Teknụzụ vapor nke kemịkalụ (CVD) bụ teknụzụ na-emepụta ihe nkiri nke na-eji kpo oku, nkwalite plasma, enyemaka foto na ụzọ ndị ọzọ iji mee ka ihe gas na-emepụta ihe nkiri siri ike n'elu ala site na mmeghachi omume kemịkalụ n'okpuru nrụgide nkịtị ma ọ bụ dị ala.
N'ozuzu, mmeghachi omume nke reactant bụ gas na otu n'ime ngwaahịa ndị siri ike ka a na-akpọ mmeghachi omume CVD.Enwere ọtụtụ ụdị mkpuchi a kwadebere site na mmeghachi omume CVD, ọkachasị na usoro semiconductor.Dịka ọmụmaatụ, na mpaghara semiconductor, nchacha nke akụrụngwa, nkwadebe nke semiconductor otu ihe nkiri kristal dị elu, na uto nke ihe nkiri polycrystalline na amorphous, site na ngwaọrụ eletrọnịkị gaa na sekit jikọtara, niile metụtara teknụzụ CVD.Na mgbakwunye, ọgwụgwọ elu nke ihe na-amasị ndị mmadụ.Dịka ọmụmaatụ, enwere ike iji ihe dị iche iche dị ka igwe, reactor, aerospace, ọgwụ na kemịkalụ iji kwadebe mkpuchi na-arụ ọrụ na nguzogide corrosion, nguzogide okpomọkụ, eyi nguzogide na ike elu site na usoro ihe nkiri CVD dị ka ihe dị iche iche chọrọ.
——bụ nke Guangdong Zhenhua, onye na-emepụta ihe na-ebipụta akụkọ aakụrụngwa mkpuchi agụụ
Oge nzipu: Mar-04-2023