Thepa e sebelisa theknoloji ea electron beam evaporation. Li-electrone li ntšoa ho tloha ho cathode filament 'me li tsepamisitsoe ka har'a sepakapaka se itseng, se potlakisoang ke bokhoni bo pakeng tsa cathode le crucible ho qhibiliha le ho fetoha mouoane thepa ea ho roala. E na le litšobotsi tsa matla a phahameng a matla 'me e ka etsa mouoane thepa ea ho roala ka ntlha e qhibilihang e fetang 3000 ℃. Filimi e na le bohloeki bo phahameng le bokhoni bo phahameng ba mocheso.
Thepa e na le mohloli oa elektrone beam evaporation, mohloli oa ion, sistimi ea ho shebella botenya ba filimi, sebopeho sa tokiso ea botenya ba filimi le sistimi e tsitsitseng ea ho potoloha likhele. Ka thuso ea mohloli oa ion, compactness ea filimi e eketseha, index ea refractive e tsitsitse, 'me ketsahalo ea ho fetoha ha maqhubu ka lebaka la mongobo e qojoa. Sistimi e felletseng ea botenya ba filimi ea nako ea nnete e ka netefatsa ho pheta-pheta le botsitso ba ts'ebetso. E na le ts'ebetso ea "self melting" ho fokotsa ho itšetleha ka bokhoni ba opareitara.
Thepa e sebetsa ho li-oxide tse fapaneng le lisebelisoa tsa ho roala tšepe, 'me e ka koaheloa ka lifilimi tse ngata tse hlakileng tsa optical, tse kang filimi ea AR, leqhubu le lelelele, leqhubu le lekhutšoane, filimi e khanyang, filimi ea AS / AF, IRCUT, tsamaiso ea filimi ea mebala, tsamaiso ea filimi ea gradient, joalo-joalo. etc.