Theknoloji ea ho tlosa mouoane oa lik'hemik'hale (CVD) ke theknoloji e etsang filimi e sebelisang ho futhumatsa, ho ntlafatsa plasma, ho thusoa ke foto le mekhoa e meng ho etsa hore lintho tse nang le khase li hlahise lifilimi tse tiileng holim'a substrate ka karabelo ea lik'hemik'hale tlas'a khatello e tloaelehileng kapa e tlase.
Ka kakaretso, karabelo eo reactant e leng khase mme e 'ngoe ea lihlahisoa e le solid e bitsoa CVD reaction. Ho na le mefuta e mengata ea liphahlo tse lokisitsoeng ke CVD reaction, haholo-holo ts'ebetsong ea semiconductor. Mohlala, tšimong ea semiconductor, ho hloekisoa ha thepa e tala, ho lokisoa ha lifilimi tsa kristale e le 'ngoe ea semiconductor tsa boleng bo holimo, le kholo ea lifilimi tsa polycrystalline le amorphous, ho tloha lisebelisoa tsa elektroniki ho ea lipotolohong tse kopaneng, kaofela li amana le theknoloji ea CVD. Ho phaella moo, kalafo ea bokaholimo ba thepa e ratoa ke batho. Mohlala, lisebelisoa tse fapaneng tse kang mechini, reactor, sefofane, lisebelisoa tsa bongaka le tsa lik'hemik'hale li ka sebelisoa ho lokisa liphahlo tse sebetsang tse nang le khanyetso ea mafome, khanyetso ea mocheso, khanyetso ea ho tsofala le ho matlafatsoa ha bokaholimo ka mokhoa oa ho etsa filimi ea CVD ho latela litlhoko tsa tsona tse fapaneng.
—— Sengoloa sena se phatlalalitsoe ke Guangdong Zhenhua, moetsi oalisebelisoa tsa ho roala ka vacuum
Nako ea poso: Hlakubele-04-2023