Halaye na murfin magnetron sputtering Babi na 2

Halaye na shafi na magnetron sputtering

(3) Ƙarfin fitar da makamashi mai ƙarancin yawa. Saboda ƙarancin ƙarfin cathode da aka yi amfani da shi a kan abin da aka nufa, plasma ɗin yana ɗaure da filin maganadisu a sararin da ke kusa da cathode, don haka yana hana ƙwayoyin da ke da ƙarfin kuzari mai yawa zuwa gefen substrate ɗin da mutane suka harba. Saboda haka, matakin lalacewar substrate kamar na'urorin semiconductor da fashewar barbashi mai caji ke haifarwa ya yi ƙasa da wanda wasu hanyoyin sputtering ke haifarwa.

(4) Ƙananan zafin jiki na substrate. Yawan fitar da sinadarin Magnetron yana da yawa, saboda abin da cathode ke nufi a cikin filin maganadisu a cikin yankin, wato, hanyar fitar da sinadarin da aka nufa a cikin ƙaramin yanki na yawan sinadarin electron yana da yawa, yayin da a cikin tasirin maganadisu a wajen yankin, musamman nesa da filin maganadisu na saman substrate da ke kusa, yawan sinadarin electron saboda yaɗuwar ƙasa sosai, kuma yana iya zama ƙasa da na dipole sputtering (saboda bambanci tsakanin matsin iskar gas guda biyu masu aiki na tsari na girma). Saboda haka, a ƙarƙashin yanayin fitar da sinadarin magnetron, yawan sinadarin electrons da ke jefa saman substrate ya yi ƙasa da na diode sputtering na yau da kullun, kuma ana guje wa ƙaruwar zafin substrate da yawa saboda raguwar adadin electrons da ke faruwa akan substrate. Bugu da ƙari, a cikin hanyar fitar da magnetron, ana iya samun anode na na'urar fitar da magnetron a kusa da kewayen cathode, kuma ana iya cire mariƙin substrate ɗin kuma a cikin ƙarfin dakatarwa, don kada electrons su ratsa ta cikin mai riƙe substrate ɗin da aka yi ƙasa su kuma ratsa ta cikin anode ɗin, ta haka ne electrons masu ƙarfi da ke jefa bam a kan substrate ɗin da aka yi da fenti suka ragu, rage ƙaruwar zafin substrate da electrons ke haifarwa, da kuma rage yawan fashewar electron na biyu na substrate wanda ke haifar da samar da zafi.

(5) Gyaran maƙasudin da ba shi da daidaito. A cikin maƙasudin maƙasudin magnetron na gargajiya, amfani da filin maganadisu mara daidaituwa, don haka plasma zai samar da tasirin haɗuwa na gida, zai sa maƙasudin da ke kan matsayin gida na ƙimar etching na sputtering ya yi kyau, sakamakon shine maƙasudin zai samar da babban etching mara daidaituwa. Yawan amfani da maƙasudin gabaɗaya kusan kashi 30%. Domin inganta yawan amfani da kayan da aka nufa, zaku iya ɗaukar matakai daban-daban na haɓakawa, kamar inganta siffa da rarraba filin maganadisu da aka nufa, don haka maganadisu a cikin motsi na ciki na cathode da sauransu.

Wahala wajen fitar da abubuwan da ke haifar da sinadarin maganadisu. Idan an yi amfani da wani abu mai ƙarfin ƙarfin maganadisu, layukan ƙarfin maganadisu za su ratsa kai tsaye ta cikin abin da ake nufi don faruwar wani abu mai kama da maganadisu, wanda hakan ke sa fitar da sinadarin maganadisu ya zama da wahala. Domin samar da filin maganadisu na sararin samaniya, mutane sun gudanar da bincike iri-iri, misali, don cike filin maganadisu a cikin abin da ake nufi, suna barin gibi da yawa a cikin abin da ake nufi don haɓaka samar da ƙarin zubar da zafin jiki na maganadisu, ko kuma don rage ƙarfin maganadisu na abin da ake nufi.

– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua