we-substrate coalesce kunye ne-nucleate, aze akhule abe yifilim yesigaba esiqinileyo.
(4)Ulungelelwaniso ngokutsha okanye ukudibanisa imichiza yeeathom ezenza ifilimu.
2. Ukufudumeza umphunga
(1) Ukuxhathisa ukufudumeza umphunga
Ukumelana nokufudumeza ukufudumeza komphunga yeyona ndlela ilula kwaye isetyenziswa ngokuqhelekileyo kwizixhobo zokugquma ezinendawo yokunyibilika engaphantsi kwe-1500 ℃, iqondo eliphezulu lokunyibilika kweentsimbi kucingo okanye kwimilo yeshiti (W, Mo, Ti, Ta, boron nitride, njl. izinto zokucwenga, imilo yomthombo wokuphuma komphunga ikakhulu ibandakanya i-multi-strand spiral, i-U-shaped, i-sine wave, ipleyiti ebhityileyo, isikhephe, ibhaskithi yekowuni, njl. Kwangaxeshanye, indlela ifuna ukuba umthombo womphunga ube nomphunga ube neqondo eliphezulu lokunyibilika, uxinzelelo lomphunga oluphantsi, iipropati ezizinzileyo zeekhemikhali, zingabi namachiza okusabela kwimichiza kunye nezinto zokwaleka kwiqondo lokushisa eliphezulu, utshintsho oluphezulu lobushushu, ukuchasana nobushushu obuphezulu, ubushushu obuncinci bangoku, ukuchasana nobushushu obuphezulu, ubushushu obuncinci bangoku, ukuchasana nobushushu obuphezulu, ubushushu obuncinci, ubushushu obuphezulu, ubushushu obuphezulu, ubushushu obuncinci, ubushushu obuphezulu, ubushushu obuncinci, ubushushu obuphezulu, ubushushu obuncinci, ubushushu obuphezulu, ubushushu obuncinci, ubushushu obuphezulu, ubushushu obuphezulu, ubushushu obuphezulu, ubushushu obuphezulu, ubushushu obuphezulu, ubushushu obuphezulu, ubushushu obuphezulu, ubushushu obuphezulu, ubushushu obuphezulu, ubushushu obuphezulu, ubushushu obuncinci. umthombo ukuyenza ifudumale kwaye ikhuphe izinto zefilimu ngokufudumeza ngokuthe ngqo, okanye ubeke izinto zefilimu kwi-crucible eyenziwe ngegraphite kunye neeoksidi ezithile zetsimbi ezixhathisa ubushushu obuphezulu (ezifana ne-A202, B0) kunye nezinye izinto zokufudumeza ngokungathanga ngqo ukuze ziguquke.
Ukumelana nokufudumeza ukufudumala kwe-evaporation coating kunemida: isinyithi esiphikisayo sinoxinzelelo oluphantsi lomphunga, okunzima ukwenza ifilimu encinci; ezinye izinto zilula ukwenza i-alloy kunye nocingo lokufudumeza; akulula ukufumana ukubunjwa okufanayo kwefilimu ye-alloy. Ngenxa yesakhiwo esilula, ixabiso eliphantsi kunye nokusebenza okulula kwendlela yokumelana nokufudumeza ukufudumeza, sisicelo esiqhelekileyo sendlela yokuphuma.
(2) Umqadi we-electron wokufudumeza umphunga
I-Electron beam evaporation yindlela yokukhupha izinto zokugquma ngokuyibhobhoza nge-high-energy density electron beam ngokuyibeka kwi-crucible yobhedu epholileyo ngamanzi. Umthombo we-evaporation uquka umthombo wokukhutshwa kwe-electron, umthombo wamandla okunyusa i-electron, i-crucible (ngokuqhelekileyo i-copper crucible) , i-coil field magnetic, kunye nesethi yamanzi okupholisa, njl. i-crucible, enokuthi ithathwe njengenxalenye yebhombu ye-crucible. Ke, indlela yokufudumeza komqadi we-elektroni ukwenzela ukuba abe ngumphunga inokuthintela ungcoliseko phakathi kwezinto zokwaleka kunye nemathiriyeli yomthombo womoya.
Isakhiwo somthombo we-electron beam evaporation inokwahlulwa ibe ziindidi ezintathu: imipu ethe tye (i-Boules guns) , imipu yeringi (i-electric deflected) kunye ne-e-guns (i-magnetic deflected). Ikhreyibhile enye okanye ngaphezulu inokubekwa kwindawo yokuphuphuma komphunga, enokuthi ibe ngumphunga kwaye ifake izinto ezininzi ezahlukeneyo ngaxeshanye okanye ngokwahlukeneyo.
Imithombo yokukhutshwa komqadi we-electron inezi nzuzo zilandelayo.
①Uxinaniso oluphezulu lomqadi womthombo we-electron beam bombardment evaporation unokufumana amandla amakhulu kakhulu kunomthombo wokufudumeza wokuxhathisa, onokukhupha izinto eziphezulu zokunyibilika, ezifana ne-W, Mo, Al2O3, njl.
②Impahla yokugquma ifakwe kwi-crucible yethusi epholileyo yamanzi, enokuthi igweme ukukhupha i-evaporation yomthombo we-evaporation, kunye nokusabela phakathi kwabo.
③Ubushushu bungongezwa ngokuthe ngqo kumphezulu wemathiriyeli yokugquma, eyenza ukuba ukusebenza kwe-thermal kuphakame kunye nelahleko yokuqhuba ubushushu kunye nemitha yobushushu ephantsi.
Ukungalungi kwendlela yokufudumeza komqadi we-electron kukuba ii-electron eziziiprayimari ezivela kumpu we-electron kunye nee-electron zesibini ukusuka kumphezulu wezinto zokwaleka ziya ku-ionize iiathom eziphuphumayo kunye neemolekyuli zerhasi ezishiyekileyo, eziya kuchaphazela umgangatho wefilimu ngamanye amaxesha.
(3) Ubushushu obuphezulu bokwenziwa kobushushu
I-high-frequency induction heat evaporation kukubeka i-crucible nge-coating material kumbindi we-high-frequency spiral coil, ukwenzela ukuba izinto zokugquma zivelise i-eddy yangoku kunye nefuthe le-hysteresis phantsi kokufakwa kwe-high-frequency electromagnetic field, ebangela ukuba umaleko wefilimu ufudumale ude ube ngumphunga kwaye ukhuphe. Umthombo wokuguquka kwamanzi ngokubanzi uquka icoil epholileyo yamanzi kunye negraphite okanye i-ceramic (i-magnesium oxide, i-aluminium oxide, i-boron oxide, njl.) Unikezelo lwamandla ombane oluphezulu lusebenzisa ukuphindaphindwa kwamawaka alishumi ukuya kumakhulu aliqela amawaka eHz, amandla egalelo aliqela ukuya kumakhulu aliqela eekilowatts, amancinane umthamo wezinto zenwebu, kokukhona unyuka umvandedwa wokungeniswa. I-coil frequency induction yenziwa ngetyhubhu yethusi epholileyo ngamanzi.
Ukungalungi kwendlela yokufudumala i-high-frequency induction heat evaporation kukuba akulula ukulungelelanisa amandla okufakwayo, ineenzuzo ezilandelayo.
①Izinga eliphezulu lokunyuka komphunga
②Ubushushu bomthombo wokuphuphuma komphunga bufana kwaye buzinzile, ngoko akukho lula ukuvelisa isenzeko sokutshiza kwamathontsi, kwaye kunokunqanda isenzeko semibhobho kwifilimu egciniweyo.
③Umthombo wokuguquka kwamanzi ulayishwe kube kanye, kwaye ubushushu bulula kwaye kulula ukubulawula.
Ixesha lokuposa: Oct-28-2022