Ukadaulo wa Chemical Npor Deposition (CVD) ndi ukadaulo wopanga filimu womwe umagwiritsa ntchito kutentha, kuwonjezera plasma, kugwiritsa ntchito photo-assisted ndi njira zina zopangira mpweya kupanga mafilimu olimba pamwamba pa substrate kudzera mu chemical reaction pansi pa mphamvu yachibadwa kapena yochepa.
Kawirikawiri, momwe reactant imagwirira ntchito ndi mpweya ndipo chimodzi mwa zinthuzo ndi cholimba chimatchedwa CVD reaction. Pali mitundu yambiri ya zokutira zomwe zimakonzedwa ndi CVD reaction, makamaka mu njira ya semiconductor. Mwachitsanzo, m'munda wa semiconductor, kuyeretsa zipangizo zopangira, kukonzekera mafilimu apamwamba a semiconductor single crystal, komanso kukula kwa mafilimu a polycrystalline ndi amorphous, kuyambira pazida zamagetsi mpaka ma circuits ophatikizidwa, zonse zimagwirizana ndi ukadaulo wa CVD. Kuphatikiza apo, chithandizo cha pamwamba pa zipangizo chimakondedwa ndi anthu. Mwachitsanzo, zipangizo zosiyanasiyana monga makina, reactor, ndege, zida zamankhwala ndi mankhwala zingagwiritsidwe ntchito kukonzekera zokutira zogwira ntchito zotsutsana ndi dzimbiri, kukana kutentha, kukana kuvala komanso kulimbitsa pamwamba pogwiritsa ntchito njira yopangira filimu ya CVD malinga ndi zosowa zawo zosiyanasiyana.
—— Nkhaniyi yafalitsidwa ndi Guangdong Zhenhua, wopangazida zophikira zotsukira
Nthawi yotumizira: Marichi-04-2023