Ikoranabuhanga ryo Gukuraho Umwotsi w’Ikinyabutabire (CVD) ni ikoranabuhanga rikora filime rikoresha ubushyuhe, kongera plasma, gukoresha ifoto n'ubundi buryo kugira ngo ibintu bifite imyuka bikore filime zikomeye ku buso bw'ubutaka binyuze mu gukora shimi mu gihe cy'umuvuduko usanzwe cyangwa muke.
Muri rusange, uburyo reaktant iba gaze kandi imwe mu bicuruzwa ikaba ikomeye yitwa CVD reaction. Hari ubwoko bwinshi bw'imyambaro itegurwa na CVD reaction, cyane cyane mu nzira ya semiconductor. Urugero, mu rwego rwa semiconductor, gutunganya ibikoresho fatizo, gutegura filime za semiconductor nziza cyane, no gukura kwa filime za polycrystalline na amorphous, kuva ku bikoresho by'ikoranabuhanga kugeza ku byuma bihujwe, byose bifitanye isano n'ikoranabuhanga rya CVD. Byongeye kandi, gutunganya hejuru y'ibikoresho bikundwa n'abantu. Urugero, ibikoresho bitandukanye nka imashini, reactor, indege, ibikoresho by'ubuvuzi n'ibinyabutabire bishobora gukoreshwa mu gutegura imashini zikora zifite ubudahangarwa bwo kwangirika, ubushyuhe, ubudahangarwa bwo kwangirika no gukomeza ubuso hakoreshejwe uburyo bwo gukora filime ya CVD hakurikijwe ibyo zikeneye bitandukanye.
—— Iyi nkuru yasohotse na Guangdong Zhenhua, uruganda rukoraibikoresho byo gusiga irangi ry'umwuka
Igihe cyo kohereza: Werurwe-04-2023