Astaamaha dahaarka sputtering magnetron
(3) Tamar yar oo soo baxda. Sababtoo ah danabka yar ee cathode-ka ee lagu dabaqay bartilmaameedka, balaasmaha waxaa ku xidhma goobta birlabta ee ku taal meel u dhow cathode-ka, sidaas darteedna waxay joojinaysaa walxaha tamarta sare leh ee ku shaqeeya dhinaca substrate-ka ee dadka la toogtay. Sidaa darteed, heerka dhaawaca ee substrate-ka sida aaladaha semiconductor-ka ee ay sababaan duqaynta walxaha la dallacay ayaa ka hooseeya kan ay sababaan hababka kale ee sputtering-ka.
(4) Heerkulka substrate-ka oo hooseeya. Heerka faafinta magnetron-ka ee faafinta magnetron-ka ayaa sarreeya, sababtoo ah bartilmaameedka katooliga ee goobta birlabta ee gobolka dhexdiisa, taas oo ah, wadada daadinta bartilmaameedka ee ku taal meel yar oo ku taal fiirsashada elektarooniga ayaa sarreeya, halka saamaynta birlabta ee ka baxsan gobolka, gaar ahaan meel ka fog goobta birlabta ee dusha sare ee substrate-ka ee u dhow, fiirsashada elektarooniga ay sabab u tahay kala firdhinta aadka u hooseysa, xitaa waxay ka hooseyn kartaa faafinta dipole-ka (sababtoo ah farqiga u dhexeeya labada cadaadis gaas oo shaqeynaya oo leh kala duwanaansho weyn). Sidaa darteed, xaaladaha faafinta magnetron-ka, fiirsashada elektaroonada duqeeya dusha sare ee substrate-ka ayaa aad uga hooseeya kan faafinta diode-ka caadiga ah, iyo kororka xad-dhaafka ah ee heerkulka substrate-ka waa laga fogaadaa sababtoo ah hoos u dhaca tirada dhacdooyinka elektaroonada ee substrate-ka. Intaa waxaa dheer, habka buufinta magnetron, anode-ka qalabka buufinta magnetron waxaa laga heli karaa agagaarka cathode-ka, qofka haysta substrate-kana sidoo kale waa la furi karaa oo wuxuu ku jiri karaa awood joojin, si elektaroonada aysan u dhex marin hayaha substrate-ka dhulka ku yaal oo ay uga soo qulqulaan anode-ka, taasoo ka dhigaysa elektaroonada tamarta sare leh ee duqeeya substrate-ka la dahaadhay mid yar, taasoo yaraynaysa kororka kulaylka substrate-ka ee ay keento elektaroonada, iyo si weyn u yareynaya duqeynta elektaroonigga labaad ee substrate-ka taasoo keenta soo saarista kulaylka.
(5) Qalin aan sinnayn oo bartilmaameedka ah. Bartilmaameedka xoqidda magnetron-ka ee dhaqameed, isticmaalka goob birlab ah oo aan sinnayn, sidaas darteed balaasmadu waxay soo saari doontaa saameyn isku-dhafan oo maxalli ah, waxay ka dhigi doontaa bartilmaameedka booska maxalliga ah ee heerka xoqidda xoqidda mid aad u fiican, natiijadu waxay tahay in bartilmaameedku uu soo saari doono qalin aan sinnayn oo muhiim ah. Heerka isticmaalka bartilmaameedku guud ahaan waa qiyaastii 30%. Si loo hagaajiyo heerka isticmaalka walxaha bartilmaameedka ah, waxaad qaadi kartaa tallaabooyin horumarineed oo kala duwan, sida hagaajinta qaabka iyo qaybinta goobta birlabka bartilmaameedka ah, si birlabka ku jira cathode-ka bartilmaameedka uu u sameeyo dhaqdhaqaaqa gudaha iwm.
Dhibaato ku saabsan faafinta bartilmaameedyada walxaha birlabta. Haddii bartilmaameedka faafinta uu ka samaysan yahay walax leh awood birlab sare leh, khadadka birlabka ee xoogga ayaa si toos ah u dhex mari doona gudaha bartilmaameedka si ay u dhacaan dhacdo birlab gaaban ah, taasoo ka dhigaysa dheecaanka birlabka ee booska adag. Si loo soo saaro goobta birlabka ee booska, dadku waxay sameeyeen daraasado kala duwan, tusaale ahaan, si ay u buuxiyaan goobta birlabka ee gudaha walxaha bartilmaameedka ah, taasoo ka tagaysa meelo badan oo bartilmaameedka ah si kor loogu qaado soo saarista daadashada badan ee heerkulka bartilmaameedka birlabka, ama si loo yareeyo marin-u-helka birlabka ee walxaha bartilmaameedka ah.
– Maqaalkan waxaa soo saaray ’’Qoraalkan waxaa soo saaray ’’soo saaraha mashiinka dahaadhka faakuumkaGuangdong Zhenhua
Waqtiga boostada: Diseembar-01-2023